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MicroE Systems 
High-Performance Encoders 
smaller. faster. smarter. 
Product Catalog 
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Encoder Innovation Starts Here. 
Performance & Value Encoders 
OPSTM/MTETM ....................................Pages 6–7 
Industry-leading combination of performance 
and value; all electronics in the sensor. 
High-Performance Encoders 
Mercury IITM ......................................Pages 8–9 
High resolution and accuracy with 
programmable features. 
Compact Encoders 
MercuryTM and ChipEncoderTM........Pages 10–11 
Smallest sensors with high resolution 
and accuracy. 
High Vacuum Encoders 
MercuryTM and Mercury IITM ..................Page 12 
The industry’s most compact high vacuum 
encoders; high resolution and accuracy. 
Micro Motion AbsoluteTM ..............Page 13 
Absolute after a small initial move; 
available surface-mount compact sensors. 
Advanced Engineered 
OEM Solutions ................................Page 14 
Performance and cost optimized solutions 
for OEM’s. 
Ultra-Performance Encoders 
UltraTM..................................................Page 15 
Ultra-high resolution, accuracy and speed 
for the most demanding applications. 
Packaged Encoders 
DRCTM ..................................................Page 15 
Sealed rotary encoders with integral bearings; 
rugged and reliable. 
Products for Data Storage ............Page 15 
Ultra-high performance positioners, encoders 
and servo control for Data Storage applications. 
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MicroE Systems 
Advantage 
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MICROE SYSTEMS World-Leader in High-Performance Encoder Technology 
MicroE Systems was founded in 1994 to advance encoder technology. 
Seizing the trend toward smaller motion systems, our patented optical designs 
have led to over 30 different encoder models today. These innovations make 
encoders that achieve higher accuracy and speed while also being smaller, 
easier to install, and use less power. That’s why so many OEMs are putting our 
encoders in their designs. Due to robust sales growth, we have made extensive 
investments in our manufacturing operations: a new, larger facility in 2008; use 
of lean manufacturing and six-sigma principles to achieve rapid response to 
customer orders while achieving superior quality; tight controls on cleanliness 
and ESD on the shop floor; and the training and quality systems to be 
ISO 9001:2008 and ISO 13485:2003 certified. 
PRODUCTS The Latest Technologies and State-of-the-Art Products 
MicroE Systems builds encoders and servotrack writing subsystems 
for one of the world’s most leading-edge industries: data storage. 
In fact, most hard-disk drives manufactured throughout the world 
today are made using MicroE Systems’ technology. Plus, we build 
the most widely used encoders for sub-micron compact motion 
systems—Mercury™ encoders. Add to that our growing range of 
Mercury II™ encoders and tape scale solutions. These successes 
stem from our ongoing R&D commitment to create more accurate, 
faster, smaller encoders. 
PERFORMANCE Resolution and Stability at an Incredible Value 
MicroE Systems’ encoders are renowned for their small size, ease of 
setup and features. But more customers are also discovering their world 
class performance—lower cyclical error for better velocity control, 
accuracy to ±1μm, and resolution that’s stable up to 1.2nm. All of this 
performance comes from a 20μm-pitch encoder system that’s a fraction 
of the cost of 4μm and 2μm pitch encoders—now that’s value. 
COMMITMENT Flexible Delivery and a World-Wide Support Network 
Customization and Technical Support At MicroE Systems, we recognize 
the importance of customization. Many applications require a specific cable 
length, connector, or pinout. Our manufacturing processes make your 
“customized” part just like a standard assembly. You get encoders that 
exactly match your application, with the reliability, quality, and responsive 
lead times you would expect with standard products. 
Motion system customers require fast, effective support and that’s where 
our Odyssey™ program comes in. Engineered to support customers during 
each of four critical product development phases, we support you from 
over 30 direct sales and sales partner locations. 
Flexible Delivery Modern OEM customers must have their orders filled in 1–2 weeks with little forecast visibility. MicroE 
Systems has professional supply chain management, world-class quality systems, and a linear manufacturing process 
specifically designed to fill new OEM orders rapidly. Product designs that are modular and configurable complete the story, 
making MicroE Systems one of the most responsive suppliers you can specify. 
Quality and Reliability Engineered in from the Start Encoder applications require the highest levels of reliability. That’s why 
we perform so many tests during product development—design validation testing, environmental robustness, EMI immunity, 
mechanical shock, and a host of further tests. We manufacture in the USA to the highest quality standards in compliance with 
ISO 9001:2008 and ISO 13485:2003, and our encoders are CE and RoHS compliant.
INNOVATIVE ENCODER SYSTEMS 
Delivering Performance and Value 
INTRODUCTION 
Superior performance. World-class reliability. Responsive support and delivery. Focusing on what customers want most is 
why MicroE Systems is growing so quickly and introducing new products faster than any other encoder company. With a 
growing product line of over 30 models to match your specific application requirements, and direct sales and distributor 
offices in 13 countries, we give you a world of encoder solutions. 
MicroE Systems’ Technology: Creating the Best Encoders 
It takes a powerful combination of an advanced optical system, signal processing technology, and state-of-the-art 
optoelectronic integration to make industry-leading encoders. And that’s just what MicroE Systems has done, achieving 
many industry firsts: 
• First 1.2nm resolution encoder with all electronics 
in the sensor 
• First 20μm encoder with cyclical error of only ±20nm 
• First PC Board-mount encoder with 78nm resolution 
• First sub-micron encoder with ± 2° setup tolerance 
PurePrecisionTM Optics Gives Mercury 
the Sensor Size Advantage 
MicroE Systems’ patented sensor creates a high-fidelity 
signal with very compact optics. The result is a miniature, 
high-performance sensor that’s just 8.4mm tall, weighing 
only 5 grams. 
• First encoder with one sensor for tape or glass, 
linear or rotary 
• First encoder with user-programmable settings 
and software 
• First stick-on index and limits 
PurePrecisionTM Optics – Faster Setup, 
Better Accuracy 
Our PurePrecision optical layout gives our sensors the widest 
alignment tolerances in the industry: ± 150μm in the Z axis 
and ± 2° for theta Z. That’s 300% better than competing 
encoders, and that means faster setup and better long-term 
motion system reliability. High signal quality means better 
accuracy – cyclical error as low as ± 20nm – and interpolation 
that provides up to 1.2nm of resolution. 
4 • MicroE Systems Product Overview • Innovative Encoder Systems 
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PRODUCT RANGE OVERVIEW 
MicroE Systems 
Product Overview 
MicroE Systems Product Overview • Innovative Encoder Systems 
From ultra-performance encoders with world leading accuracy, to linear and rotary encoders for a wide range of 
motion control, automation and metrology applications, MicroE Systems has always focused on technologies that 
advance motion control to the next level of performance and value. Here is our product range. 
Performance & Value Encoders 
Incremental encoders that set a new standard for performance and value. 
Perfect for a wide range of motion control applications. Linear or rotary. 
Resolutions from 5μm to 50nm linear, up to 3.3M CPR rotary. Cyclical error only 
± 40nm. Measuring lengths up to 30m using tape scales. Digital output. LED in 
the sensor shows encoder status at all times. All electronics, including interpolation, 
in the sensor. Optical index and left/right optical limits. Available software. 
High-Performance Encoders 
Incremental encoders with high performance and outstanding value for a wide range 
of motion control applications. Linear or rotary. Resolutions from 5μm to 1.2nm 
linear, up to 268M CPR rotary. Cyclical error as low as ± 20nm. Measuring lengths up 
to 30m using tape scales; accuracy up to ± 1μm using glass scales. Digital, analog, 
or high-speed serial output. Models with all electronics in the sensor. Models with 
left/right limits and programmable features. Available software. 
Compact Encoders 
Incremental encoders with the smallest sensors for compact motion control 
applications. Screw-mount with cable or mount directly on your PC board. 
Linear or rotary. Resolutions from 5μm to 5nm linear, 6k to 67M CPR rotary. 
Measuring lengths up to 2m using glass scales; accuracy up to ± 1μm. 
Digital, analog, or high-speed serial output. 
High Vacuum Encoders 
Incremental encoders with small vacuum-rated sensors for motion control 
applications in vacuum. Linear or rotary. Resolutions from 5μm to 1.2nm linear, 
6k to 268M CPR rotary. Measuring lengths up to 2m using glass scales; accuracy 
up to ± 1μm. Digital, analog, or high-speed serial output. Rated up to 10-8 torr. 
Micro Motion AbsoluteTM 
Absolute rotary encoders with compact sensors and optical encoder performance. 
Absolute position after initial movement of 4º – 7º. Resolutions from 5k to 20M 
CPR. High speed serial digital output. 
Advanced Engineered OEM Solutions 
If your system performance requirements demand a customized encoder 
solution, MicroE has the products and the resources to respond quickly 
and effectively. Our custom solutions for the OEM extend over a broad 
range – from modified standard encoders, to solutions that involve applications 
engineering, custom signal processing electronics, custom scales, and more. 
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OPSTM Encoders/MTETM Encoders 
Excellent Performance and Value 
OPS OVERVIEW 
OPS Encoders set a new standard for performance and 
value, enabling OEM’s to affordably improve precision, 
accuracy and quality. Compatible with fast-installing tape 
scales up to 30m long, as well as rotary glass scales, OPS 
Encoders offer outstanding performance in a wide range 
of applications. All electronics are in the sensor, including 
high-speed interpolation. Factory-set resolutions are 1μm, 
0.5μm, 0.1μm or 50nm. Dual optical limits enhance system 
safety while reducing cabling. The status LED built into the 
sensor is easy to notice even when installed in complex 
OEM systems, and indicates encoder status in real time. 
OPS PERFORMANCE 
OPS’s encoder technology achieves the highest resolution 
and accuracy in its class, with low cyclical error, low jitter 
and low power consumption. 
Maximum 
Model Resolution Output Speed Scales 
OPS 400 50nm Digital 1.5m/s Linear Tape or 
Rotary Glass 
OPS 200 100nm Digital 3.0m/s Linear Tape or 
Rotary Glass 
OPS 40 0.5μm Digital 4.5m/s Linear Tape or 
Rotary Glass 
OPS 20 1.0μm Digital 4.5m/s Linear Tape or 
Rotary Glass 
Accuracy Cyclical Error* Linearity 
With Tape Scale (Linear) ± 40nm ≤ ± 5μm/m** 
With Glass (Rotary) 0.24μrad ± 19μrad 
*OPS Series accuracy over any 20μm movement 
**Over any one meter of travel after slope correction in the customer’s controller 
Based on ideal mounting concentricity 
6 • Performance  Value Encoders • OPSTM Encoders/MTETM Encoders 
MTE OVERVIEW 
The Micro Tape Encoder is MicroE Systems’ latest tape 
scale product offering. A patented optical detector design 
allows the MTE series of encoders to offer the small sensor 
size and industry leading alignment tolerances that are 
expected from MicroE Systems with the added benefits of 
a status LED in the sensor and the convenience and ease 
of installation of a metal tape scale. The tri-color status LED 
provides installation guidance without the need for external 
alignment tools or oscilloscopes and an active system 
health signal that the customer can monitor in operation. 
The MTE encoder is available in factory set resolutions of 
5μm, 2.5μm, or 1μm. 
Optical encoder performance – 1.0μm resolution, 7.2m/s 
maximum speed, and bi-directional index window. Status LED 
and wide alignment tolerance allow easy installation and setup. 
Maximum 
MTE PERFORMANCE 
Model Resolution Output Speed Scales 
MTE 20 1.0μm Digital 7.2m/s Linear Tape 
MTE 8 2.5μm Digital 7.2m/s Linear Tape 
MTE 4 5.0μm Digital 7.2m/s Linear Tape 
Accuracy Linearity 
With Tape Scale (Linear) ≤ ± 8μm/m*** 
***Over any one meter of travel after slope correction in the customer’s controller 
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FEATURES  TECHNOLOGY 
OPS Series 
MTE Series 
Built-In Status LED 
Tri-color LED shows encoder 
status at a glance. You can 
confidently know that the encoder 
is powered and working properly. 
Fast-Installing Tape Scales 
Tape scales are available with pre-printed optical index and limits for 
one-step installation. 
TAPE  GLASS SCALES 
Performance  Value 
Encoders 
Performance  Value Encoders • OPSTM Encoders/MTETM Encoders 
Compact Tape Scale System 
The dual optical limits and index fit within the 6mm width of the tape 
scale – less than half the width of others. 
PurePrecisionTM Scales—Easy Installation, Superior Performance 
OPS Series’ low cyclical error surpasses every other 20μm encoder. The benefits are smoother velocity 
control for linear motors, stages and wire bonders; more precise, faster linear positioning; and more. 
Tape Scales (OPS and MTE Series) 
PurePrecision tape scales are easy to install and use. Cut it 
to any length you need from a coil, or order pre-cut lengths 
with built-in index and limits to make installation even faster. 
Its adhesive backing makes application easy and accurate. 
• Measuring length up to 30m 
• MTE: Choose Compact Encoder Tape (CETTM) with built-in 
optical index for fast, one-step installation 
• OPS: Use Marker Tape II with built-in index and 
limit markers, or cut-to-length Laser Tape II with 
place-anywhere stick-on optical index and limit markers 
OPS Accuracy: 
± 1μm with High-Accuracy Grade Scales 
Glass Scales (OPS Series Only) 
Use linear glass scales for the highest accuracy and 
precise thermal management. Rotary glass scales are 
available with or without hubs, and in arc segments. 
• Measure length: up to 1m 
• Rotary accuracy: ± 3.9 arc-sec with 64mm OD scale 
• Custom options: special widths, thicknesses, near-zero 
CTE materials, diameters, or rotary arc segments 
Brand X 
22mm 
Brand Y 
13.5mm 
O.P.S. 
6.0mm 
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Mercury IITM Encoders 
Superior Performance, World-Class Reliability 
MicroE Systems revolutionized encoder technology with 
the original Mercury™ encoder family. Smaller, faster, 
and smarter than anything before, it set the standard 
for innovation. Now, with our expanding line of High 
Performance Encoders, the Mercury II™ series, we 
PERFORMANCE 
Mercury II’s encoder technology achieves the highest resolution and accuracy in its class, with low cyclical error, low jitter 
and low power consumption. 
*Mercury II 6000/5000 accuracy over any 20μm movement 
**Over any one meter of travel after slope correction in the 
customer’s controller 
 Mercury II Cyclical Error with Glass Scales See data sheets for full specifications 
8 • High-Performance Encoders • Mercury IITM Encoders 
take another giant step forward by giving you all this, 
plus more performance, tape scales, dual limits, and 
more. Comprehensive testing and manufacturing to 
ISO 9001:2008 quality standards makes for world class 
robustness and reliability. RoHS and CE compliant. 
OVERVIEW 
Maximum 
Model Resolution Output Speed Scales 
Mercury II 6000 5μm – 1.2nm Digital 10m/s Tape or Glass; 
Linear  Rotary 
Mercury II 5000 5μm – 1.2nm Digital 10m/s Tape or Glass; 
Linear  Rotary 
Mercury II 1900 5μm – 1.2nm Analog 7.2m/s Tape or Glass; 
Linear 
Mercury II 1600 5μm – 0.5μm Digital 20m/s Tape; Linear 
Accuracy Cyclical Error* Long Travel 
With Tape ± 30nm Typical ≤ ± 5μm/m** 
Scale (Linear) 
With Glass ± 20nm Typical High Accuracy 
Scales (Linear) Grade: Up to ± 1μm 
Standard Accuracy 
Grade: ± 1.5μm 
Mercury II Cyclical Error with Glass Scales 
Mercury II’s low cyclical error surpasses every other 20μm encoder. 
The result: smoother velocity control for linear motors and wire 
bonders, better linear positioning, and more. 
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FEATURES  TECHNOLOGY 
The Broadest Alignment 
Tolerances For Easy Setup 
Wider alignment tolerances save 
installation time and allow proper 
encoder operation in equipment 
with high stack up tolerances. 
Insensitivity to 
Scale Contamination 
The advanced optical design 
and Automatic Gain Control work 
together to achieve insensitivity 
to dust, fingerprints, etc. 
Small Sensor for Faster, More 
Compact Motion Systems 
Smaller sensors allow for reduced 
motion system size, lower moving 
masses, and faster, more precise 
positioning. 
Integrated Sensor Design for Less Power Consumption, Smaller Sensors 
Mercury II’s patented optical system and integrated sensor design dramatically cut power consumption and 
sensor size. 
Mercury II 6000 Mercury II 5000 Mercury II 1900 Mercury II 1600 
Power Consumption 0.90W* 0.90W 0.24W 0.24W 
Sensor Height 8.2mm 11.0mm 8.7mm 8.7mm 
*0.25 for sensor 
TAPE  GLASS SCALES 
High Performance 
Encoders 
High-Performance Encoders • Mercury IITM Encoders 
PurePrecisionTM Scales—Easy Installation, Superior Performance 
Mercury II’s low cyclical error surpasses every other 20μm encoder. 
The benefits are smoother velocity control for linear motors, stages and 
wire bonders; more precise, faster linear positioning; and more. 
Tape Scales 
PurePrecision tape scales are easy to install and use. Cut it 
to any length you need from a coil, or order pre-cut lengths 
with built-in index and limits to make installation even faster. 
Its adhesive backing makes application easy and accurate. 
• Measuring length up to 30m 
• Choose Marker Tape with built-in optical index and limit 
markers for fast, one-step installation or use cut-to-length 
Laser Tape with place-anywhere stick-on optical index 
and limit markers 
Glass Scales 
Use linear glass scales for the highest accuracy and 
precise thermal management. Rotary glass scales are 
available with or without hubs, and in arc segments. 
• Measure length: up to 1m 
• High accuracy: up to ± 1μm 
• Custom options: special widths, thicknesses, near-zero 
CTE materials, diameters, or rotary arc segments 
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MercuryTM and ChipEncoderTM 
Compact Encoders with Incredible Performance 
MicroE Systems introduced the Mercury series of compact 
encoders to help equipment designers achieve smaller and 
faster motion systems. Enabling many new applications, 
the Compact Encoders series has grown to 12 models 
due to an expanding range of applications requiring 
more resolution, speed, and even smaller sensors. 
PERFORMANCE 
Mercury and ChipEncoder technology achieves high resolution and low power consumption with the smallest possible sensors. 
10 • Compact Encoders • MercuryTM and ChipEncoderTM 
Motion control engineers around the world specify Mercury 
and ChipEncoder when their linear or rotary motion control 
applications demand high performance from the smallest 
possible sensor. Comprehensive testing and manufacturing 
to ISO 9001:2008 quality standards ensure long-term 
reliability. RoHS and CE compliant. 
OVERVIEW 
Model Resolution Output Features Scales 
Mercury 3500 5μm–5nm Digital Programmable Glass; 
Linear  Rotary 
Mercury 1500 5μm–0.5μm Digital Digital from Glass; 
the Sensor Linear  Rotary 
Mercury 1000 5μm–78nm Analog 1Vpp Output Glass; 
Linear  Rotary 
Mercury 1200 5μm–78nm Analog PCB Mount Glass; 
Linear  Rotary 
Mercury 1500P 5μm–0.5μm Digital PCB Mount Glass; 
Linear  Rotary 
ChipEncoder™ 10μm–1μm Digital PCB Mount Glass; Linear 
 Rotary 
Smaller Sensors for Smaller, Lighter Motion Systems 
Mercury’s patented optical system results in the most compact sensors in 
their class. Achieve low mass motion systems with more rapid accelerations 
and higher system throughputs using Mercury’s 6mm wide linear scales, 
rotary scales as small as 12mm in diameter, low mass rotary arc segments, 
and sensors as small as 5.6mm high weighing only 2.6 grams. Plus, the same 
sensor models work in both linear and rotary applications. 
Low power consumption—as low as 0.17 Watts—provides further advantages 
in thermal stability and for portable equipment. 
Accuracy Long Travel 
With Glass Scales High accuracy grade: 
(Linear) up to ± 1μm 
Standard accuracy grade: 
± 3μm 
 See data sheets for full specifications 
Power 
Model Height Weight Consumption 
Mercury 1200 5.6mm 2.6g 0.17W 
Mercury 1500P 5.6mm 2.6g 0.17W 
ChipEncoder™ 3.1mm 0.6g 0.18W 
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FEATURES  TECHNOLOGY 
Dual-Axis Models 
Mercury 3000 Dual Axis Averager models combine 
feedback from two sensors and average them in real 
time. The result is higher accuracy in rotary applications 
than can be achieved with one sensor – scale 
eccentricity errors are virtually eliminated. Outputs can 
be A-quad-B or high speed serial. 
PC Board Mount 
Mercury 1200, Mercury 1500P, and ChipEncoder models 
mount directly on your PC board, providing significant 
space and cost savings through design integration. 
Mercury 1200’s analog outputs can be interpolated by 
your electronics, or with a chipset available from MicroE 
Systems for use on your PC board, for resolution up 
to 78nm (linear). Mercury 1500P and ChipEncoder have 
built-in interpolation that produces digital outputs with 
up to 0.5μm resolution (linear). All models work with rotary 
scales as small as 12mm diameter. And all this comes 
in the smallest packages. 
SCALES 
Compact Encoders 
Compact Encoders • MercuryTM and ChipEncoderTM 
Wide Range of Scales 
Linear and rotary glass scales are available in 
lengths from 13mm to 2m, and diameters up to 
121mm. Rotary glass scales are available with 
or without hubs, and in arc segments. 
• Linear measuring length as small as 13mm 
• Accuracy up to ± 1μm 
• Compact: Only 6mm wide, including the 
built-in index (applications ≤ 130mm) 
• Rotary diameter as small as 12mm 
• Custom options: Special widths, thicknesses, 
near-zero CTE materials, diameters, or rotary 
arc segments 
Linear Standard 
Lengths 
13mm 
25mm 
50mm 
75mm 
100mm 
125mm 
150mm 
2020mm 
Rotary Standard Rotary Hub 
Outer Diameter Available 
12.00mm Yes 
19.05mm Yes 
31.75mm Yes 
57.15mm Yes 
107.95mm Yes 
139.7mm Yes 
Rotary Segments 
Arc Segment Radius: 6mm or greater 
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MercuryTM and Mercury IITM 
High Performance at High Vacuum with the Smallest Encoders 
Mercury™ and Mercury II™ vacuum encoders are 
specified in a wide range of applications due to their 
combination of performance, small size, and high vacuum 
rating. Choose from models with programmable digital 
PERFORMANCE 
SCALES 
12 • High Vacuum Encoders • MercuryTM and Mercury IITM 
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output, analog output, or digital output right from the 
sensor, all constructed using vacuum-compatible materials 
rated up to 10-8 torr. All sensors can be used with linear, 
rotary and arc segment scales. 
OVERVIEW 
Model Resolution Output Features Scales 
Mercury II 6000V 5μm–1.2nm Digital Programmable Glass; 
Linear  Rotary 
Mercury 3500V 5μm–5nm Digital Programmable Glass; 
Linear  Rotary 
Mercury 2000V 5μm–78nm Digital Programmable Glass; 
Linear  Rotary 
Mercury 1000V 5μm–78nm Analog 1Vpp Output Glass; 
Linear  Rotary 
Mercury 1500V 5μm–0.5μm Digital Digital from Glass; 
the Sensor Linear  Rotary 
High Performance in the Smallest Package 
With sensors only 8.2mm tall, capable of resolutions up to 1.2nm and cyclical 
error of ± 20nm, unsurpassed motion system performance is achieved in the 
most compact vacuum applications. Plus, thermal effects are minimized due 
to the low power consumption of Mercury encoder sensors — only 0.25W 
for most models. All models perform at 10-8 torr with negligible outgassing. 
Bake out is rated at 150°C for 48 hours. And Mercury and Mercury II vacuum 
encoders perform in high magnetic field environments. 
Wide Range of Scales 
Vacuum-compatible linear and rotary glass scales are 
available in lengths from 13mm to 2m, and diameters up to 
121mm. Rotary glass scales are available with or without 
hubs, and in arc segments. 
Accuracy Long Travel 
With Glass Scales High accuracy grade: 
(Linear) up to ± 1μm 
Standard accuracy grade: 
± 3μm for Mercury I, 
± 1.5μm for Mercury II 
 See data sheets for full specifications 
• Linear measuring length as small as 13mm 
• Accuracy up to ± 1μm 
• Compact: Only 6mm wide, including the built-in index 
(applications ≤ 130mm) 
• Rotary diameter as small as 12mm 
• Custom options: Special widths, thicknesses, near-zero 
CTE materials, diameters, or rotary arc segments 
High Vacuum Encoders • MercuryTM and Mercury IITM 
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Micro Motion AbsoluteTM 
Absolute Position at Startup After a Small Movement 
Micro Motion Absolute™ Rotary Encoders provide 
absolute position after powering up your system, even if 
motion occurred when power was off. Our Micro Motion 
Absolute™ technology uses a small initial rotary movement 
on power-up so that your controller will know the absolute 
position with certainty. You can quickly restart with 
confidence even when sensitive, valuable work pieces 
are in the motion system. 
Micro Motion Absolute™ Rotary Encoders acquire 
absolute position from their pre-programmed absolute 
track. By putting absolute position marks at unique 
locations, as soon as the motion control system passes 
through a small rotation, typically 4º – 7º, your controller 
will have absolute position. 
Position feedback is sent to the controller with BiSS or SPI 
high-speed serial formats using an FPGA in your controller 
FEATURES  TECHNOLOGY 
and software that is developed collaboratively with 
MicroE Systems. Single and multi-axis versions of the 
interface are possible. 
Since Micro Motion Absolute™ Rotary Encoders are 
based on MicroE Systems’ widely-used and proven 
optical encoder sensors, they have all of the benefits 
of our incremental encoders: 
• High resolution, accuracy, and repeatability enables 
high precision motion feedback and servo control 
• Small sensors, including models that can fit into the 
most compact spaces 
• PC board mount-sensors, as small as 7mm x 11mm, 
that can fit onto a small PC board of any shape 
• Low power consumption – low as 0.3W 
• Reliable long-life operation 
OVERVIEW 
Micro Motion AbsoluteTM 
Mercury 1500P-MMA 
• Resolution = 10,000 to 100,000 
CPR using 18mm OD scale 
• PC board mount 
• Option for screw-mount sensor 
with cable 
ChipEncoder CE300-MMA 
• Resolution = 5,000 to 50,000 
CPR using 18mm OD scale 
• PC board mount – surface 
mount device 
• Only 7mm x 11mm 
Mercury II 6000-MMA 
• Resolution = 5,000 to 20M CPR 
using 18mm OD scale 
• Small, screw-mount sensor 
with cable 
• Highest accuracy and resolution 
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MicroE Systems • info@microesys.com • 13
Advanced Engineered OEM Solutions 
If your system performance requirements demand a 
customized encoder solution, MicroE has the products 
and the resources to respond quickly and effectively. 
Our custom solutions for the OEM extend over a broad 
14 • Advanced Engineered OEM Solutions 
range – from modified standard encoders, to solutions that 
involve applications engineering, custom signal processing 
electronics, custom scales, and more. 
OVERVIEW 
We also offer advanced solutions for higher volume OEM’s. 
These solutions are developed with our Rapid Customer 
Response (RCR) Team in conjunction with a key group 
of consulting engineers from our staff. Advanced RCR 
solutions include the following: 
• Custom PCB design for ChipSets, ChipEncoder™, 
and application specific motion control 
• Repackaging of SmartPrecision™ Electronics to support 
different form factors and multiple axes 
• Modification of sensors for high bandwidth applications, 
different CTE, custom form factor, and finishing options 
• Application specific product solutions such as the 
averaging devices and multi-axis interpolation 
• Advanced subassembly integration and qualification 
• Custom software based on our SmartPrecision Software 
platform including counters, drivers, DLL’s, etc. 
• Virtual absolute encoder solutions 
• High bandwidth analog sensors (up to 2Mhz) 
• High resolution analog sensors (picometer resolution) 
• Custom electrical outputs: Biss, SPI, SSI, 12C, etc. 
• Opto-mechanical design 
• Analog and digital electronics design and layout 
• Firmware development 
ADVANCED RCR TEAM OEM SOLUTIONS 
MicroE Systems’ Rapid Customer Response Team (RCR) 
provides custom prototype solutions with the shortest 
possible lead-times. This may include a standard 
MicroE product modified for your application, or a 
full-custom design. 
• Optional glass materials for CTE considerations, 
IE: quartz and Zerodur™ 
• Custom scales with optimized travel length, modified 
dimensions, or index locations 
• Custom rotary scales with special dimensions, 
IE: large through holes, large OD’s, arc segments, 
and much more 
• Custom cables lengths and connectors for atmospheric, 
vacuum, and even non-magnetic applications 
• Custom grating holders 
• Grating mounting/centering and consultative services 
• Custom sensor bracket design and manufacture 
• Software interfacing, including OEM embedded solutions 
• Consultation for connecting a Mercury™ encoder to 
customer controller and/or quad counter 
• Motion control sub assembly design and integration 
TRADITIONAL RCR TEAM SERVICES 
Advanced Engineered OEM Solutions 
Sold  Serviced By: 
ELECTROMATE 
Toll Free Phone (877) SERVO98 
Toll Free Fax (877) SERV099 
www.electromate.com 
sales@electromate.com
UltraTM Encoders 
Highest Possible Accuracy or Speed 
OVERVIEW 
PERFORMANCE 
DRCTM Encoders 
Based on decades of field-proven reliability and 
performance, DRC incremental encoders are well known 
for fast and easy installation using industry-standard 
mechanical and electrical interfaces. Choose from sealed 
or kit-style rotary encoders, kit-style linear encoders, or 
sealed linear length gages featuring: 
• Optical encoder technology with LED light source for 
long life and highest performance 
• Differential digital outputs with available zero reference 
• Custom versions available for OEM applications 
• Sealed Rotary Shaft and Hollow Shaft Encoders 
• Rugged, reliable incremental rotary motor encoders 
• Resolutions from 400 to 360,000 Counts per Rev., with 
a wide range of shaft/coupling sizes, mounting options, 
connector styles and cable lengths 
• High accuracy, high temperature, high shaft load and 
extra high vibration-resistant models 
Products 
• 25D, 25B, S15, H15 and F15 Shaft and Hollow-Shaft 
Sealed Rotary Encoders; resolution up to 200,000 CPR 
• HT30, T23B, and TK91 Kit-Style Rotary Encoders for 
Motors; resolution up to 100,000 CPR 
• LDM Kit-Style Linear Encoders; resolution up to 0.5μm 
• SST Sealed Linear Length Gages; resolutions up to 1μm 
OVERVIEW 
Data Storage 
Products 
MicroE Systems has more than a decade of experience 
designing and manufacturing critical components and 
ultra-precision positioning systems for the data storage 
industry. Today we supply these components to the 
majority of hard disk drive (HDD) manufacturers around 
the world, enabling cost-effective manufacturing of 
HDD’s with capacities exceeding 1TB. 
Products 
• G1400 and G1600 High Accuracy Rotary Encoders 
• PE100 High Speed Rotary Encoders 
• PA200G and PA2046G Rotary Positioners 
• MP7000 Positioner for Media Writers 
• MCB2 and SA200a Motion Control Subsystems 
OVERVIEW 
UltraTM Encoders • DRCTM Encoders • Data Storage Products 
G1600 Series 
• Patented optical system achieves superior 
accuracy: ± 20nrad and 3nrad RMS 
• G1600 resolution: 0.94nrad with 104.3mm scale 
• G1650 resolution: 1.5nrad with 65.25mm scale 
• Supports perpendicular writing technology 
• G1600: Kit encoder for new media writing 
applications 
• G1650: Drop-in replacement for the MP 7000 
and PA 2000 Series 
PE-100 
• Use with air bearing spindles for velocity control 
up to 20,000 RPM 
• Index performs at full speed 
Packaged Ultra-Performance • UltraTM Encoders Encoders • DRCTM Encoders Data Storage Products 
Sold  Serviced By: 
MicroE Systems • info@microesys.com • 15 
Designed for the ultimate in performance, G1600 Series and 
PE-100 incremental rotary encoders achieve unprecedented levels 
of useable resolution, minimal cyclical error, and rotational speed. 
Model Resolution Output Features Scales 
G1600 0.94nrad Analog Accuracy up Rotary Glass 
to ± 20nrad 
and 3nrad RMS 
PE-100 N/A Analog Speeds up Rotary Glass 
to 20,000 RPM 
with high S/N 
ELECTROMATE 
Toll Free Phone (877) SERVO98 
Toll Free Fax (877) SERV099 
www.electromate.com 
sales@electromate.com
OEM 
Page 14 
Advanced Engineered OEM Solutions 
Performance and cost optimized 
solutions for OEM’s. 
Sold  Serviced By: 
• Linear Resolution: 5μm – 1.2nm 
• Rotary Resolution: 0.94nrad 
• Output: A-quad-B, Index, Dual Limits 
and Alarm; High Speed Serial Interface, 
Analog Sin/Cos with Index 
ENCODER SELECTION CHART 
Model 
OPSTM/MTETM 
Pages 6–7 
Features 
Performance  Value Encoders 
Industry-leading combination of 
performance and value; all electronics 
in the sensor. 
Specifications* 
• Linear Resolution: 5μm – 50nm 
• Rotary Resolution: 163k to 3.27M CPR 
• Output: A-quad-B, Index Pulse, and 
Dual Limits 
Mercury IITM 
Pages 8–9 
High-Performance Encoders 
High resolution and accuracy with 
programmable features. 
• Linear Resolution: 5μm – 1.2nm 
• Rotary Resolution: 20k CPR – 268M CPR 
• Output: A-quad-B, Index, Dual Limits and 
Alarm; High Speed Serial Interface, 
Analog Sin/Cos with Index 
MercuryTM and 
ChipEncoderTM 
Pages 10-11 
Compact Encoders 
Smallest sensors with high resolution 
and accuracy. 
• Linear Resolution: 10μm – 5nm 
• Rotary Resolution: 6.6k CPR – 67.1M CPR 
• Output: A-quad-B, Index, Dual Limits and 
Alarm; High Speed Serial Interface, 
Analog Sin/Cos with Index 
MercuryTM and 
Mercury IITM 
Page 12 
High Vacuum Encoders 
The industry’s most compact high 
vacuum encoders; high resolution 
and accuracy. 
• Linear Resolution: 5μm – 1.2nm 
• Rotary Resolution: 20k CPR – 268M CPR 
• Output: A-quad-B, Index, Dual Limits and 
Alarm; High Speed Serial Interface, 
Analog Sin/Cos with Index 
Micro Motion 
AbsoluteTM 
Page 13 
Absolute Rotary Encoders 
Absolute after a small initial move; 
available surface-mount 
compact sensors. 
• Rotary Resolution: 5k CPR – 20M CPR 
• Output: A-quad-B, Index, Dual Limits 
and Alarm 
UltraTM 
Page 15 
Ultra-Performance Encoders 
Ultra-high resolution, accuracy 
and speed for the most demanding 
applications. 
• Rotary Resolution: 20k CPR – 268M CPR 
• Output: A-quad-B, Index, Dual Limits and 
Alarm; High Speed Serial Interface 
DRCTM 
Page 15 
Packaged Encoders 
Sealed rotary encoders with integral 
bearings; rugged and reliable. 
• Linear Resolution: 10μm – 0.5μm 
• Rotary Resolution: 200 CPR – 360k CPR 
• Output: A-quad-B with Index 
Data Storage 
Page 15 
Products for Data Storage 
Ultra-high performance positioners, 
encoders and servo control for Data 
Storage applications. 
• Rotary Resolution: up to 4.68 nrad 
• Output: 2 semiarbitrary analog outputs 
MTE 
OPS 
*Resolution, output and scale options vary by model. 
ELECTROMATE 
Toll Free Phone (877) SERVO98 
Toll Free Fax (877) SERV099 
www.electromate.com 
sales@electromate.com

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MicroE Systems Encoder Product Catalog

  • 1. Sold & Serviced By: MicroE Systems High-Performance Encoders smaller. faster. smarter. Product Catalog ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 2. Encoder Innovation Starts Here. Performance & Value Encoders OPSTM/MTETM ....................................Pages 6–7 Industry-leading combination of performance and value; all electronics in the sensor. High-Performance Encoders Mercury IITM ......................................Pages 8–9 High resolution and accuracy with programmable features. Compact Encoders MercuryTM and ChipEncoderTM........Pages 10–11 Smallest sensors with high resolution and accuracy. High Vacuum Encoders MercuryTM and Mercury IITM ..................Page 12 The industry’s most compact high vacuum encoders; high resolution and accuracy. Micro Motion AbsoluteTM ..............Page 13 Absolute after a small initial move; available surface-mount compact sensors. Advanced Engineered OEM Solutions ................................Page 14 Performance and cost optimized solutions for OEM’s. Ultra-Performance Encoders UltraTM..................................................Page 15 Ultra-high resolution, accuracy and speed for the most demanding applications. Packaged Encoders DRCTM ..................................................Page 15 Sealed rotary encoders with integral bearings; rugged and reliable. Products for Data Storage ............Page 15 Ultra-high performance positioners, encoders and servo control for Data Storage applications. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 3. MicroE Systems Advantage Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com MICROE SYSTEMS World-Leader in High-Performance Encoder Technology MicroE Systems was founded in 1994 to advance encoder technology. Seizing the trend toward smaller motion systems, our patented optical designs have led to over 30 different encoder models today. These innovations make encoders that achieve higher accuracy and speed while also being smaller, easier to install, and use less power. That’s why so many OEMs are putting our encoders in their designs. Due to robust sales growth, we have made extensive investments in our manufacturing operations: a new, larger facility in 2008; use of lean manufacturing and six-sigma principles to achieve rapid response to customer orders while achieving superior quality; tight controls on cleanliness and ESD on the shop floor; and the training and quality systems to be ISO 9001:2008 and ISO 13485:2003 certified. PRODUCTS The Latest Technologies and State-of-the-Art Products MicroE Systems builds encoders and servotrack writing subsystems for one of the world’s most leading-edge industries: data storage. In fact, most hard-disk drives manufactured throughout the world today are made using MicroE Systems’ technology. Plus, we build the most widely used encoders for sub-micron compact motion systems—Mercury™ encoders. Add to that our growing range of Mercury II™ encoders and tape scale solutions. These successes stem from our ongoing R&D commitment to create more accurate, faster, smaller encoders. PERFORMANCE Resolution and Stability at an Incredible Value MicroE Systems’ encoders are renowned for their small size, ease of setup and features. But more customers are also discovering their world class performance—lower cyclical error for better velocity control, accuracy to ±1μm, and resolution that’s stable up to 1.2nm. All of this performance comes from a 20μm-pitch encoder system that’s a fraction of the cost of 4μm and 2μm pitch encoders—now that’s value. COMMITMENT Flexible Delivery and a World-Wide Support Network Customization and Technical Support At MicroE Systems, we recognize the importance of customization. Many applications require a specific cable length, connector, or pinout. Our manufacturing processes make your “customized” part just like a standard assembly. You get encoders that exactly match your application, with the reliability, quality, and responsive lead times you would expect with standard products. Motion system customers require fast, effective support and that’s where our Odyssey™ program comes in. Engineered to support customers during each of four critical product development phases, we support you from over 30 direct sales and sales partner locations. Flexible Delivery Modern OEM customers must have their orders filled in 1–2 weeks with little forecast visibility. MicroE Systems has professional supply chain management, world-class quality systems, and a linear manufacturing process specifically designed to fill new OEM orders rapidly. Product designs that are modular and configurable complete the story, making MicroE Systems one of the most responsive suppliers you can specify. Quality and Reliability Engineered in from the Start Encoder applications require the highest levels of reliability. That’s why we perform so many tests during product development—design validation testing, environmental robustness, EMI immunity, mechanical shock, and a host of further tests. We manufacture in the USA to the highest quality standards in compliance with ISO 9001:2008 and ISO 13485:2003, and our encoders are CE and RoHS compliant.
  • 4. INNOVATIVE ENCODER SYSTEMS Delivering Performance and Value INTRODUCTION Superior performance. World-class reliability. Responsive support and delivery. Focusing on what customers want most is why MicroE Systems is growing so quickly and introducing new products faster than any other encoder company. With a growing product line of over 30 models to match your specific application requirements, and direct sales and distributor offices in 13 countries, we give you a world of encoder solutions. MicroE Systems’ Technology: Creating the Best Encoders It takes a powerful combination of an advanced optical system, signal processing technology, and state-of-the-art optoelectronic integration to make industry-leading encoders. And that’s just what MicroE Systems has done, achieving many industry firsts: • First 1.2nm resolution encoder with all electronics in the sensor • First 20μm encoder with cyclical error of only ±20nm • First PC Board-mount encoder with 78nm resolution • First sub-micron encoder with ± 2° setup tolerance PurePrecisionTM Optics Gives Mercury the Sensor Size Advantage MicroE Systems’ patented sensor creates a high-fidelity signal with very compact optics. The result is a miniature, high-performance sensor that’s just 8.4mm tall, weighing only 5 grams. • First encoder with one sensor for tape or glass, linear or rotary • First encoder with user-programmable settings and software • First stick-on index and limits PurePrecisionTM Optics – Faster Setup, Better Accuracy Our PurePrecision optical layout gives our sensors the widest alignment tolerances in the industry: ± 150μm in the Z axis and ± 2° for theta Z. That’s 300% better than competing encoders, and that means faster setup and better long-term motion system reliability. High signal quality means better accuracy – cyclical error as low as ± 20nm – and interpolation that provides up to 1.2nm of resolution. 4 • MicroE Systems Product Overview • Innovative Encoder Systems Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 5. PRODUCT RANGE OVERVIEW MicroE Systems Product Overview MicroE Systems Product Overview • Innovative Encoder Systems From ultra-performance encoders with world leading accuracy, to linear and rotary encoders for a wide range of motion control, automation and metrology applications, MicroE Systems has always focused on technologies that advance motion control to the next level of performance and value. Here is our product range. Performance & Value Encoders Incremental encoders that set a new standard for performance and value. Perfect for a wide range of motion control applications. Linear or rotary. Resolutions from 5μm to 50nm linear, up to 3.3M CPR rotary. Cyclical error only ± 40nm. Measuring lengths up to 30m using tape scales. Digital output. LED in the sensor shows encoder status at all times. All electronics, including interpolation, in the sensor. Optical index and left/right optical limits. Available software. High-Performance Encoders Incremental encoders with high performance and outstanding value for a wide range of motion control applications. Linear or rotary. Resolutions from 5μm to 1.2nm linear, up to 268M CPR rotary. Cyclical error as low as ± 20nm. Measuring lengths up to 30m using tape scales; accuracy up to ± 1μm using glass scales. Digital, analog, or high-speed serial output. Models with all electronics in the sensor. Models with left/right limits and programmable features. Available software. Compact Encoders Incremental encoders with the smallest sensors for compact motion control applications. Screw-mount with cable or mount directly on your PC board. Linear or rotary. Resolutions from 5μm to 5nm linear, 6k to 67M CPR rotary. Measuring lengths up to 2m using glass scales; accuracy up to ± 1μm. Digital, analog, or high-speed serial output. High Vacuum Encoders Incremental encoders with small vacuum-rated sensors for motion control applications in vacuum. Linear or rotary. Resolutions from 5μm to 1.2nm linear, 6k to 268M CPR rotary. Measuring lengths up to 2m using glass scales; accuracy up to ± 1μm. Digital, analog, or high-speed serial output. Rated up to 10-8 torr. Micro Motion AbsoluteTM Absolute rotary encoders with compact sensors and optical encoder performance. Absolute position after initial movement of 4º – 7º. Resolutions from 5k to 20M CPR. High speed serial digital output. Advanced Engineered OEM Solutions If your system performance requirements demand a customized encoder solution, MicroE has the products and the resources to respond quickly and effectively. Our custom solutions for the OEM extend over a broad range – from modified standard encoders, to solutions that involve applications engineering, custom signal processing electronics, custom scales, and more. Sold & Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 6. OPSTM Encoders/MTETM Encoders Excellent Performance and Value OPS OVERVIEW OPS Encoders set a new standard for performance and value, enabling OEM’s to affordably improve precision, accuracy and quality. Compatible with fast-installing tape scales up to 30m long, as well as rotary glass scales, OPS Encoders offer outstanding performance in a wide range of applications. All electronics are in the sensor, including high-speed interpolation. Factory-set resolutions are 1μm, 0.5μm, 0.1μm or 50nm. Dual optical limits enhance system safety while reducing cabling. The status LED built into the sensor is easy to notice even when installed in complex OEM systems, and indicates encoder status in real time. OPS PERFORMANCE OPS’s encoder technology achieves the highest resolution and accuracy in its class, with low cyclical error, low jitter and low power consumption. Maximum Model Resolution Output Speed Scales OPS 400 50nm Digital 1.5m/s Linear Tape or Rotary Glass OPS 200 100nm Digital 3.0m/s Linear Tape or Rotary Glass OPS 40 0.5μm Digital 4.5m/s Linear Tape or Rotary Glass OPS 20 1.0μm Digital 4.5m/s Linear Tape or Rotary Glass Accuracy Cyclical Error* Linearity With Tape Scale (Linear) ± 40nm ≤ ± 5μm/m** With Glass (Rotary) 0.24μrad ± 19μrad *OPS Series accuracy over any 20μm movement **Over any one meter of travel after slope correction in the customer’s controller Based on ideal mounting concentricity 6 • Performance Value Encoders • OPSTM Encoders/MTETM Encoders MTE OVERVIEW The Micro Tape Encoder is MicroE Systems’ latest tape scale product offering. A patented optical detector design allows the MTE series of encoders to offer the small sensor size and industry leading alignment tolerances that are expected from MicroE Systems with the added benefits of a status LED in the sensor and the convenience and ease of installation of a metal tape scale. The tri-color status LED provides installation guidance without the need for external alignment tools or oscilloscopes and an active system health signal that the customer can monitor in operation. The MTE encoder is available in factory set resolutions of 5μm, 2.5μm, or 1μm. Optical encoder performance – 1.0μm resolution, 7.2m/s maximum speed, and bi-directional index window. Status LED and wide alignment tolerance allow easy installation and setup. Maximum MTE PERFORMANCE Model Resolution Output Speed Scales MTE 20 1.0μm Digital 7.2m/s Linear Tape MTE 8 2.5μm Digital 7.2m/s Linear Tape MTE 4 5.0μm Digital 7.2m/s Linear Tape Accuracy Linearity With Tape Scale (Linear) ≤ ± 8μm/m*** ***Over any one meter of travel after slope correction in the customer’s controller Sold Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 7. FEATURES TECHNOLOGY OPS Series MTE Series Built-In Status LED Tri-color LED shows encoder status at a glance. You can confidently know that the encoder is powered and working properly. Fast-Installing Tape Scales Tape scales are available with pre-printed optical index and limits for one-step installation. TAPE GLASS SCALES Performance Value Encoders Performance Value Encoders • OPSTM Encoders/MTETM Encoders Compact Tape Scale System The dual optical limits and index fit within the 6mm width of the tape scale – less than half the width of others. PurePrecisionTM Scales—Easy Installation, Superior Performance OPS Series’ low cyclical error surpasses every other 20μm encoder. The benefits are smoother velocity control for linear motors, stages and wire bonders; more precise, faster linear positioning; and more. Tape Scales (OPS and MTE Series) PurePrecision tape scales are easy to install and use. Cut it to any length you need from a coil, or order pre-cut lengths with built-in index and limits to make installation even faster. Its adhesive backing makes application easy and accurate. • Measuring length up to 30m • MTE: Choose Compact Encoder Tape (CETTM) with built-in optical index for fast, one-step installation • OPS: Use Marker Tape II with built-in index and limit markers, or cut-to-length Laser Tape II with place-anywhere stick-on optical index and limit markers OPS Accuracy: ± 1μm with High-Accuracy Grade Scales Glass Scales (OPS Series Only) Use linear glass scales for the highest accuracy and precise thermal management. Rotary glass scales are available with or without hubs, and in arc segments. • Measure length: up to 1m • Rotary accuracy: ± 3.9 arc-sec with 64mm OD scale • Custom options: special widths, thicknesses, near-zero CTE materials, diameters, or rotary arc segments Brand X 22mm Brand Y 13.5mm O.P.S. 6.0mm Sold Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 8. Mercury IITM Encoders Superior Performance, World-Class Reliability MicroE Systems revolutionized encoder technology with the original Mercury™ encoder family. Smaller, faster, and smarter than anything before, it set the standard for innovation. Now, with our expanding line of High Performance Encoders, the Mercury II™ series, we PERFORMANCE Mercury II’s encoder technology achieves the highest resolution and accuracy in its class, with low cyclical error, low jitter and low power consumption. *Mercury II 6000/5000 accuracy over any 20μm movement **Over any one meter of travel after slope correction in the customer’s controller Mercury II Cyclical Error with Glass Scales See data sheets for full specifications 8 • High-Performance Encoders • Mercury IITM Encoders take another giant step forward by giving you all this, plus more performance, tape scales, dual limits, and more. Comprehensive testing and manufacturing to ISO 9001:2008 quality standards makes for world class robustness and reliability. RoHS and CE compliant. OVERVIEW Maximum Model Resolution Output Speed Scales Mercury II 6000 5μm – 1.2nm Digital 10m/s Tape or Glass; Linear Rotary Mercury II 5000 5μm – 1.2nm Digital 10m/s Tape or Glass; Linear Rotary Mercury II 1900 5μm – 1.2nm Analog 7.2m/s Tape or Glass; Linear Mercury II 1600 5μm – 0.5μm Digital 20m/s Tape; Linear Accuracy Cyclical Error* Long Travel With Tape ± 30nm Typical ≤ ± 5μm/m** Scale (Linear) With Glass ± 20nm Typical High Accuracy Scales (Linear) Grade: Up to ± 1μm Standard Accuracy Grade: ± 1.5μm Mercury II Cyclical Error with Glass Scales Mercury II’s low cyclical error surpasses every other 20μm encoder. The result: smoother velocity control for linear motors and wire bonders, better linear positioning, and more. Sold Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 9. FEATURES TECHNOLOGY The Broadest Alignment Tolerances For Easy Setup Wider alignment tolerances save installation time and allow proper encoder operation in equipment with high stack up tolerances. Insensitivity to Scale Contamination The advanced optical design and Automatic Gain Control work together to achieve insensitivity to dust, fingerprints, etc. Small Sensor for Faster, More Compact Motion Systems Smaller sensors allow for reduced motion system size, lower moving masses, and faster, more precise positioning. Integrated Sensor Design for Less Power Consumption, Smaller Sensors Mercury II’s patented optical system and integrated sensor design dramatically cut power consumption and sensor size. Mercury II 6000 Mercury II 5000 Mercury II 1900 Mercury II 1600 Power Consumption 0.90W* 0.90W 0.24W 0.24W Sensor Height 8.2mm 11.0mm 8.7mm 8.7mm *0.25 for sensor TAPE GLASS SCALES High Performance Encoders High-Performance Encoders • Mercury IITM Encoders PurePrecisionTM Scales—Easy Installation, Superior Performance Mercury II’s low cyclical error surpasses every other 20μm encoder. The benefits are smoother velocity control for linear motors, stages and wire bonders; more precise, faster linear positioning; and more. Tape Scales PurePrecision tape scales are easy to install and use. Cut it to any length you need from a coil, or order pre-cut lengths with built-in index and limits to make installation even faster. Its adhesive backing makes application easy and accurate. • Measuring length up to 30m • Choose Marker Tape with built-in optical index and limit markers for fast, one-step installation or use cut-to-length Laser Tape with place-anywhere stick-on optical index and limit markers Glass Scales Use linear glass scales for the highest accuracy and precise thermal management. Rotary glass scales are available with or without hubs, and in arc segments. • Measure length: up to 1m • High accuracy: up to ± 1μm • Custom options: special widths, thicknesses, near-zero CTE materials, diameters, or rotary arc segments Sold Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 10. MercuryTM and ChipEncoderTM Compact Encoders with Incredible Performance MicroE Systems introduced the Mercury series of compact encoders to help equipment designers achieve smaller and faster motion systems. Enabling many new applications, the Compact Encoders series has grown to 12 models due to an expanding range of applications requiring more resolution, speed, and even smaller sensors. PERFORMANCE Mercury and ChipEncoder technology achieves high resolution and low power consumption with the smallest possible sensors. 10 • Compact Encoders • MercuryTM and ChipEncoderTM Motion control engineers around the world specify Mercury and ChipEncoder when their linear or rotary motion control applications demand high performance from the smallest possible sensor. Comprehensive testing and manufacturing to ISO 9001:2008 quality standards ensure long-term reliability. RoHS and CE compliant. OVERVIEW Model Resolution Output Features Scales Mercury 3500 5μm–5nm Digital Programmable Glass; Linear Rotary Mercury 1500 5μm–0.5μm Digital Digital from Glass; the Sensor Linear Rotary Mercury 1000 5μm–78nm Analog 1Vpp Output Glass; Linear Rotary Mercury 1200 5μm–78nm Analog PCB Mount Glass; Linear Rotary Mercury 1500P 5μm–0.5μm Digital PCB Mount Glass; Linear Rotary ChipEncoder™ 10μm–1μm Digital PCB Mount Glass; Linear Rotary Smaller Sensors for Smaller, Lighter Motion Systems Mercury’s patented optical system results in the most compact sensors in their class. Achieve low mass motion systems with more rapid accelerations and higher system throughputs using Mercury’s 6mm wide linear scales, rotary scales as small as 12mm in diameter, low mass rotary arc segments, and sensors as small as 5.6mm high weighing only 2.6 grams. Plus, the same sensor models work in both linear and rotary applications. Low power consumption—as low as 0.17 Watts—provides further advantages in thermal stability and for portable equipment. Accuracy Long Travel With Glass Scales High accuracy grade: (Linear) up to ± 1μm Standard accuracy grade: ± 3μm See data sheets for full specifications Power Model Height Weight Consumption Mercury 1200 5.6mm 2.6g 0.17W Mercury 1500P 5.6mm 2.6g 0.17W ChipEncoder™ 3.1mm 0.6g 0.18W Sold Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 11. FEATURES TECHNOLOGY Dual-Axis Models Mercury 3000 Dual Axis Averager models combine feedback from two sensors and average them in real time. The result is higher accuracy in rotary applications than can be achieved with one sensor – scale eccentricity errors are virtually eliminated. Outputs can be A-quad-B or high speed serial. PC Board Mount Mercury 1200, Mercury 1500P, and ChipEncoder models mount directly on your PC board, providing significant space and cost savings through design integration. Mercury 1200’s analog outputs can be interpolated by your electronics, or with a chipset available from MicroE Systems for use on your PC board, for resolution up to 78nm (linear). Mercury 1500P and ChipEncoder have built-in interpolation that produces digital outputs with up to 0.5μm resolution (linear). All models work with rotary scales as small as 12mm diameter. And all this comes in the smallest packages. SCALES Compact Encoders Compact Encoders • MercuryTM and ChipEncoderTM Wide Range of Scales Linear and rotary glass scales are available in lengths from 13mm to 2m, and diameters up to 121mm. Rotary glass scales are available with or without hubs, and in arc segments. • Linear measuring length as small as 13mm • Accuracy up to ± 1μm • Compact: Only 6mm wide, including the built-in index (applications ≤ 130mm) • Rotary diameter as small as 12mm • Custom options: Special widths, thicknesses, near-zero CTE materials, diameters, or rotary arc segments Linear Standard Lengths 13mm 25mm 50mm 75mm 100mm 125mm 150mm 2020mm Rotary Standard Rotary Hub Outer Diameter Available 12.00mm Yes 19.05mm Yes 31.75mm Yes 57.15mm Yes 107.95mm Yes 139.7mm Yes Rotary Segments Arc Segment Radius: 6mm or greater Sold Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 12. MercuryTM and Mercury IITM High Performance at High Vacuum with the Smallest Encoders Mercury™ and Mercury II™ vacuum encoders are specified in a wide range of applications due to their combination of performance, small size, and high vacuum rating. Choose from models with programmable digital PERFORMANCE SCALES 12 • High Vacuum Encoders • MercuryTM and Mercury IITM Sold Serviced By: output, analog output, or digital output right from the sensor, all constructed using vacuum-compatible materials rated up to 10-8 torr. All sensors can be used with linear, rotary and arc segment scales. OVERVIEW Model Resolution Output Features Scales Mercury II 6000V 5μm–1.2nm Digital Programmable Glass; Linear Rotary Mercury 3500V 5μm–5nm Digital Programmable Glass; Linear Rotary Mercury 2000V 5μm–78nm Digital Programmable Glass; Linear Rotary Mercury 1000V 5μm–78nm Analog 1Vpp Output Glass; Linear Rotary Mercury 1500V 5μm–0.5μm Digital Digital from Glass; the Sensor Linear Rotary High Performance in the Smallest Package With sensors only 8.2mm tall, capable of resolutions up to 1.2nm and cyclical error of ± 20nm, unsurpassed motion system performance is achieved in the most compact vacuum applications. Plus, thermal effects are minimized due to the low power consumption of Mercury encoder sensors — only 0.25W for most models. All models perform at 10-8 torr with negligible outgassing. Bake out is rated at 150°C for 48 hours. And Mercury and Mercury II vacuum encoders perform in high magnetic field environments. Wide Range of Scales Vacuum-compatible linear and rotary glass scales are available in lengths from 13mm to 2m, and diameters up to 121mm. Rotary glass scales are available with or without hubs, and in arc segments. Accuracy Long Travel With Glass Scales High accuracy grade: (Linear) up to ± 1μm Standard accuracy grade: ± 3μm for Mercury I, ± 1.5μm for Mercury II See data sheets for full specifications • Linear measuring length as small as 13mm • Accuracy up to ± 1μm • Compact: Only 6mm wide, including the built-in index (applications ≤ 130mm) • Rotary diameter as small as 12mm • Custom options: Special widths, thicknesses, near-zero CTE materials, diameters, or rotary arc segments High Vacuum Encoders • MercuryTM and Mercury IITM ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 13. Micro Motion AbsoluteTM Absolute Position at Startup After a Small Movement Micro Motion Absolute™ Rotary Encoders provide absolute position after powering up your system, even if motion occurred when power was off. Our Micro Motion Absolute™ technology uses a small initial rotary movement on power-up so that your controller will know the absolute position with certainty. You can quickly restart with confidence even when sensitive, valuable work pieces are in the motion system. Micro Motion Absolute™ Rotary Encoders acquire absolute position from their pre-programmed absolute track. By putting absolute position marks at unique locations, as soon as the motion control system passes through a small rotation, typically 4º – 7º, your controller will have absolute position. Position feedback is sent to the controller with BiSS or SPI high-speed serial formats using an FPGA in your controller FEATURES TECHNOLOGY and software that is developed collaboratively with MicroE Systems. Single and multi-axis versions of the interface are possible. Since Micro Motion Absolute™ Rotary Encoders are based on MicroE Systems’ widely-used and proven optical encoder sensors, they have all of the benefits of our incremental encoders: • High resolution, accuracy, and repeatability enables high precision motion feedback and servo control • Small sensors, including models that can fit into the most compact spaces • PC board mount-sensors, as small as 7mm x 11mm, that can fit onto a small PC board of any shape • Low power consumption – low as 0.3W • Reliable long-life operation OVERVIEW Micro Motion AbsoluteTM Mercury 1500P-MMA • Resolution = 10,000 to 100,000 CPR using 18mm OD scale • PC board mount • Option for screw-mount sensor with cable ChipEncoder CE300-MMA • Resolution = 5,000 to 50,000 CPR using 18mm OD scale • PC board mount – surface mount device • Only 7mm x 11mm Mercury II 6000-MMA • Resolution = 5,000 to 20M CPR using 18mm OD scale • Small, screw-mount sensor with cable • Highest accuracy and resolution Sold Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com MicroE Systems • info@microesys.com • 13
  • 14. Advanced Engineered OEM Solutions If your system performance requirements demand a customized encoder solution, MicroE has the products and the resources to respond quickly and effectively. Our custom solutions for the OEM extend over a broad 14 • Advanced Engineered OEM Solutions range – from modified standard encoders, to solutions that involve applications engineering, custom signal processing electronics, custom scales, and more. OVERVIEW We also offer advanced solutions for higher volume OEM’s. These solutions are developed with our Rapid Customer Response (RCR) Team in conjunction with a key group of consulting engineers from our staff. Advanced RCR solutions include the following: • Custom PCB design for ChipSets, ChipEncoder™, and application specific motion control • Repackaging of SmartPrecision™ Electronics to support different form factors and multiple axes • Modification of sensors for high bandwidth applications, different CTE, custom form factor, and finishing options • Application specific product solutions such as the averaging devices and multi-axis interpolation • Advanced subassembly integration and qualification • Custom software based on our SmartPrecision Software platform including counters, drivers, DLL’s, etc. • Virtual absolute encoder solutions • High bandwidth analog sensors (up to 2Mhz) • High resolution analog sensors (picometer resolution) • Custom electrical outputs: Biss, SPI, SSI, 12C, etc. • Opto-mechanical design • Analog and digital electronics design and layout • Firmware development ADVANCED RCR TEAM OEM SOLUTIONS MicroE Systems’ Rapid Customer Response Team (RCR) provides custom prototype solutions with the shortest possible lead-times. This may include a standard MicroE product modified for your application, or a full-custom design. • Optional glass materials for CTE considerations, IE: quartz and Zerodur™ • Custom scales with optimized travel length, modified dimensions, or index locations • Custom rotary scales with special dimensions, IE: large through holes, large OD’s, arc segments, and much more • Custom cables lengths and connectors for atmospheric, vacuum, and even non-magnetic applications • Custom grating holders • Grating mounting/centering and consultative services • Custom sensor bracket design and manufacture • Software interfacing, including OEM embedded solutions • Consultation for connecting a Mercury™ encoder to customer controller and/or quad counter • Motion control sub assembly design and integration TRADITIONAL RCR TEAM SERVICES Advanced Engineered OEM Solutions Sold Serviced By: ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 15. UltraTM Encoders Highest Possible Accuracy or Speed OVERVIEW PERFORMANCE DRCTM Encoders Based on decades of field-proven reliability and performance, DRC incremental encoders are well known for fast and easy installation using industry-standard mechanical and electrical interfaces. Choose from sealed or kit-style rotary encoders, kit-style linear encoders, or sealed linear length gages featuring: • Optical encoder technology with LED light source for long life and highest performance • Differential digital outputs with available zero reference • Custom versions available for OEM applications • Sealed Rotary Shaft and Hollow Shaft Encoders • Rugged, reliable incremental rotary motor encoders • Resolutions from 400 to 360,000 Counts per Rev., with a wide range of shaft/coupling sizes, mounting options, connector styles and cable lengths • High accuracy, high temperature, high shaft load and extra high vibration-resistant models Products • 25D, 25B, S15, H15 and F15 Shaft and Hollow-Shaft Sealed Rotary Encoders; resolution up to 200,000 CPR • HT30, T23B, and TK91 Kit-Style Rotary Encoders for Motors; resolution up to 100,000 CPR • LDM Kit-Style Linear Encoders; resolution up to 0.5μm • SST Sealed Linear Length Gages; resolutions up to 1μm OVERVIEW Data Storage Products MicroE Systems has more than a decade of experience designing and manufacturing critical components and ultra-precision positioning systems for the data storage industry. Today we supply these components to the majority of hard disk drive (HDD) manufacturers around the world, enabling cost-effective manufacturing of HDD’s with capacities exceeding 1TB. Products • G1400 and G1600 High Accuracy Rotary Encoders • PE100 High Speed Rotary Encoders • PA200G and PA2046G Rotary Positioners • MP7000 Positioner for Media Writers • MCB2 and SA200a Motion Control Subsystems OVERVIEW UltraTM Encoders • DRCTM Encoders • Data Storage Products G1600 Series • Patented optical system achieves superior accuracy: ± 20nrad and 3nrad RMS • G1600 resolution: 0.94nrad with 104.3mm scale • G1650 resolution: 1.5nrad with 65.25mm scale • Supports perpendicular writing technology • G1600: Kit encoder for new media writing applications • G1650: Drop-in replacement for the MP 7000 and PA 2000 Series PE-100 • Use with air bearing spindles for velocity control up to 20,000 RPM • Index performs at full speed Packaged Ultra-Performance • UltraTM Encoders Encoders • DRCTM Encoders Data Storage Products Sold Serviced By: MicroE Systems • info@microesys.com • 15 Designed for the ultimate in performance, G1600 Series and PE-100 incremental rotary encoders achieve unprecedented levels of useable resolution, minimal cyclical error, and rotational speed. Model Resolution Output Features Scales G1600 0.94nrad Analog Accuracy up Rotary Glass to ± 20nrad and 3nrad RMS PE-100 N/A Analog Speeds up Rotary Glass to 20,000 RPM with high S/N ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com
  • 16. OEM Page 14 Advanced Engineered OEM Solutions Performance and cost optimized solutions for OEM’s. Sold Serviced By: • Linear Resolution: 5μm – 1.2nm • Rotary Resolution: 0.94nrad • Output: A-quad-B, Index, Dual Limits and Alarm; High Speed Serial Interface, Analog Sin/Cos with Index ENCODER SELECTION CHART Model OPSTM/MTETM Pages 6–7 Features Performance Value Encoders Industry-leading combination of performance and value; all electronics in the sensor. Specifications* • Linear Resolution: 5μm – 50nm • Rotary Resolution: 163k to 3.27M CPR • Output: A-quad-B, Index Pulse, and Dual Limits Mercury IITM Pages 8–9 High-Performance Encoders High resolution and accuracy with programmable features. • Linear Resolution: 5μm – 1.2nm • Rotary Resolution: 20k CPR – 268M CPR • Output: A-quad-B, Index, Dual Limits and Alarm; High Speed Serial Interface, Analog Sin/Cos with Index MercuryTM and ChipEncoderTM Pages 10-11 Compact Encoders Smallest sensors with high resolution and accuracy. • Linear Resolution: 10μm – 5nm • Rotary Resolution: 6.6k CPR – 67.1M CPR • Output: A-quad-B, Index, Dual Limits and Alarm; High Speed Serial Interface, Analog Sin/Cos with Index MercuryTM and Mercury IITM Page 12 High Vacuum Encoders The industry’s most compact high vacuum encoders; high resolution and accuracy. • Linear Resolution: 5μm – 1.2nm • Rotary Resolution: 20k CPR – 268M CPR • Output: A-quad-B, Index, Dual Limits and Alarm; High Speed Serial Interface, Analog Sin/Cos with Index Micro Motion AbsoluteTM Page 13 Absolute Rotary Encoders Absolute after a small initial move; available surface-mount compact sensors. • Rotary Resolution: 5k CPR – 20M CPR • Output: A-quad-B, Index, Dual Limits and Alarm UltraTM Page 15 Ultra-Performance Encoders Ultra-high resolution, accuracy and speed for the most demanding applications. • Rotary Resolution: 20k CPR – 268M CPR • Output: A-quad-B, Index, Dual Limits and Alarm; High Speed Serial Interface DRCTM Page 15 Packaged Encoders Sealed rotary encoders with integral bearings; rugged and reliable. • Linear Resolution: 10μm – 0.5μm • Rotary Resolution: 200 CPR – 360k CPR • Output: A-quad-B with Index Data Storage Page 15 Products for Data Storage Ultra-high performance positioners, encoders and servo control for Data Storage applications. • Rotary Resolution: up to 4.68 nrad • Output: 2 semiarbitrary analog outputs MTE OPS *Resolution, output and scale options vary by model. ELECTROMATE Toll Free Phone (877) SERVO98 Toll Free Fax (877) SERV099 www.electromate.com sales@electromate.com