Your SlideShare is downloading. ×
  • Like
  • Save
15.00 hr Schellens - Heinmade
Upcoming SlideShare
Loading in...5
×

Thanks for flagging this SlideShare!

Oops! An error has occurred.

×

Now you can save presentations on your phone or tablet

Available for both IPhone and Android

Text the download link to your phone

Standard text messaging rates apply

15.00 hr Schellens - Heinmade

  • 582 views
Published

 

Published in Education , Technology , Business
  • Full Name Full Name Comment goes here.
    Are you sure you want to
    Your message goes here
    Be the first to comment
    Be the first to like this
No Downloads

Views

Total Views
582
On SlideShare
0
From Embeds
0
Number of Embeds
0

Actions

Shares
Downloads
0
Comments
0
Likes
0

Embeds 0

No embeds

Report content

Flagged as inappropriate Flag as inappropriate
Flag as inappropriate

Select your reason for flagging this presentation as inappropriate.

Cancel
    No notes for slide

Transcript

  • 1. PIEZO AANDRIJVINGEN Hein Schellens HEINMADE B.V. High Tech Campus 9 5656 AE Eindhoven www.heinmade.com info@heinmade.com
  • 2. Content • Introduction HEINMADE • Actuators & Application example • Motors & Application example • Other applications examples • Summary 8 juni 2010, Actief positioneren in het 2/37 Mikrocentrum micrometergebied
  • 3. Introduction HEINMADE • Mechanical engineering, EUT • Researcher EUT (1995 – 2000 ) • Philips HTP (2001 – 2005 ) • HEINMADE (2005 – ????) 8 juni 2010, Actief positioneren in het 3/37 Mikrocentrum micrometergebied
  • 4. Actuators XYrZ stage driven by piezo actuator 8 juni 2010, Actief positioneren in het 4/37 Mikrocentrum micrometergebied
  • 5. Actuators Piezo is a ceramic with piezo-electric response; • Under pressure -> electrical field • Under electrical field -> strain + Extension ~ 0.5 nm/V (= 0.5 pm/mV) Maximum field 3 kV/mm. Maximum strain 0.15 %. Blocking force 40 N/mm2. _ 8 juni 2010, Actief positioneren in het 5/37 Mikrocentrum micrometergebied
  • 6. Actuators High voltage (> 500 V) • High Voltage > 500 V (layers 0.25 and 0.5 mm) • Low capacity ~ 1-1000 nF • Medium V-fields maximum 2 V/µm • Temperature range -273 oC tot +150 oC • Vacuum compatible / non magnetic 8 juni 2010, Actief positioneren in het 6/37 Mikrocentrum micrometergebied
  • 7. Actuators Low voltage (< 200 V) • Low Voltage < 200 V (layers 20, 50 or 66 µm) • High capacitance ~ 0.1-100 µF • High V-fields maximum 3 V/µm • Temperature range -273 oC tot +150 oC • Vacuum compatible / non magnetic Multi-layer _ + 8 juni 2010, Actief positioneren in het 7/37 Mikrocentrum micrometergebied
  • 8. Actuators Formula’s • Stroke per layer per V ~ 0.5 nm/V (0.5 pm/mV) • Stroke actuator ~ 0.5 x n x Vmax • Maximum voltage 3V/µm • Maximum stroke at 3V/um ~ 0.15% • Blocking force at 3V/um 40 N/mm2 • Capacitance ~ 2e-8 x n x A / t • In plane resonance freq. ~ 2000 / D • Axial resonance freq. ~ 2000 / h • Stiffness Blocking force / stroke n= number of layers, A= surface, t= layer thickness, D=diameter, h=height, 8 juni 2010, Actief positioneren in het 8/37 Mikrocentrum micrometergebied
  • 9. Actuators Formula’s Example: Disc diameter 40 mm, layer 100 µm, 20 layers • Maximum voltage 3x100 = 300 V • Maximum stroke at 3V/um 0.15% x 100 x 20 = 3 µm • Blocking force at 3V/um 40 x π x 20^2 = 50 kN • Capacitance 2e-8 x 20 x 1,25e-3 / 1e-4 = 5µF • In plane resonance 2000/40e-3 = 50 kHz • Axial resonance 2000/(20 x 1e-4) = 1 MHz • Stiffness 50e3 / 3e-6 = 1,7e10 N/m 8 juni 2010, Actief positioneren in het 9/37 Mikrocentrum micrometergebied
  • 10. Actuators Formula’s STEPS TO DESIGN YOUR OWN ACTUATOR 1. What force is required at max. stroke? Force (F) = 400 [N] 2. What stroke is required? Stroke (S) = 25 [µm] 3. What stiffness is required ? Stiffness (C) = 100 [N/µm] 4. Calculate blocking force ? Fbl = F + SxC = 2900 [N] 5. What is the free stroke of the actuator ? Sact = S + F/C = 29 [µm] 6. Surface of the actuator ? Aact = Fbl/40 = 72.5 [mm2] 7. Length of the actuator ? Lact = Sact / 1.4 = 21 [mm] 2900 Fbl [N] 400 Stroke [µm] 25 29 8 juni 2010, Actief positioneren in het 10/37 Mikrocentrum micrometergebied
  • 11. Actuators Application example Specification XYrZ stage • Stroke XY 400 µm (unloaded) • Rotation rZ 10 mrad (unloaded) • Voltage -30 V tot 150 V • Stiffness XY 1e6 N/m • Stiffness Z 2e7 N/m • Crosstalk < 1 % • Resolution +/- 1 µm (feedback by vision) • Resolution << 1 µm (other sensors) 8 juni 2010, Actief positioneren in het 11/37 Mikrocentrum micrometergebied
  • 12. Actuators Application example Specification amplifier • 3 axis • Voltage range from -30 to 150 V • Current max 30 mA • Noise 5 mV -> ~ 10 nm Option; controller with integrated amplifier 8 juni 2010, Actief positioneren in het 12/37 Mikrocentrum micrometergebied
  • 13. Actuators Application criteria General application criteria • Max stroke ~ 1 mm • Max stiffness ~ 1e8 N/m • Max accuracy ~ 1 nm • High frequent -> check heat > High stiffness & small stroke -> Custom made, lead time 6 weeks > Low stiffness & long stroke 8 juni 2010, Actief positioneren in het 13/37 Mikrocentrum micrometergebied
  • 14. Motors and Stages X stage driven by piezo motor
  • 15. Overview of motors Stepping mode; stick - Slip Moving Many examples: body - Smaract - Konica Minolta - Attocube - New Focus - Etc. 8 juni 2010, Actief positioneren in het 15/37 Mikrocentrum micrometergebied
  • 16. Overview of motors Stepping mode; Inchworm Burleigh Instruments 1975 Patent US 3902085 • Max speed ~ 1 mm/sec • Force ~ 50 N 8 juni 2010, Actief positioneren in het 16/37 Mikrocentrum micrometergebied
  • 17. Overview of motors Stepping mode; LPM Philips 1993 Patent EP 0592030 • Speed ~ 10 mm/sec • Force 50 N 8 juni 2010, Actief positioneren in het 17/37 Mikrocentrum micrometergebied
  • 18. Overview of motors Stepping mode; shear PATENTS; • Speed ~ 1 mm/sec • Rockwell • ASML • Force 50 N • Zeiss • PI 8 juni 2010, Actief positioneren in het 18/37 Mikrocentrum micrometergebied
  • 19. Overview of motors Stepping mode; bender Piezomotor Sweden Patent US6337532 • Speed ~ 10 mm/sec • Force 10 N 8 juni 2010, Actief positioneren in het 19/37 Mikrocentrum micrometergebied
  • 20. Overview of motors Piezo resonance motors Piezomotor (SE) • Speed ~ 500 mm/s PI (DE) • Force 1 to 4 N Nanomotion (Isr) 8 juni 2010, Actief positioneren in het 20/37 Mikrocentrum micrometergebied
  • 21. Overview of motors Structural resonance motors Newscale (USA) • Speed ~ 500 mm/s • Force < 1 N Miniswys (CH) Elliptec (DE) 8 juni 2010, Actief positioneren in het 21/37 Mikrocentrum micrometergebied
  • 22. Overview of motors Nanomotion Spring: looked with no power consumption at standstill 8 juni 2010, Actief positioneren in het 22/37 Mikrocentrum micrometergebied
  • 23. Overview of motors Nanomotion, examples Linear Stage Rotary stage Pan and Tilt Hexapod Objective stage Vacuum stage 8 juni 2010, Actief positioneren in het 23/37 Mikrocentrum micrometergebied
  • 24. Motors Application example • Total moving mass 0,5 kg • Stroke optical set up 10 mm X and Y • Stroke standard set up 50 mm X and Y • Speed maximum 20 mm/sec • Accuracy +/- 50 nm • Footprint ~125x125 mm • Motors inside Standard next to stage • Typical motion profile Steps of 1 mm in 30 msec wait 20 msec 8 juni 2010, Actief positioneren in het 24/37 Mikrocentrum micrometergebied
  • 25. Motors Application example How many elements are needed? 1. Each element has 4 N force. 2. Weight stage ~ 0,5 kg, added weight 0,5 kg. speed 3. Speed profile time 4. This means 0,5 mm in 15 msec; acc = 0,5e-3 / 0,5 / (15e- 3)^2 = 4,4 m/sec2 5. F=m x a = 1 x 4,4 = 4,4 N -> two elements for top stage. 6. Total weight for bottom stage is 2,5 kg -> F = 2,5 x 4,4 = 11 N (4 elements for bottom stage) 8 juni 2010, Actief positioneren in het 25/37 Mikrocentrum micrometergebied
  • 26. Motors Application example Check operation with work regime: 1. Work regime for both axis is work regime e. 2. At 25 degree C this corresponds with duty cycle of maximum 78%. 3. For the stage this is 30/50 = 60%. 8 juni 2010, Actief positioneren in het 26/37 Mikrocentrum micrometergebied
  • 27. Motors Application example 8 juni 2010, Actief positioneren in het 27/37 Mikrocentrum micrometergebied
  • 28. Motors Application example Specification XY stage • Stroke XY 12 mm (short stroke) • Stroke XY 50 mm (long stroke) • Flatness 10 µm • Stiffness X 3e6 & Y 2e6 N/m • Stiffness Z > 1e8 N/m • Resolution +/- 5 nm (optical encoder) • System accuracy +/- 50 nm • 2 axis controller 8 juni 2010, Actief positioneren in het 28/37 Mikrocentrum micrometergebied
  • 29. Motors Application criteria General application criteria • Max stroke ~ 1000 mm (unlimited) • Max stiffness ~ 2e7 N/m • Max accuracy ~ 10 nm • Max force 250 N • Max velocity 300 mm/sec • Min velocity 1 µm/sec -> Custom made, lead time 6 weeks 8 juni 2010, Actief positioneren in het 29/37 Mikrocentrum micrometergebied
  • 30. Other examples file name: Fseries 0°; Movement 1 um/s; start sample: 9321; stop sample: 13321 10 interferometer 8 position encoder 6 4 ] 2 m n [ n 0 o i t a i v -2 e d -4 -6 -8 -10 2.4 2.5 2.6 2.7 2.8 2.9 3 3.1 3.2 3.3 time [s] Impact / Fast Tool Servo Active Damping Slow nanomotion 8 juni 2010, Actief positioneren in het 30/37 Mikrocentrum micrometergebied
  • 31. Other examples Impact / Fast Tool Servo Impact tester for lifetime testing; • Force 10 kN • Acceleration 1000 g (~ 5 kHz) • Fully automated Similar to Fast Tool Servo; • Stroke 100 µm • Stiffness 5e8 N/m 8 juni 2010, Actief positioneren in het 31/37 Mikrocentrum micrometergebied
  • 32. Other examples Active damping • Mass ~ 1000 kg • Stiffness ~ 3e8 N/m • Amplitude vibrations max. 50 nm reduced to subnm • Cross talk factor > 10e4 (actuator 10 V, sensor < 1mV) 8 juni 2010, Actief positioneren in het 32/37 Mikrocentrum micrometergebied
  • 33. Other examples Slow nanomotion Amplifier piezo steppers. Controller for piezo steppers. Laser resolution 0.16 nm. Laser head. Added mass Underneath mass encoder with 1 nm resolution for servo. Cross roler bearing underneath mass NYCe 4000 controller Stepper Base of set-up Rubber damper Amplifier for fine tuning. Controlled by NYCe 4000 8 juni 2010, Actief positioneren in het 33/37 Mikrocentrum micrometergebied
  • 34. Other examples Slow nanomotion file name: Fseries 0°; Movement 1 um/s; start sample: 9321; stop sample: 13321 10 8 interferometer Performance: position encoder 6 • Speed 1 um/sec 4 ] 2 • Weight 20 kg m n [ n 0 o i t a i v e d -2 • Res. encoder 1 nm -4 -6 • Error encoder +/- 2 nm -8 -10 2.4 2.5 2.6 2.7 2.8 2.9 3 3.1 3.2 3.3 time [s] 8 juni 2010, Actief positioneren in het 34/37 Mikrocentrum micrometergebied
  • 35. Summary HEINMADE activities Suppliers Components Customers (piezo know-how) • Semicon Consultancy • Nanomotion • Optics Concept design • Medical Proto-typing • Noliac • Consumer Pre-run / TPD • Piezomechanik Systems • Space BRAINPORT Technology Know-How 8 juni 2010, Actief positioneren in het 35/37 Mikrocentrum micrometergebied
  • 36. Summary Apply piezo technology When to apply piezo technology for accurate positioning; • Piezo actuators for short stroke of max 1 mm • Piezo motors for long stroke > 1 mm • Required accuracy sub micron • Highly dynamic application • Non-magnetic applications • (Ultra) High Vacuum applications • High temperatures > 100 degree C • Low temperatures down to -273 degree C 8 juni 2010, Actief positioneren in het 36/37 Mikrocentrum micrometergebied
  • 37. 8 juni 2010, Actief positioneren in het 37/37 Mikrocentrum micrometergebied