2. The Science Of Precision Motion
Agenda
• About Ibex
• Mechanical Considerations
in Nano Positioning
applications
• Examples of Nano
Positioning In Industry
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3. The Science Of Precision Motion
Introduction
• Precision Stage Manufacturer
• Forte
– Micron and under
– Cross roller stages
• We make Nano technology easy
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4. Ibex History
• Founded By Andre Perrin in 1999
• Background – Metrology System
• Formed the company to fill a gap
by providing non-standard
precision motion control
platforms
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5. What We Look For When Designing A
High Precision Stage
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6. The Process
When Reviewing a Nano Application
• Basic Engineering
– Project scope
– Specification review
– Engineering challenges
relative to the spec
– Component sizing
– Materials
– Control
• Who, what, where, and how Sold & Serviced By:
• Feedback compatibility ELECTROMATE
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7. Basic Engineering
The Decision Driver
• Accuracy and Repeatability
– Length of Travel
• Straightness/Flatness
• Roll, Pitch and Yaw
– Envelope
– Load and load position
– Multi-axis Compounding
– Environment
• Materials
• Finish Sold & Serviced By:
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8. Basic Engineering
Concept Review
Accuracy
• The closeness of agreement between the
results of a measurement and the true value of
the object being measured.
Repeatability
• Under Identical conditions how well a
system can return to one commanded location
– Unidirectional
– Bi-Directional Sold & Serviced By:
ELECTROMATE
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9. Mechanical Concepts
Encoder Resolution doesn’t define the
Accuracy of a Complete System
1. Pitch
2. Roll
3. Yaw
4. Flatness
5. Straightness
6. Scale
The combined interacting effects of all contributing factors
must be analyzed before total system precision can be
determined.
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11. Basic Engineering
Concept Review
• If Straightness/Flatness is critical to application
– Then what will the stage be mounted to….
4 M wide,
1.5 M tall
• This Very important!!! All Granite
1 mm Sold & Serviced By:
shim ELECTROMATE
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12. Basic Engineering
Concept Review
• Envelope
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13. Basic Engineering
Determine position and state of the load
• Orientation of the Load
– Bearings
– Materials
– Abbe Error
• Vibration - Work
• Speed & loading
– Settling
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17. Basic Engineering
Air Bearings Review
• Air Bearings
– High pressure = less deformation
– No friction = no heat
– Precision parts
– Control Flatness and Straightness
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18. Basic Engineering
Velocity Control Considerations
• Ball Screws
• Lead Error
• Ball entering and exiting the return tube
• Profile Rails
• Ball entering and exiting the return tube
• Seal Drag
• Best
– Linear Servo (Piezo or Ironless)
– Air Bearing or Crossed Rollers
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20. Basic Engineering
Environment
Temperature
Thermal Expansion
• Stainless Screw = 12ppm/deg C
• Aluminum = 23 ppm/deg. C
• 3 degree rise makes a 100mm screw grow 7
microns
• Areas of concern
– Type of motor and associated duty
– Temperature swing of the environment Sold & Serviced By:
– Adjacent equipment ELECTROMATE
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21. Basic Engineering
Feedback
• Feedback type
– Linear
• Digital vs Analog
– Scale Type – Typically
20um grating
• Tape
• Glass 1.8 µm/m/°C
• Invar 0.6 µm/m/°C
– Rotary Sold & Serviced By:
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– Interferometer Toll Free Phone (877) SERVO98
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22. Basic Engineering
Feedback – Cosine Error
Cosine errors occur when a positioning
feedback scale is not in perfect parallel
alignment with the motion of the moving
carriage.
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23. Basic Engineering
Abbé errors result from a positioning measuring
device (typically a linear encoder) being offset from
the point of work (end-effector) due to mechanical errors
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24. Basic Engineering
Concept Review
Other Considerations
• Structural Stiffness
– What are we mounting too
– Vibration dampening
– The building and traffic
• Wire Management
• Controls
– Features based relative to the end goal
– Mapping, Notch filtering, Adaptive tuning for
variable inertias, Sin-Cosine inputs…. Sold & Serviced By:
ELECTROMATE
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25. A World Of Choice
Custom and OEM Built Motion Platforms
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30. The Markets We Serve
• Biomedical/Pharmaceutical
• Life Sciences
– Cell Imaging…..
• Medical Device
• Semi Conductor Fab
• Data Storage
• National Lab/Research
• Metrology
• Photonics/Telecom
• Aerospace and Defense….
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31. National Labs / Research
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32. Kinematics Systems
Multiple sizes and configurations. 5 and 6 Degrees of freedom
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33. High and Ultra High Vacuum
Ibex has the Vacuum solutions with
years of experience building stages in
a range atmospheres from 10-3 to
10-10. We’ve built an array of
precision stage configurations using
multiple combinations of bearing and
motors.
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46. Design To MFG
IBEX is a Fully Integrated Company –
From 3D Design
All mechanical designs are created in 3D
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47. Design To MFG
From 3D Design – To Mastercam
Fully Integrated Manufacturing
From SolidWorks
To Master Cam CAD/CAM Sold & Serviced By:
ELECTROMATE
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49. From Assembly to QA
In House Measuring Systems
• Laser Interferometer – 1nm res
• Auto Collimator
• Laser Rotary Calibrator Sold & Serviced By:
ELECTROMATE
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50. Thank You!
• For allowing our organization
to present today
• We look forward to the
partnership
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