APPLICATIONS OF MEMS By: mohd azrin bin razaliPOLITEKNIK SULTAN HAJI AHMAD SHAH, Pahang, MALAYSIA
MEMS can be defined as the combination of micro sensors and/or micro actuators and electronic devices integrated on a single chip. MEMS have many function that make our life easier.
MEMS can be divided into two >ACTUATOR -A type of motor for moving or controlling a mechanism or system >SENSOR -a device that responds to a physical stimulus such as heat, light and sound
Bio-MEMS -use in medical and health related technologies DOC’s OptiML Autofocus (AF) actuator -utilize electrostatic forces to move a lens with optimal positioning precision and repeatability.
MEMS disposable sensor -used to monitor blood pressure in IV lines of patients in intensive care MEMS pressure sensors -used to measure intrauterine pressure during birth
MEMS gyroscopes -used in modern cars and other applications INKJET PRINTERS -use piezoelectric or thermal bubble ejection to deposit ink on paper DISPLAYS -DMD chip in a projector based on DLP technology
Biotechnology -MEMS and Nanotechnology is enabling new discoveries in science and engineering such as the Polymerase Chain Reaction (PCR) Microsystems for DNA amplification and identification -Biochips for detection of hazardous chemical and biological agents
Medicine/MEDICAL -MEMS pressure sensors are used for eye surgery to measure and control the vacuum level used to remove fluid from the eye, -MEMS pressure sensors are used to measure intrauterine pressure during birth.
Communications -RF-MEMS technology, by using this technology, performance of communication circuits will improve, while the total circuit area, power consumption and cost will be reduced
Inertial Sensing - specifically accelerometers and gyroscopes -MEMS accelerometers have displaced conventional accelerometers for crash air- bag deployment systems in automobiles
Thereare numerous possible applications for MEMS and Nanotechnology. As a breakthrough technology, allowing unparalleled synergy between previously unrelated fields such as biology and microelectronics, many new MEMS and Nanotechnology applications will emerge.