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What is Nanopositioning ?                            Sold & Serviced By:                                                  ...
Precision In Applications                                       Required                                                  ...
Exactly what is a Nanometer?•   One billionth of a meter - 1,000,000,000•   Water molecule > 1 nanometer•   Typical germ ~...
Nanopositioning RequirementsWhat is the Client’s understanding of  their Nanopositioning application?1.   Accuracy2.   Pre...
Nanopositioning RequirementsMotion Control Applications must be:1. Predictable2. Verifiable3. ControllableDesign Considera...
Design Considerations• Accuracy                        Sold & Serviced By:                                              EL...
AccuracyAccuracy vs. Precision• Accuracy doesn’t mean Precision• Accuracy represents the ability to get  closest to a defi...
AccuracyAccuracy vs. Precision                         Sold & Serviced By:                                               E...
AccuracyResolutionWhile Resolution is not Accuracy…It is part of what makes up    AccuracyTwo parts of Resolution  1. Elec...
Design Considerations• Accuracy  – Stiffness                        Sold & Serviced By:                                   ...
What Exactly is Stiffness?                             M          O                             OT       RV               ...
Stiffness                      M         O                         OT      RV                          OR   SE            ...
StiffnessSix Degrees of Error FreedomEncoder Resolution doesn’t define the  Accuracy of a Complete Machine   1.   Pitch   ...
StiffnessSix Degrees of Error Freedom                               Sold & Serviced By:                                   ...
StiffnessSix Degrees of Error Freedom                               Sold & Serviced By:                                   ...
StiffnessSix Degrees of Error Freedom                               Sold & Serviced By:                                   ...
StiffnessMounting / Drive location                            Sold & Serviced By:                                         ...
StiffnessMounting / Drive location                            Sold & Serviced By:                                         ...
Stiffness                     M         O                         OT      RV                          OR   SE             ...
StiffnessServo  • Servo Stiffness        –   Bandwidth            •   Servo sampling rate for current & position loops    ...
Stiffness                      M         O                         OT      RV                          OR   SE            ...
StiffnessMotor• Motor Stiffness  –     Mechanical stiffness  –     Ability to respond to commanded motion  –     Flux patt...
Design Considerations• Accuracy  –Stiffness  –Environment                        Sold & Serviced By:                      ...
EnvironmentOther Error Causing Factors•   Thermal expansion errors•   Abbé offsets•   Feedback Position•   Cosine errors• ...
EnvironmentThermal Expansion ErrorsThermal expansion coefficients of motion   elements must be considered when   selection...
EnvironmentAbbé OffsetsAbbé errors result from a positioning measuring   device (typically a linear encoder) being offset ...
EnvironmentPosition Feedback Control Schemes                                    Sold & Serviced By:                       ...
EnvironmentPosition Feedback Control Schemes                                    Sold & Serviced By:                       ...
EnvironmentPosition Feedback Control Schemes                                    Sold & Serviced By:                       ...
EnvironmentPosition Feedback Control Schemes                                    Sold & Serviced By:                       ...
EnvironmentPosition Feedback Control Schemes                                    Sold & Serviced By:                       ...
EnvironmentCosine ErrorsCosine errors occur when a positioning feedback scale is not in perfect parallel alignment with th...
EnvironmentLost Motion (hysteresis)• Any system that reacts and recovers  differently when varying directional  forces are...
EnvironmentOrthogonalityOrthogonality – The degree to which stages are aligned with their motion at right angles to one an...
EnvironmentExternal forces• Side Loading• Motor resistance• System harmonics   Sold & Serviced By:                        ...
Vibration – Nearby Conditions• Other machinery• Road traffic• Building sway                                Sold & Serviced...
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Nippon pulse presentation what is nanopositioning

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Transcript of "Nippon pulse presentation what is nanopositioning"

  1. 1. What is Nanopositioning ? Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  2. 2. Precision In Applications Required Approximate Comparative Positioning Activity Precision Dimension (Micrometers) Automobile Chassis Assembly 1000 Thickness of a dime Electronic PCB Assembly 100 Thickness of paper Typical Machining Tolerances 10 Diameter of small cell Read/write heads in disk drives 1 Wavelength of light Critical dimension of newest Scanning Interferometers 0.100 (100 nm) computer chips Biological Cell micromanipulation Critical dimension of newest Adaptive optics 0.100 (100 nm) computer chips Optical fiber alignment Microlithography 0.010 (10 nm) A Few Widths of a Molecule Hubble Space Telescope Sold & Serviced By: Integrated Circuits Inspection 0.001 (1 nm) A Few Diameters Of Atoms ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com Thin-Film Surface Coating 0.0001 (100 pm) A Single Atomic Layer sales@electromate.com
  3. 3. Exactly what is a Nanometer?• One billionth of a meter - 1,000,000,000• Water molecule > 1 nanometer• Typical germ ~ 1000 nanometers• Human hair ~ 100,000 nanometer• Carbon Nanotube = 1 nanometer wide Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  4. 4. Nanopositioning RequirementsWhat is the Client’s understanding of their Nanopositioning application?1. Accuracy2. Precision3. Resolution4. Smoothness5. Constant Velocity Scanning6. Repeatability Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  5. 5. Nanopositioning RequirementsMotion Control Applications must be:1. Predictable2. Verifiable3. ControllableDesign Considerations:• Accuracy – Stiffness – Environment Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  6. 6. Design Considerations• Accuracy Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  7. 7. AccuracyAccuracy vs. Precision• Accuracy doesn’t mean Precision• Accuracy represents the ability to get closest to a defined point.• Precision is the ability to execute a move and return to the same point (regardless of accuracy). Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  8. 8. AccuracyAccuracy vs. Precision Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  9. 9. AccuracyResolutionWhile Resolution is not Accuracy…It is part of what makes up AccuracyTwo parts of Resolution 1. Electrical Resolution 2. Mechanical Resolution Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  10. 10. Design Considerations• Accuracy – Stiffness Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  11. 11. What Exactly is Stiffness? M O OT RV OR SE STIFFNESS Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 MECHANICAL www.electromate.com sales@electromate.com
  12. 12. Stiffness M O OT RV OR SE STIFFNESS Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 MECHANICAL www.electromate.com sales@electromate.com
  13. 13. StiffnessSix Degrees of Error FreedomEncoder Resolution doesn’t define the Accuracy of a Complete Machine 1. Pitch 2. Roll 3. Yaw 4. Flatness 5. Straightness 6. ScaleThe combined interacting effects of all contributing factors must be analyzed before total system precision can be determined. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  14. 14. StiffnessSix Degrees of Error Freedom Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  15. 15. StiffnessSix Degrees of Error Freedom Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  16. 16. StiffnessSix Degrees of Error Freedom Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  17. 17. StiffnessMounting / Drive location Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  18. 18. StiffnessMounting / Drive location Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  19. 19. Stiffness M O OT RV OR SE STIFFNESS Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 MECHANICAL www.electromate.com sales@electromate.com
  20. 20. StiffnessServo • Servo Stiffness – Bandwidth • Servo sampling rate for current & position loops – Encoder resolution – Mechanical Stiffness Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  21. 21. Stiffness M O OT RV OR SE STIFFNESS Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 MECHANICAL www.electromate.com sales@electromate.com
  22. 22. StiffnessMotor• Motor Stiffness – Mechanical stiffness – Ability to respond to commanded motion – Flux pattern (Magnetic Servo) Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  23. 23. Design Considerations• Accuracy –Stiffness –Environment Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  24. 24. EnvironmentOther Error Causing Factors• Thermal expansion errors• Abbé offsets• Feedback Position• Cosine errors• Lost motion• Orthogonality• External forces• Viberation Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  25. 25. EnvironmentThermal Expansion ErrorsThermal expansion coefficients of motion elements must be considered when selection high-precision platforms. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  26. 26. EnvironmentAbbé OffsetsAbbé errors result from a positioning measuring device (typically a linear encoder) being offset from the point of work (end-effector) Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  27. 27. EnvironmentPosition Feedback Control Schemes Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  28. 28. EnvironmentPosition Feedback Control Schemes Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  29. 29. EnvironmentPosition Feedback Control Schemes Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  30. 30. EnvironmentPosition Feedback Control Schemes Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  31. 31. EnvironmentPosition Feedback Control Schemes Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  32. 32. EnvironmentCosine ErrorsCosine errors occur when a positioning feedback scale is not in perfect parallel alignment with the motion of the moving carriage. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  33. 33. EnvironmentLost Motion (hysteresis)• Any system that reacts and recovers differently when varying directional forces are applied will exhibit lost motion. – Ballscrew backlash Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  34. 34. EnvironmentOrthogonalityOrthogonality – The degree to which stages are aligned with their motion at right angles to one another. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  35. 35. EnvironmentExternal forces• Side Loading• Motor resistance• System harmonics Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  36. 36. Vibration – Nearby Conditions• Other machinery• Road traffic• Building sway Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
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