ENGINEERING SPECIFICATION                                  ALD Source CabinetDate Issued:                  February 2002Su...
ENGINEERING SPECIFICATION                                   ALD Source Cabinet         It will be separate stand-alone box...
ENGINEERING SPECIFICATION                                          ALD Source CabinetSummary of Development PlansSpecific ...
ENGINEERING SPECIFICATION                                  ALD Source Cabinet Task     Task Description                   ...
ENGINEERING SPECIFICATION                                ALD Source CabinetMaterials used for the portion of the vacuum sy...
ENGINEERING SPECIFICATION                                ALD Source CabinetPhase 1.This phase of testing will evaluate tha...
ENGINEERING SPECIFICATION                              ALD Source CabinetValve PV-307                           AC Heater ...
ENGINEERING SPECIFICATION                               ALD Source Cabinet8.0 Equipment manufacturing specifications: 8.1 ...
ENGINEERING SPECIFICATION                              ALD Source Cabinet8.4 Bubbler [Vapor/liquid ampoule] per the follow...
ENGINEERING SPECIFICATION                                  ALD Source CabinetManufacturability SpecificationsSpecification...
ENGINEERING SPECIFICATION                                  ALD Source Cabinet  Module List  A module is defined as a sub-s...
ENGINEERING SPECIFICATION                                ALD Source Cabinet                             Personnel Assignme...
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018674 01 01 Gas Cabinet

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018674 01 01 Gas Cabinet

  1. 1. ENGINEERING SPECIFICATION ALD Source CabinetDate Issued: February 2002Supplier:Date Proposal Required: March 7, 2002Torrex Engineer: Jeff KroneTitle Name Signature DateVice President of Engineering Tom GalantowitzVice President of Operations Bob SusieVP Technologies/CTO Ajit ParanjpePresident Julio Guardado Engineering Functional Specification Flexstar ALD Source Cabinet February 02DefinitionThe Source Cabinet is intended to serve as the module used to provide liquid and vapor deliveryof chemicals to the Flexstar product line. These chemistries will be specific to the ALD process.The system will prevent operator exposure to chemistries during operation of the process mode.The unit will follow the engineering design as outlined in this specification.The system will provide for minimum service time and minimum exposure of personnel tochemistries while in service mode. It will allow for maximum conductance when in place duringnormal operations of the vacuum system as well a purge functions.The plumbing connections will be ‘VCR’ face seal or equivalent whether inside module orconnecting to outside gas lines.Module will be equipped with design features allowing for testing of the functionality of the systemseparate and alone form the Flexstar system.CONFIDENTIAL
  2. 2. ENGINEERING SPECIFICATION ALD Source Cabinet It will be separate stand-alone box: 2 channel delivery system for liquid precursors.Channels should be configurable for vapor draw, and or bubbler delivery (modular andindependently configurable and with chemical level feedback) The unit will require nickel, chrome,rhodium, or hastelloy-wetted surfaces where feasible. Room will be left for a low pressure MFC driven configuration. Should be configured so that all sections that contain liquid can be pumped / purged forease of servicing heating to 80-120 C. All ampules should be configured so that they can easily be replaced; i.e. pump / purgecapability of section of line between manual valves on bubbler and pneumatic valves on ampouleinlet. For both bubbler and low vapor pressure MFC configurations, a pressure transducer onthe outlet of ampoule is necessary. Also all lines that contain vapor should be heated 80 – 120 oC. Ampoule heating from 80 – 120 o C necessary for low vapor pressure MFC and bubblerconfigurations. For the bubbler a needle valve / flow restriction should be installed on the outlet to controlthe headspace pressure. N2 carrier gas should be used for the bubbler. N2 Purge Circuits for Non-inert gases Reactant reservoir on at least two channels: e.g.. Pressure monitoring and heating ofreservoirs (80 – 120 o C) required. Stabilize to Vent capable for gases and liquid precursors. Minimize stainless steel exposure to precursor.Product Application AreasThe application is for universal use on all Flexstar ALD products.Development PlansThe chemistries involved with the source cabinet are outlined as follows;Chemical (g) 1. Add heating up to 120 C to all components in the delivery of chemicals.CONFIDENTIAL
  3. 3. ENGINEERING SPECIFICATION ALD Source CabinetSummary of Development PlansSpecific Immediate Plans FY 02 see following:DeliverablesTask Deliverable Quantity 1 Tested unit 4/22/02. [Mechanical] 1 unit 2 Analyze and measure performance using N2. 1 copy 3 Evaluation report. 1 copy 4 Torrex acceptance 4/23/02 1 copy 6 Redesigned, if required Revised detailed design documentation. 1 set 7 Design verification test report. 1 copy 8 Unit shipped to Torrex 4/25/02 1 unitThis deliverable is to be supplied with the following:Operations Manual.Pneumatic and Electrical Schematics.Test data and subsequent evaluation sheets.Below is a list of the key tasks, together with the estimated time to completion. Task Task Description Time to Completion, Days ARO 1 Review Design Requirements .5 2 Final Design review .5 3 Detailed Design 7.5 4 Fabrication 20 5 Assembly/Evaluation 2 6 Modifications .5 7 Testing & Verification 1The cost estimates for the key tasks of the unit are to be shown as below. This is meant to capture costsassociated with the ‘Development’ tasks listed above. This work is associated with the quote given byprospective buyers. Details of the skills and hours required for each step in the tasks are to be shown in anAttachment provided at time of quote submittal.CONFIDENTIAL
  4. 4. ENGINEERING SPECIFICATION ALD Source Cabinet Task Task Description Labor Cost, $ Material Cost, $ Estimated Total Cost, $ 1 Design Requirements 2 Conceptual Design 3 Detailed Design 4 Prototype Fabrication 5 Prototype Evaluation 6 Design Modifications 7 Design Verification TOTAL1.0 Facility and IntegrationDimensions shown are dependent on supplier’s equipment footprint and are meant to convey approximaterequirements to interface of facilities on Torrex tool.2.0 System schematics Valves shown are high flow diaphragm type. Valves and associated heaters maybesupplied by Torrex for initial build.SEE TORREX DRAWING 018673-01, REV 1, FOR GAS LINE SCHEMATIC.3.0 ServiceabilitySee manufacturing specification --------------- All ampoules should be configured so that they can easily be replaced; i.e. pump / purgecapability of section of line between manual valves on bubbler and pneumatic valves on ampouleinlet.4.0 SafetyThe system design shall be designed to satisfy Semi S2 and CE requirements for safety andSemi S8 ergonomics requirements.Additionally Sematech #99113846A-ENG.Enclosure is to have liquid containment and gas alarms. Stabilize to vent capable for gasses andliquids.5.0 PerformanceSee Torrex drawing 018673-01, 018674-01, 018679-01 for reference to plumbing heating andfacility requirements respectively. These documents are guides and will track with the design as itevolves with the selected suppliers manufacturing needs and Torrex’s process and performancespecifications.6.0 Vacuum compatibilityCONFIDENTIAL
  5. 5. ENGINEERING SPECIFICATION ALD Source CabinetMaterials used for the portion of the vacuum system under vacuum must be compatible withvacuum operation to <1mTorr to 200C and must not generate particulates.7.0 Equipment operation Control Specifications:7.1 TEST AND PERFORMANCE CRITERIA: SEMATECH DOC ID #: 97043272ATRTitle: Accelerated Life Testing of Gas System Performance and Reliability.7.2 TEST PLAN AND CRITERIA:1. Integration Test [TORREX SITE]• The integration test will conduct an evaluation to ensure the design phase requirements are met and each module or device is parallel with all software applications involved.• Integration testing will also focus on multiple operation scenarios, concentrating on the users view of the applications GUI.2. Acceptance Test• Acceptance testing is end-to-end functionality of the complete system.• The test must specify the results that are expected from each test.• The test will consist of normal test environment, and also testing error scenarios.3 Regression Test• Ensure that the capability of all functions and features provided by earlier builds remains intact.CONFIDENTIAL
  6. 6. ENGINEERING SPECIFICATION ALD Source CabinetPhase 1.This phase of testing will evaluate that all devices are responding accordingly.NOTE: Provide vacuum and clean inert gas.Source Cabinet Function Device Type / Reading I/O Comment Pass/Fail Open/CloseDescription Name Open/Close Reference DesigSource 1 Purge/Vac Valve Valve PV-301Source 2 Purge/Vac Valve Valve PV-302Source 1 Gas VacValve Valve PV-304Source 2 Gas VacValve Valve PV-306Source 1 Delivery Valve Valve PV-307 HeatedSource 2 Delivery Valve Valve PV-308 HeatedSource 1 Inert Del Valve Valve PV-309Source 2 Inert Del Valve Valve PV-310Source 1 Vapor Press MKS 631A Cap IsolateOK Mano during testSource 2 Vapor Press MKS 631A Cap IsolateOK Mano during testSource 1 Inert Gas Actual MFC 301 AeraFlow 7700Source 2 Inert Gas Actual MFC 301 AeraFlow 7700Pressure Measurement Gauge Data Torrex toXDCR 301 Instruments LD2 supply testPressure Measurement Gauge Data Torrex toXDCR 302 Instruments LD2 supply testSource Cabinet Door Closed Relay Interlock NewPresent featureSource Cabinet Exhaust Relay Interlock VanePresent switchSource 1 Balance RS-232 TorrexSource 2 Balance RS-232 TorrexSource Cabinet Function Device Type / Reading I/O Comment Pass/Fail Open/CloseDescription Name Open/Close Reference DesigSource 1 Vapor Bottom AC Heater TorrexSource 1 Vapor Cylinder AC Heater TorrexSource 1 Vapor Top Assy AC Heater TorrexSource 1 Bellows Heater AC Heater TorrexSource 1 Bubbler Inject AC Heater TorrexWeldmentValve PV-301 AC Heater TorrexCONFIDENTIAL
  7. 7. ENGINEERING SPECIFICATION ALD Source CabinetValve PV-307 AC Heater Torrex½ VCR Heater LVP-MFC AC Heater Torrex301 INSource 1 LVP-MFC 301 AC Heater TorrexGas Delivery Weldment½ VCR Heater NV-301 AC Heater TorrexSource 1 NV-301 AC Heater TorrexSource 1 NV-301 Gas AC Heater TorrexDelivery WeldmentSource 2 Vapor Bottom AC Heater TorrexSource 2 Vapor Cylinder AC Heater TorrexSource 2 Vapor Top Assy AC Heater TorrexSource 2 Bellows Heater AC Heater TorrexSource 2 Bubbler Inject AC Heater TorrexWeldmentValve PV-302 AC Heater TorrexValve PV-308 AC Heater Torrex½ VCR Heater LVP-MFC AC Heater Torrex302 INSource 2 LVP-MFC 302 AC Heater TorrexGas Delivery Weldment½ VCR Heater NV-302 IN AC Heater TorrexSource 2 NV-302 AC Heater TorrexSource 2 NV-302 Gas AC Heater TorrexDelivery WeldmentPhase II.This phase of integration testing, will determine whether the software applications canhandle various scenario procedures with cycling wafers and heating gas delivery lines.7.3 PLUMBING SCHEMATIC AND ZONE HEATING OR EQUIVALENT HEATING METHOD: Torrex Documents 018673-01 & 018674-01.CONFIDENTIAL
  8. 8. ENGINEERING SPECIFICATION ALD Source Cabinet8.0 Equipment manufacturing specifications: 8.1 Torrex Document for stainless components 017540-80. [Separate Document] 8.2 Torrex supplied component documents: See BOM 018674-008.3 Plumbing fitting design to fit heater constraints, as follows, if resistive heaters are used:8.3 Gas line heaters per the following;CONFIDENTIAL
  9. 9. ENGINEERING SPECIFICATION ALD Source Cabinet8.4 Bubbler [Vapor/liquid ampoule] per the following;Notes: 1. Unless other design is compatible and can be substituted. 2. Heaters for bubbler as well as bubbler shown are to be provided by Torrex.8.4 Cabinet suggested design. Notes: 1. Unless other design is compatible and can be substituted which reduces footprint and provides alternate heating method to resistance heaters.CONFIDENTIAL
  10. 10. ENGINEERING SPECIFICATION ALD Source CabinetManufacturability SpecificationsSpecification MRD Specification Engineering Specification Demonstrated MTBS > 2000 MTBS > 4000 hours TBD MTTR < 1 hours ≤ 1 hours TBD Uptime > 95% > 95% TBD Safety Standards European: General Mechanical DIN 31000 DIN 31000 USA: General SEMATECH DOC ID #: 99113846AENG MechanicalCONFIDENTIAL
  11. 11. ENGINEERING SPECIFICATION ALD Source Cabinet Module List A module is defined as a sub-system, non-trival assembly or key purchased part (a trival assembly is one that requires no documentation of their function, such as a cable assembly or a consumable parts kit). Electrical Panel: Supplied by Torrex initially if suppliers equipment cannot be provided to accomplish heater power supply and control. This unit will also control the functionality of the pneumatic solenoid bank and display or report the valve status. Pneumatic control Module: Supplied by vendor of “Source Cabinet” Mass Flow control Module: Supplied by Torrex initiallyCONFIDENTIAL
  12. 12. ENGINEERING SPECIFICATION ALD Source Cabinet Personnel Assignments Project Management Ron Stevens, Project Manager Tom Galantowitz, Director of Engineering Engineering Mechanical Jeff Krone, ME Lead Electrical Kevin Griffin, EE lead Process Engineering (Applications Lab) Brendan McDougall Manufacturing Daniel Lukban, Manufacturing Engineer Purchasing Rick Getino, Purchasing agent Marketing and Sales Mike Manasco, Marketing Customer Support (Service and Manuals) Mike Mann, Customer Support ManagerCONFIDENTIAL

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