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Nippon pulse presentation what is nanopositioning

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  • 1. What is Nanopositioning ? Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 2. Precision In Applications Required Approximate Comparative Positioning Activity Precision Dimension (Micrometers) Automobile Chassis Assembly 1000 Thickness of a dime Electronic PCB Assembly 100 Thickness of paper Typical Machining Tolerances 10 Diameter of small cell Read/write heads in disk drives 1 Wavelength of light Critical dimension of newest Scanning Interferometers 0.100 (100 nm) computer chips Biological Cell micromanipulation Critical dimension of newest Adaptive optics 0.100 (100 nm) computer chips Optical fiber alignment Microlithography 0.010 (10 nm) A Few Widths of a Molecule Hubble Space Telescope Sold & Serviced By: Integrated Circuits Inspection 0.001 (1 nm) A Few Diameters Of Atoms ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com Thin-Film Surface Coating 0.0001 (100 pm) A Single Atomic Layer sales@electromate.com
  • 3. Exactly what is a Nanometer?• One billionth of a meter - 1,000,000,000• Water molecule > 1 nanometer• Typical germ ~ 1000 nanometers• Human hair ~ 100,000 nanometer• Carbon Nanotube = 1 nanometer wide Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 4. Nanopositioning RequirementsWhat is the Client’s understanding of their Nanopositioning application?1. Accuracy2. Precision3. Resolution4. Smoothness5. Constant Velocity Scanning6. Repeatability Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 5. Nanopositioning RequirementsMotion Control Applications must be:1. Predictable2. Verifiable3. ControllableDesign Considerations:• Accuracy – Stiffness – Environment Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 6. Design Considerations• Accuracy Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 7. AccuracyAccuracy vs. Precision• Accuracy doesn’t mean Precision• Accuracy represents the ability to get closest to a defined point.• Precision is the ability to execute a move and return to the same point (regardless of accuracy). Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 8. AccuracyAccuracy vs. Precision Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 9. AccuracyResolutionWhile Resolution is not Accuracy…It is part of what makes up AccuracyTwo parts of Resolution 1. Electrical Resolution 2. Mechanical Resolution Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 10. Design Considerations• Accuracy – Stiffness Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 11. What Exactly is Stiffness? M O OT RV OR SE STIFFNESS Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 MECHANICAL www.electromate.com sales@electromate.com
  • 12. Stiffness M O OT RV OR SE STIFFNESS Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 MECHANICAL www.electromate.com sales@electromate.com
  • 13. StiffnessSix Degrees of Error FreedomEncoder Resolution doesn’t define the Accuracy of a Complete Machine 1. Pitch 2. Roll 3. Yaw 4. Flatness 5. Straightness 6. ScaleThe combined interacting effects of all contributing factors must be analyzed before total system precision can be determined. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 14. StiffnessSix Degrees of Error Freedom Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 15. StiffnessSix Degrees of Error Freedom Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 16. StiffnessSix Degrees of Error Freedom Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 17. StiffnessMounting / Drive location Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 18. StiffnessMounting / Drive location Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 19. Stiffness M O OT RV OR SE STIFFNESS Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 MECHANICAL www.electromate.com sales@electromate.com
  • 20. StiffnessServo • Servo Stiffness – Bandwidth • Servo sampling rate for current & position loops – Encoder resolution – Mechanical Stiffness Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 21. Stiffness M O OT RV OR SE STIFFNESS Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 MECHANICAL www.electromate.com sales@electromate.com
  • 22. StiffnessMotor• Motor Stiffness – Mechanical stiffness – Ability to respond to commanded motion – Flux pattern (Magnetic Servo) Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 23. Design Considerations• Accuracy –Stiffness –Environment Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 24. EnvironmentOther Error Causing Factors• Thermal expansion errors• Abbé offsets• Feedback Position• Cosine errors• Lost motion• Orthogonality• External forces• Viberation Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 25. EnvironmentThermal Expansion ErrorsThermal expansion coefficients of motion elements must be considered when selection high-precision platforms. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 26. EnvironmentAbbé OffsetsAbbé errors result from a positioning measuring device (typically a linear encoder) being offset from the point of work (end-effector) Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 27. EnvironmentPosition Feedback Control Schemes Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 28. EnvironmentPosition Feedback Control Schemes Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 29. EnvironmentPosition Feedback Control Schemes Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 30. EnvironmentPosition Feedback Control Schemes Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 31. EnvironmentPosition Feedback Control Schemes Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 32. EnvironmentCosine ErrorsCosine errors occur when a positioning feedback scale is not in perfect parallel alignment with the motion of the moving carriage. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 33. EnvironmentLost Motion (hysteresis)• Any system that reacts and recovers differently when varying directional forces are applied will exhibit lost motion. – Ballscrew backlash Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 34. EnvironmentOrthogonalityOrthogonality – The degree to which stages are aligned with their motion at right angles to one another. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 35. EnvironmentExternal forces• Side Loading• Motor resistance• System harmonics Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 36. Vibration – Nearby Conditions• Other machinery• Road traffic• Building sway Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com