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Progress of Integration in MEMS and New Industry Creation

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Nano Electro Mechanical Systems (NEMS) and …

Nano Electro Mechanical Systems (NEMS) and
Micro Electro Mechanical Systems (MEMS)

Progress of Integration in MEMS and New Industry Creation by Prof. Susumu Sugiyama

Published in: Technology, Travel
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  • 1. Sri Lanka Institute of Nanotechnology (SLINTEC) organizes the 7th Knowledge Seminar on Nano Electro Mechanical Systems (NEMS) and Micro Electro Mechanical Systems (MEMS) Speaker: TITLE: Prof. Susumu Sugiyama Director, Research Institute for Progress of Integration in Nanomachine System Technology MEMS and New Industry Professor, Ritsumeikan Global Innovation Research Organization Creation Ritsumeikan University Shiga, Japan MEMS (Micro Electro Mechanical Systems) are the micro integrated systems of sensors, actuators, and controlling microprocessor on a millimeter-scale silicon chip by applying and expanding the LSI (Large Scale Integration) fabrication technology. Compared to the LSIs, in which both of the inputs and outputs are only electric signals, MEMS, acting as the active devices, have the ability to process a wide variety of signals, including: physical, chemical, biological, and the others, and are expected widely in the future applications, living and culture, information technology, automobile, precision machines, biological, medical and well- ness, energy harvesting, measurement equipments and the others. MEMS are becoming important as tech- nology of employing the result of research and development of nanotechnology in the actual world efficiently. It is expected that MEMS equipped with the communication function is as technology which permeates into human society and lives a life rich by linking to the Internet. In this presentation the current situation of MEMS technology and future prospects are surveyed. Date, Time & Venue: 18th September, 2009 - 09.30 - 11.00 am ITI Auditorium, 363, Bauddhaloka Mawatha, Colombo 07. Target Audience: Engineers, Managers & Decision makers of Telecommunication, Electronic, Electrical, Robotics, Automation, Bio Medical , Automobile Industries and University Academia in Sri Lanka. Inquiries: Champa Gunathilake Contact : 4650500 / 4741995 E-mail : champag@susnanotec.lk Sri Lanka Institute of Nanotechnology Lot No: 14, Zone 1, Biyagama Export Processing Zone, Walgama, Malwana www.susnanotec.lk

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