INTRODUCTION - MEMS

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INTRODUCTION - MEMS

  1. 1. APPLICATIONS OF MEMS By: mohd azrin bin razaliPOLITEKNIK SULTAN HAJI AHMAD SHAH, Pahang, MALAYSIA
  2. 2.  MEMS can be defined as the combination of micro sensors and/or micro actuators and electronic devices integrated on a single chip. MEMS have many function that make our life easier.
  3. 3.  MEMS can be divided into two  >ACTUATOR -A type of motor for moving or controlling a mechanism or system  >SENSOR -a device that responds to a physical stimulus such as heat, light and sound
  4. 4.  Bio-MEMS -use in medical and health related technologies DOC’s OptiML Autofocus (AF) actuator -utilize electrostatic forces to move a lens with optimal positioning precision and repeatability.
  5. 5.  MEMS disposable sensor -used to monitor blood pressure in IV lines of patients in intensive care MEMS pressure sensors -used to measure intrauterine pressure during birth
  6. 6.  MEMS gyroscopes -used in modern cars and other applications INKJET PRINTERS -use piezoelectric or thermal bubble ejection to deposit ink on paper DISPLAYS -DMD chip in a projector based on DLP technology
  7. 7.  Biotechnology -MEMS and Nanotechnology is enabling new discoveries in science and engineering such as the Polymerase Chain Reaction (PCR) Microsystems for DNA amplification and identification -Biochips for detection of hazardous chemical and biological agents
  8. 8.  Medicine/MEDICAL -MEMS pressure sensors are used for eye surgery to measure and control the vacuum level used to remove fluid from the eye, -MEMS pressure sensors are used to measure intrauterine pressure during birth.
  9. 9.  Communications -RF-MEMS technology, by using this technology, performance of communication circuits will improve, while the total circuit area, power consumption and cost will be reduced
  10. 10.  Inertial Sensing - specifically accelerometers and gyroscopes -MEMS accelerometers have displaced conventional accelerometers for crash air- bag deployment systems in automobiles
  11. 11.  Thereare numerous possible applications for MEMS and Nanotechnology. As a breakthrough technology, allowing unparalleled synergy between previously unrelated fields such as biology and microelectronics, many new MEMS and Nanotechnology applications will emerge.

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