SCHOTT Glass Substrates for Microfluidic Applications


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SCHOTT Glass Substrates for Microfluidic Applications

  1. 1. SCHOTT Glass Substrates for Microfluidic Systems Alistair Rees MF-2.4 Second European Microfluidics Consortium Meeting, Salzburg, 10 December 2010
  2. 2. 1. Overview of SCHOTT 3. Glass Types & Formats used for Microfluidics 4. Production of Flat Glass Agenda 2. Why use Glass for Microfluidics? 5. Photostructurable Glass Ceramic 6. Summary
  3. 3. Legal Structure SCHOTT AG Mainz Carl Zeiss AG Oberkochen Subsidiaries Subsidiaries 100 % 100 % SCHOTT Group Carl Zeiss Group Carl-Zeiss-Stiftung Heidenheim an der Brenz und Jena Foundation acting as shareholder <ul><li>SCHOTT AG is not listed on the Stock Market </li></ul><ul><li>The Carl-Zeiss-Stiftung (Foundation) is sole shareholder of SCHOTT AG </li></ul>
  4. 4. Key Figures capital expenditures in property, plant and equipment 216 million euros global sales, 73% generated outside of Germany 2.26 billion euros employees, 6,500 of whom are in Germany 17,400 production plants and sales offices in 43 countries Fiscal Year 2008/2009 earnings before interest and taxes (EBIT) -22 million euros
  5. 5. SCHOTT Business Units Solar Home Tech Flat Glass Pharmaceutical Systems Electronic Packaging Advanced Materials Lighting and Imaging
  6. 6. Why Use Glass for Microfluidics? <ul><li>Chemically Inert / Bio-compatibility / Hydrophilic / Non-porous </li></ul><ul><li>High Stability / Corrosion Resistant </li></ul><ul><li>Excellent Optical Transmittance / Low auto fluorescence </li></ul><ul><li>High Mechanical Hardness / Good Breaking Strength </li></ul><ul><li>Excellent Electrical Isolation </li></ul><ul><li>Good Thermal Properties / Low Expansion </li></ul><ul><li>Easily Bonded to Other Materials </li></ul><ul><li>Variety of Forms / Formats </li></ul><ul><li>Suitable for Rapid Prototyping </li></ul><ul><li>Can be Inexpensive </li></ul>
  7. 7. Glass Formats / Types used for Microfluidics <ul><li>Flat glass </li></ul><ul><ul><li>Thin Glass Sheets </li></ul></ul><ul><ul><li>Glass Wafers </li></ul></ul><ul><li>Photostructurable Glass Ceramic </li></ul>
  8. 8. Flat Glass Formats for Microfluidics Microfluidic Foundries Processed Wafers Flat Glass Sheets MicroFluidic Device Manufacturer D263 T, Borofloat 33 and B270 wafers for manufacture of microfluidic components D263 M “Optical” covers for polymer microfluidics
  9. 9. SCHOTT Sites Producing Glass for Microfluidics Grünenplan Jena Mainz
  10. 10. Melting Technologies for SCHOTT Flat Gl asses Microfloat Microfloat Down-Draw Up-Draw
  11. 11. Melting Technologies for SCHOTT Flat Glasses The Down-Draw Process - Key Characteristics <ul><li>Seven glass types are produced by the down-draw process: </li></ul><ul><li>Fire-polished surface with surface roughness < 1nm </li></ul><ul><li>Wide thickness range, down to 30 µm </li></ul><ul><li>High flexibility regarding throughput and width </li></ul><ul><li>D </li></ul><ul><li>D </li></ul><ul><li>D </li></ul><ul><li>D </li></ul><ul><li>v </li></ul><ul><li>b </li></ul>MEMpax <ul><li>D </li></ul>
  12. 12. Melting Technologies for SCHOTT Flat Glasses <ul><li>D </li></ul><ul><li>D </li></ul><ul><li>Two glass types are made by the up-draw process: </li></ul>The Up-Draw Process - Key Characteristics <ul><li>Excellent surface quality </li></ul><ul><li>Wide thickness range from 0.8 – 10 mm </li></ul><ul><li>High flexibility regarding throughput and width </li></ul>
  13. 13. Overview of the Microfloat process Cutting/ Inspection Annealing Floating Melting tank 80 °C 730 °C 1240 °C 1650-1700°C Melting Technologies for SCHOTT Flat Glasses Glass Tin bath Glass Lip stone
  14. 14. Details of the Microfloat Process Lip Stone Heating Element Glass Lift Out Roller Reducing Atmosphere Melting Technologies for SCHOTT Flat Glasses Molten Tin Bath
  15. 15. Melting Technologies for SCHOTT Flat Glasses <ul><li>One glass type is made by the float process: </li></ul><ul><li>High throughput </li></ul><ul><li>Low cost </li></ul><ul><li>Excellent largescale flatness possible </li></ul><ul><li>Fire-polished surface with surface roughness < 1nm </li></ul>The Float Process - Key Characteristics <ul><li>D </li></ul>
  16. 16. Overview Thickness of SCHOTT Flat Glasses 0,7 mm 0,4 mm 0,1 mm 0,2 mm 0,3 mm 0,5 mm 0,6 mm 0,8 mm 0,9 mm 1,0 mm 1,1 mm 1,2 mm 1,3 mm 0,05 mm 10 mm Thickness Range ……………… 3 mm
  17. 17. Processing Capabilities <ul><li> Silanes </li></ul><ul><li>Optical </li></ul><ul><li>Metallic </li></ul>Coatings Main Competencies in Glass Processing <ul><li>Flat or Notch </li></ul><ul><li>C-or facet shape </li></ul><ul><li>Seaming </li></ul>Edge Treatment <ul><li>Clean Room Production </li></ul><ul><li>Inspection and measurement </li></ul><ul><li>under clean room conditions </li></ul>Clean Room Packaging <ul><li>Ultrasonic washing </li></ul><ul><li>Megasonic washing </li></ul>Washing Process <ul><li>Lapping </li></ul><ul><li>Polishing </li></ul><ul><li>Coating </li></ul>Surface Refinement <ul><li>Thermal </li></ul><ul><li>Chemical </li></ul>Toughening optional Cutting <ul><li>Laser or Diamond Cutting </li></ul>
  18. 18. Foturan Photostructurable Glass Ceramic <ul><li>Foturan is a photostructurable “glass ceramic” from SCHOTT </li></ul><ul><li>Glass properties: Transparency, hardness, chemical, and thermal resistance </li></ul><ul><li>Very fine structures (> 25 µm ) with tight tolerances </li></ul><ul><li>High aspect ratios ( (> 30:1 hole depth / hole width) </li></ul><ul><li>Low microroughness <1 µm </li></ul>
  19. 19. Foturan Photostructurable Glass Ceramic 1. Mask / UV Exposure 2. Heating / Crystallisation 3. Chemical Etching 500 – 600 °C HF
  20. 20. Summary <ul><li>Glass is an attractive material for microfluidic devices due to a number of special properties </li></ul><ul><li>SCHOTT can offer a wide range of glass suitable for microfuidic applications </li></ul><ul><li>But at the end of the day customers will decide on suitability based on specific project requirements </li></ul>
  21. 21. End Thank you !