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Paul Ahern - Time of Flight Secondary Ion Mass Spectroscopy [ToF-SIMS] theory & practice

by Member of Technical Staff, Reliability & Eco-Environmental Engineering at Alcatel-Lucent on Sep 10, 2013

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Time of Flight (ToF) Secondary Ion Mass Spectroscopy (SIMS) is an extremely sensitive surface analysis technique where the mass to charge ratio of an ion or molecular fragment is determined by its ...

Time of Flight (ToF) Secondary Ion Mass Spectroscopy (SIMS) is an extremely sensitive surface analysis technique where the mass to charge ratio of an ion or molecular fragment is determined by its velocity in the time domain. The commercially available ToF SIMS instruments available today have their roots in close to a century’s worth of academic research, and their ability to gather elemental and molecular information with excellent depth resolution and high sensitivity is incomparable.

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Paul Ahern - Time of Flight Secondary Ion Mass Spectroscopy [ToF-SIMS] theory & practice Paul Ahern - Time of Flight Secondary Ion Mass Spectroscopy [ToF-SIMS] theory & practice Document Transcript