Device packaging is one of the most critical aspects for protecting and ensuring long term stability of MEMS based sensors and actuators. High‐performance classes of devices require robust packaging solutions that enable long term stability under a variety of operating conditions.
SAES® Group is now offering a fully integrated MEMS vacuum packaging service that includes the getter deposition on the lid (PageLid), the hermetic sealing process, as well as the RGA and leak rate tests to verify vacuum levels. The use of state-of-the-art sealing equipment, operating in a class 100 clean room, enables the exclusive capability to deliver high quality standard services at competitive costs.
Read more about our packaging service visiting our website at: http://www.saesgetters.com/products/packaging-service.