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Mems%20 Overview

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MEMS

MEMS

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Transcript

  • 1. Micro-Electro-Mechanical Systems
  • 2. Overview
  • 3. What are MEMS? • Micro - Small size, microfabricated structures • Electro - Electrical signal /control ( In / Out ) • Mechanical - Mechanical functionality ( In / Out ) • Systems - Structures, Devices, Systems - Control
  • 4. What are MEMS? Tronics NMRC Bishnu Gogci, Sensors Product Division, Motorola
  • 5. Multidisciplinary