PIEZO AANDRIJVINGEN




 Hein Schellens

 HEINMADE B.V.
 High Tech Campus 9
 5656 AE Eindhoven

 www.heinmade.com
 info@he...
Content
• Introduction HEINMADE

• Actuators & Application example

• Motors & Application example

• Other applications e...
Introduction HEINMADE

• Mechanical engineering, EUT

• Researcher EUT (1995 – 2000 )

• Philips HTP (2001 – 2005 )

• HEI...
Actuators




               XYrZ stage driven by piezo actuator


8 juni 2010,           Actief positioneren in het    4/...
Actuators

Piezo is a ceramic with piezo-electric
response;
• Under pressure -> electrical field
• Under electrical field ...
Actuators
    High voltage (> 500 V)

•    High Voltage                > 500 V (layers 0.25 and 0.5 mm)
•    Low capacity ...
Actuators
    Low voltage (< 200 V)


•    Low Voltage             < 200 V (layers 20, 50 or 66 µm)
•    High capacitance ...
Actuators
Formula’s

•    Stroke per layer per V                                    ~ 0.5 nm/V (0.5 pm/mV)
•    Stroke act...
Actuators
    Formula’s


Example: Disc diameter 40 mm, layer 100 µm, 20 layers

•    Maximum voltage                 3x10...
Actuators
Formula’s

STEPS TO DESIGN YOUR OWN ACTUATOR
1. What force is required at max. stroke?    Force (F) = 400 [N]
2....
Actuators
Application example

Specification XYrZ stage
•   Stroke XY 400 µm (unloaded)
•   Rotation rZ 10 mrad (unloaded)...
Actuators
Application example

Specification amplifier
•   3 axis
•   Voltage range from -30 to 150 V
•   Current max 30 m...
Actuators
Application criteria



General application criteria
•   Max stroke ~ 1 mm
•   Max stiffness ~ 1e8 N/m
•   Max a...
Motors and Stages




         X stage driven by piezo motor
Overview of motors
Stepping mode; stick - Slip


                                                    Moving
Many examples:...
Overview of motors
Stepping mode; Inchworm

                                                 Burleigh Instruments 1975
   ...
Overview of motors
Stepping mode; LPM

                                                  Philips 1993
                    ...
Overview of motors
Stepping mode; shear




PATENTS;               •    Speed ~ 1 mm/sec
• Rockwell
• ASML                ...
Overview of motors
Stepping mode; bender


                                                             Piezomotor Sweden
...
Overview of motors
Piezo resonance motors


                   Piezomotor (SE)

                                          ...
Overview of motors
Structural resonance motors



               Newscale (USA)
                                          ...
Overview of motors
Nanomotion




Spring: looked with no power
  consumption at standstill




8 juni 2010,               ...
Overview of motors
Nanomotion, examples




   Linear Stage                Rotary stage           Pan and Tilt




     He...
Motors
Application example

•     Total moving mass                    0,5 kg
•     Stroke optical set up                1...
Motors
Application example

How many elements are needed?
1. Each element has 4 N force.
2. Weight stage ~ 0,5 kg, added w...
Motors
Application example

Check operation with work regime:
1. Work regime for both axis is work regime e.
2. At 25 degr...
Motors
Application example




8 juni 2010,          Actief positioneren in het   27/37
Mikrocentrum             micromete...
Motors
Application example

Specification XY stage
•   Stroke XY 12 mm (short stroke)
•   Stroke XY 50 mm (long stroke)
• ...
Motors
Application criteria



General application criteria
•   Max stroke ~ 1000 mm (unlimited)
•   Max stiffness ~ 2e7 N...
Other examples


                                                            file name: Fseries 0°; Movement 1 um/s; start...
Other examples
 Impact / Fast Tool Servo


Impact tester for lifetime testing;
• Force 10 kN
• Acceleration 1000 g (~ 5 kH...
Other examples
Active damping


• Mass ~ 1000 kg

• Stiffness ~ 3e8 N/m

• Amplitude vibrations max. 50 nm reduced
  to su...
Other examples
Slow nanomotion

                                                        Amplifier piezo steppers.
   Contr...
Other examples
Slow nanomotion

    file name: Fseries 0°; Movement 1 um/s; start sample: 9321; stop sample: 13321
    10
...
Summary
 HEINMADE activities

    Suppliers      Components                           Customers
(piezo know-how)          ...
Summary
Apply piezo technology


When to apply piezo technology for accurate positioning;

•   Piezo actuators for short s...
8 juni 2010,   Actief positioneren in het   37/37
Mikrocentrum      micrometergebied
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15.00 hr Schellens - Heinmade

  1. 1. PIEZO AANDRIJVINGEN Hein Schellens HEINMADE B.V. High Tech Campus 9 5656 AE Eindhoven www.heinmade.com info@heinmade.com
  2. 2. Content • Introduction HEINMADE • Actuators & Application example • Motors & Application example • Other applications examples • Summary 8 juni 2010, Actief positioneren in het 2/37 Mikrocentrum micrometergebied
  3. 3. Introduction HEINMADE • Mechanical engineering, EUT • Researcher EUT (1995 – 2000 ) • Philips HTP (2001 – 2005 ) • HEINMADE (2005 – ????) 8 juni 2010, Actief positioneren in het 3/37 Mikrocentrum micrometergebied
  4. 4. Actuators XYrZ stage driven by piezo actuator 8 juni 2010, Actief positioneren in het 4/37 Mikrocentrum micrometergebied
  5. 5. Actuators Piezo is a ceramic with piezo-electric response; • Under pressure -> electrical field • Under electrical field -> strain + Extension ~ 0.5 nm/V (= 0.5 pm/mV) Maximum field 3 kV/mm. Maximum strain 0.15 %. Blocking force 40 N/mm2. _ 8 juni 2010, Actief positioneren in het 5/37 Mikrocentrum micrometergebied
  6. 6. Actuators High voltage (> 500 V) • High Voltage > 500 V (layers 0.25 and 0.5 mm) • Low capacity ~ 1-1000 nF • Medium V-fields maximum 2 V/µm • Temperature range -273 oC tot +150 oC • Vacuum compatible / non magnetic 8 juni 2010, Actief positioneren in het 6/37 Mikrocentrum micrometergebied
  7. 7. Actuators Low voltage (< 200 V) • Low Voltage < 200 V (layers 20, 50 or 66 µm) • High capacitance ~ 0.1-100 µF • High V-fields maximum 3 V/µm • Temperature range -273 oC tot +150 oC • Vacuum compatible / non magnetic Multi-layer _ + 8 juni 2010, Actief positioneren in het 7/37 Mikrocentrum micrometergebied
  8. 8. Actuators Formula’s • Stroke per layer per V ~ 0.5 nm/V (0.5 pm/mV) • Stroke actuator ~ 0.5 x n x Vmax • Maximum voltage 3V/µm • Maximum stroke at 3V/um ~ 0.15% • Blocking force at 3V/um 40 N/mm2 • Capacitance ~ 2e-8 x n x A / t • In plane resonance freq. ~ 2000 / D • Axial resonance freq. ~ 2000 / h • Stiffness Blocking force / stroke n= number of layers, A= surface, t= layer thickness, D=diameter, h=height, 8 juni 2010, Actief positioneren in het 8/37 Mikrocentrum micrometergebied
  9. 9. Actuators Formula’s Example: Disc diameter 40 mm, layer 100 µm, 20 layers • Maximum voltage 3x100 = 300 V • Maximum stroke at 3V/um 0.15% x 100 x 20 = 3 µm • Blocking force at 3V/um 40 x π x 20^2 = 50 kN • Capacitance 2e-8 x 20 x 1,25e-3 / 1e-4 = 5µF • In plane resonance 2000/40e-3 = 50 kHz • Axial resonance 2000/(20 x 1e-4) = 1 MHz • Stiffness 50e3 / 3e-6 = 1,7e10 N/m 8 juni 2010, Actief positioneren in het 9/37 Mikrocentrum micrometergebied
  10. 10. Actuators Formula’s STEPS TO DESIGN YOUR OWN ACTUATOR 1. What force is required at max. stroke? Force (F) = 400 [N] 2. What stroke is required? Stroke (S) = 25 [µm] 3. What stiffness is required ? Stiffness (C) = 100 [N/µm] 4. Calculate blocking force ? Fbl = F + SxC = 2900 [N] 5. What is the free stroke of the actuator ? Sact = S + F/C = 29 [µm] 6. Surface of the actuator ? Aact = Fbl/40 = 72.5 [mm2] 7. Length of the actuator ? Lact = Sact / 1.4 = 21 [mm] 2900 Fbl [N] 400 Stroke [µm] 25 29 8 juni 2010, Actief positioneren in het 10/37 Mikrocentrum micrometergebied
  11. 11. Actuators Application example Specification XYrZ stage • Stroke XY 400 µm (unloaded) • Rotation rZ 10 mrad (unloaded) • Voltage -30 V tot 150 V • Stiffness XY 1e6 N/m • Stiffness Z 2e7 N/m • Crosstalk < 1 % • Resolution +/- 1 µm (feedback by vision) • Resolution << 1 µm (other sensors) 8 juni 2010, Actief positioneren in het 11/37 Mikrocentrum micrometergebied
  12. 12. Actuators Application example Specification amplifier • 3 axis • Voltage range from -30 to 150 V • Current max 30 mA • Noise 5 mV -> ~ 10 nm Option; controller with integrated amplifier 8 juni 2010, Actief positioneren in het 12/37 Mikrocentrum micrometergebied
  13. 13. Actuators Application criteria General application criteria • Max stroke ~ 1 mm • Max stiffness ~ 1e8 N/m • Max accuracy ~ 1 nm • High frequent -> check heat > High stiffness & small stroke -> Custom made, lead time 6 weeks > Low stiffness & long stroke 8 juni 2010, Actief positioneren in het 13/37 Mikrocentrum micrometergebied
  14. 14. Motors and Stages X stage driven by piezo motor
  15. 15. Overview of motors Stepping mode; stick - Slip Moving Many examples: body - Smaract - Konica Minolta - Attocube - New Focus - Etc. 8 juni 2010, Actief positioneren in het 15/37 Mikrocentrum micrometergebied
  16. 16. Overview of motors Stepping mode; Inchworm Burleigh Instruments 1975 Patent US 3902085 • Max speed ~ 1 mm/sec • Force ~ 50 N 8 juni 2010, Actief positioneren in het 16/37 Mikrocentrum micrometergebied
  17. 17. Overview of motors Stepping mode; LPM Philips 1993 Patent EP 0592030 • Speed ~ 10 mm/sec • Force 50 N 8 juni 2010, Actief positioneren in het 17/37 Mikrocentrum micrometergebied
  18. 18. Overview of motors Stepping mode; shear PATENTS; • Speed ~ 1 mm/sec • Rockwell • ASML • Force 50 N • Zeiss • PI 8 juni 2010, Actief positioneren in het 18/37 Mikrocentrum micrometergebied
  19. 19. Overview of motors Stepping mode; bender Piezomotor Sweden Patent US6337532 • Speed ~ 10 mm/sec • Force 10 N 8 juni 2010, Actief positioneren in het 19/37 Mikrocentrum micrometergebied
  20. 20. Overview of motors Piezo resonance motors Piezomotor (SE) • Speed ~ 500 mm/s PI (DE) • Force 1 to 4 N Nanomotion (Isr) 8 juni 2010, Actief positioneren in het 20/37 Mikrocentrum micrometergebied
  21. 21. Overview of motors Structural resonance motors Newscale (USA) • Speed ~ 500 mm/s • Force < 1 N Miniswys (CH) Elliptec (DE) 8 juni 2010, Actief positioneren in het 21/37 Mikrocentrum micrometergebied
  22. 22. Overview of motors Nanomotion Spring: looked with no power consumption at standstill 8 juni 2010, Actief positioneren in het 22/37 Mikrocentrum micrometergebied
  23. 23. Overview of motors Nanomotion, examples Linear Stage Rotary stage Pan and Tilt Hexapod Objective stage Vacuum stage 8 juni 2010, Actief positioneren in het 23/37 Mikrocentrum micrometergebied
  24. 24. Motors Application example • Total moving mass 0,5 kg • Stroke optical set up 10 mm X and Y • Stroke standard set up 50 mm X and Y • Speed maximum 20 mm/sec • Accuracy +/- 50 nm • Footprint ~125x125 mm • Motors inside Standard next to stage • Typical motion profile Steps of 1 mm in 30 msec wait 20 msec 8 juni 2010, Actief positioneren in het 24/37 Mikrocentrum micrometergebied
  25. 25. Motors Application example How many elements are needed? 1. Each element has 4 N force. 2. Weight stage ~ 0,5 kg, added weight 0,5 kg. speed 3. Speed profile time 4. This means 0,5 mm in 15 msec; acc = 0,5e-3 / 0,5 / (15e- 3)^2 = 4,4 m/sec2 5. F=m x a = 1 x 4,4 = 4,4 N -> two elements for top stage. 6. Total weight for bottom stage is 2,5 kg -> F = 2,5 x 4,4 = 11 N (4 elements for bottom stage) 8 juni 2010, Actief positioneren in het 25/37 Mikrocentrum micrometergebied
  26. 26. Motors Application example Check operation with work regime: 1. Work regime for both axis is work regime e. 2. At 25 degree C this corresponds with duty cycle of maximum 78%. 3. For the stage this is 30/50 = 60%. 8 juni 2010, Actief positioneren in het 26/37 Mikrocentrum micrometergebied
  27. 27. Motors Application example 8 juni 2010, Actief positioneren in het 27/37 Mikrocentrum micrometergebied
  28. 28. Motors Application example Specification XY stage • Stroke XY 12 mm (short stroke) • Stroke XY 50 mm (long stroke) • Flatness 10 µm • Stiffness X 3e6 & Y 2e6 N/m • Stiffness Z > 1e8 N/m • Resolution +/- 5 nm (optical encoder) • System accuracy +/- 50 nm • 2 axis controller 8 juni 2010, Actief positioneren in het 28/37 Mikrocentrum micrometergebied
  29. 29. Motors Application criteria General application criteria • Max stroke ~ 1000 mm (unlimited) • Max stiffness ~ 2e7 N/m • Max accuracy ~ 10 nm • Max force 250 N • Max velocity 300 mm/sec • Min velocity 1 µm/sec -> Custom made, lead time 6 weeks 8 juni 2010, Actief positioneren in het 29/37 Mikrocentrum micrometergebied
  30. 30. Other examples file name: Fseries 0°; Movement 1 um/s; start sample: 9321; stop sample: 13321 10 interferometer 8 position encoder 6 4 ] 2 m n [ n 0 o i t a i v -2 e d -4 -6 -8 -10 2.4 2.5 2.6 2.7 2.8 2.9 3 3.1 3.2 3.3 time [s] Impact / Fast Tool Servo Active Damping Slow nanomotion 8 juni 2010, Actief positioneren in het 30/37 Mikrocentrum micrometergebied
  31. 31. Other examples Impact / Fast Tool Servo Impact tester for lifetime testing; • Force 10 kN • Acceleration 1000 g (~ 5 kHz) • Fully automated Similar to Fast Tool Servo; • Stroke 100 µm • Stiffness 5e8 N/m 8 juni 2010, Actief positioneren in het 31/37 Mikrocentrum micrometergebied
  32. 32. Other examples Active damping • Mass ~ 1000 kg • Stiffness ~ 3e8 N/m • Amplitude vibrations max. 50 nm reduced to subnm • Cross talk factor > 10e4 (actuator 10 V, sensor < 1mV) 8 juni 2010, Actief positioneren in het 32/37 Mikrocentrum micrometergebied
  33. 33. Other examples Slow nanomotion Amplifier piezo steppers. Controller for piezo steppers. Laser resolution 0.16 nm. Laser head. Added mass Underneath mass encoder with 1 nm resolution for servo. Cross roler bearing underneath mass NYCe 4000 controller Stepper Base of set-up Rubber damper Amplifier for fine tuning. Controlled by NYCe 4000 8 juni 2010, Actief positioneren in het 33/37 Mikrocentrum micrometergebied
  34. 34. Other examples Slow nanomotion file name: Fseries 0°; Movement 1 um/s; start sample: 9321; stop sample: 13321 10 8 interferometer Performance: position encoder 6 • Speed 1 um/sec 4 ] 2 • Weight 20 kg m n [ n 0 o i t a i v e d -2 • Res. encoder 1 nm -4 -6 • Error encoder +/- 2 nm -8 -10 2.4 2.5 2.6 2.7 2.8 2.9 3 3.1 3.2 3.3 time [s] 8 juni 2010, Actief positioneren in het 34/37 Mikrocentrum micrometergebied
  35. 35. Summary HEINMADE activities Suppliers Components Customers (piezo know-how) • Semicon Consultancy • Nanomotion • Optics Concept design • Medical Proto-typing • Noliac • Consumer Pre-run / TPD • Piezomechanik Systems • Space BRAINPORT Technology Know-How 8 juni 2010, Actief positioneren in het 35/37 Mikrocentrum micrometergebied
  36. 36. Summary Apply piezo technology When to apply piezo technology for accurate positioning; • Piezo actuators for short stroke of max 1 mm • Piezo motors for long stroke > 1 mm • Required accuracy sub micron • Highly dynamic application • Non-magnetic applications • (Ultra) High Vacuum applications • High temperatures > 100 degree C • Low temperatures down to -273 degree C 8 juni 2010, Actief positioneren in het 36/37 Mikrocentrum micrometergebied
  37. 37. 8 juni 2010, Actief positioneren in het 37/37 Mikrocentrum micrometergebied

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