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1. APPLICATIONS OF MEMS
By: mohd azrin bin razali
POLITEKNIK SULTAN HAJI AHMAD SHAH,
Pahang, MALAYSIA

2.  MEMS can be defined as the combination of
micro sensors and/or micro actuators and
electronic devices integrated on a single
chip.
 MEMS have many function that make our life
easier.

3.  MEMS can be divided into two
 >ACTUATOR
-A type of motor for moving or controlling a
mechanism or system
 >SENSOR
-a device that responds to a physical stimulus
such as heat, light and sound

4.  Bio-MEMS
-use in medical and health related
technologies
 DOC’s OptiML Autofocus (AF) actuator
-utilize electrostatic forces to move a lens
with optimal positioning precision and
repeatability.

5.  MEMS disposable sensor
-used to monitor blood pressure in IV lines of
patients in intensive care
 MEMS pressure sensors
-used to measure intrauterine pressure
during birth

6.  MEMS gyroscopes
-used in modern cars and other applications
 INKJET PRINTERS
-use piezoelectric or thermal bubble ejection
to deposit ink on paper
 DISPLAYS
-DMD chip in a projector based on DLP
technology

7.  Biotechnology
-MEMS and Nanotechnology is enabling new
discoveries in science and engineering such
as the Polymerase Chain Reaction (PCR)
Microsystems for DNA amplification and
identification
-Biochips for detection of hazardous
chemical and biological agents

8.  Medicine/MEDICAL
-MEMS pressure sensors are used for eye
surgery to measure and control the vacuum
level used to remove fluid from the eye,
-MEMS pressure sensors are used to measure
intrauterine pressure during birth.

9.  Communications
-RF-MEMS technology, by using this
technology, performance of communication
circuits will improve, while the total circuit
area, power consumption and cost will be
reduced

10.  Inertial Sensing
 - specifically accelerometers and gyroscopes
-MEMS accelerometers have displaced
conventional accelerometers for crash air-
bag deployment systems in automobiles

11.  Thereare numerous possible applications for
MEMS and Nanotechnology. As a breakthrough
technology, allowing unparalleled synergy
between previously unrelated fields such as
biology and microelectronics, many new
MEMS and Nanotechnology applications will
emerge.