Le nanotecnologie sono tecnologie trasversali e abilitanti che costituiscono un modo radicalmente nuovo di realizzare materiali, prodotti e dispositivi con caratteristiche estremamente migliorate o del tutto nuove. Nella breve presentazione saranno illustrate le potenzialità del laboratorio in termini di supporto allo sviluppo di prodotti e di processi anche mediante alcuni casi reali di collaborazione con aziende.

1. Scienza e Tecnologia dei Materiali
(dipartimento di Ingegneria, Roma TRE)
Nanotecnologie e
caratterizzazione avanzata al
servizio dell’ingegneria
2013-03
Edoardo Bemporad

2. Edoardo Bemporad
www.stm.uniroma3.it
Career Day Roma TRE – 22-03-2013
 STM Roma TRE channel on YouTube:
http://www.youtube.com/user/STMRomaTRE
 Image Gallery on flickr
http://www.flickr.com/photos/stmdimiuniroma3/
5

3. Edoardo Bemporad
OUTLINE
 Research Group presentation
 Mission
 Vision
 Research strategy
 People and research Partners
 Facilities
 Examples from recent work
 Spatially resolved residual stress measurement at the
Career Day Roma TRE – 22-03-2013
micron scale (x,y and z)
 Development of novel thin film materials for advanced
mechanical application
7

4. Edoardo Bemporad
MISSION
 Study of surface properties of systems for advanced
mechanical engineering and micro-devices applications, through
numerical and analytical modeling, advanced characterization
methods, technological, mechanical, tribological and chemical
tests.
 Development of advanced multi-scale methodology related
with morphological, micro-structural and micro-analytical
characterization of materials through optical, ionic, electronic
and contact probes.
Career Day Roma TRE – 22-03-2013
8

5. Edoardo Bemporad
VISION
 Coupling nano-mechanical testing with high resolution
microscopy
 High-resolution depth-resolved nano-scale mechanical
characterization of engineered surfaces and multiphase
materials;
 (Sub)microscale analysis of residual stress and stress
gradients in thin coatings and complex structures
 FIB-SEM-TEM-AFM investigation of nano-scale deformation
mechanisms and influence of microstructures on mechanical
and functional behavior;
 Roughness and inducing roughness methods Vs surface
Career Day Roma TRE – 22-03-2013
energy: measurement and dependence with surface
chemistry
 In-house deposition plant
 MS-PVD: effect of deposition parameters on performances
(adhesion, wear, bio, others..)
9

6. Edoardo Bemporad
STM GROUP: VISION
Increasing
Product/process output quality
innovation
(companies)
Improving of
characterization
understanding
methods: fine
capabilities
tuning or new
applications (academic)
Career Day Roma TRE – 22-03-2013
new materials
Development
and new devices Advanced use
Routine use
10

7. Edoardo Bemporad
STM GROUP: RESEARCH STRATEGY
 Development of methodologies for materials
processing optimisation by the use of the paradigm:
Optimization and failure analysis
nanostructure-microstructure–properties-performances
Material system Design
 Multiscale and multidisciplinary
Career Day Roma TRE – 22-03-2013
approach
 Modelling and simulating in
service behaviour, reliability
and degradation modes (materials oriented)
11

8. Edoardo Bemporad
WE KEEP ATTENTION TO:
 Workflow concerns
 Privacy
 Timing
 Cost control
 Reporting
 Data and samples handling concerns
 Redoundancy
 Affordability
Accessibility
Career Day Roma TRE – 22-03-2013

 Privacy
 Report standardization (Corporate Identity)
Everything is managed inside our intranet using
Microsoft Sharepoint™ CMS
12

9. Edoardo Bemporad
STM PEOPLE
 five staff unities
 two full tenured professors
 three researchers
 one tenured technician
 A team, financed mainly through research
projects:
 Four fellowship researchers
three doctoral students
Career Day Roma TRE – 22-03-2013

 one person with technical-administrative role
Manpower comprises also other master graduate in mechanical
engineering involved in training activities concerned with research
projects supported by industrial enterprises and undergraduate
students in mechanical engineering which are carrying out their
final master thesis work.
13

10. Edoardo Bemporad
PRINCIPAL RESEARCH PARTNERS (CUSTOMERS)
Italy Worldwide
 INFN – Laboratori Nazionali di Legnaro  Oak Ridge National Laboratory
(Pd) (ORNL, TN, USA)
 ENEA Casaccia dipartimento Materiali  University of Tennessee (TN, USA)
(RM)
 University of Oxford, Department of
 Centro Sviluppo Materiali (RM) Engineering Science (UK)
 Karlsruhe Institute of Technology
 Italian University Consortium on materials (KIT, Germany)
science and technology - INSTM
 SIOMEC (Saxonian Institute of
 National Research Council (CNR) Surface Mechanics) and Technische
 Department of Molecular Design
Universität Chemnitz, (Germany)
Career Day Roma TRE – 22-03-2013
 Universities  Lille University, Laboratoire de
Mécanique (France)
 Milano, Torino, Napoli, Modena, Roma 1,
Roma 2, Brescia, Cagliari, Firenze
 Central University of Venezuela,
School of Metallurgy and Materials
Science (Venezuela)
 University of Rosario (Argentina)
Several Private Firms
14

11. Edoardo Bemporad
STM FACILITIES: 4 LABORATORIES (500m2 tot)
1. LIME, Electron Microscopy lab
 Ion / Electronic / Stylus / Optical
2. MatEDP, Materials Modeling lab
 15 PC stations, Thermocalc, ANSYS, ABAQUS, Elastica,
EFS,…
3. MaTec, Materials Technology lab
 Mechanical characterization (Hardness, Micro-hardness,
Career Day Roma TRE – 22-03-2013
Nano-hardness, Abrasive Wear, Scratch), Salt Spray
4. MaDep, Coating technologies Lab
 Magnetron Sputtering for residual stress investigation
(duty cycle, bias, thicknesses, chemistry, process
gases…)
15

12. Edoardo Bemporad
 Coating
Deposition: Lab scale
Magnetron Sputtering – Physical
Vapour Deposition system
Career Day Roma TRE – 22-03-2013
19

13. Edoardo Bemporad Career Day Roma TRE – 22-03-2013
20
EQUIPMENT
MADEP, MS PVD

14. Edoardo Bemporad
 Surface
modification: Flame
treatment system (home made)
Career Day Roma TRE – 22-03-2013
21

15. Edoardo Bemporad
IMPROVEMENT AND OPTIMIZATION OF THE SURFACE FREE
ENERGY OF POLYMERIC SUBSTRATES BY FLAME TREATMENT
Process parameters observed:
1. Total flow rate;
2. Oxygen/propane ratio;
3. Distance sample-tip nozzle;
4. Frequency of sample pass on
flame;
5. Total time treatment.
Some results obtained through
Career Day Roma TRE – 22-03-2013
DOE Technique
22

16. Edoardo Bemporad
 2DImaging and nanofabrication: Optical
microscopes, Scanning electron
microscope, Transmission electron
microscope and Ion Beam / dual Beam
Career Day Roma TRE – 22-03-2013
microscope
23

17. Edoardo Bemporad
LIME LAB: SEM (FEI)
 30 Kv LaB6 filament
 Secondary electrons
 Backscattered electrons
 EDS to B, line & maps
 Cathode luminescence
 Specimen Current
Career Day Roma TRE – 22-03-2013
24

18. Edoardo Bemporad
LIME LAB: TEM (FEI)
 120kV LaB6 filament
 Double tilt
 EDS to B, point & line
 nanoprobe
Career Day Roma TRE – 22-03-2013
25

19. Edoardo Bemporad
LIME LAB: DUALBEAM (FEI) HELIOS 600 NANOLAB
early 2008
- Omnprobe
- GIS (4 gases)
- STEM
- EDS (Oxford)
Career Day Roma TRE – 22-03-2013
26

20. Edoardo Bemporad
 3DImaging, contact and non
contact probes: AFM, Confocal and
Interferometric optical
microscopes
Career Day Roma TRE – 22-03-2013
27

21. Edoardo Bemporad
LIME LAB: AFMS (1 NT-MDT + 1 DI)
50x50x5 microns range
All modes (contact, non
contact, lateral force,…)
Career Day Roma TRE – 22-03-2013
28

22. Edoardo Bemporad
PROFILOMETER (NON CONTACT, BOTH CONFOCAL
AND INTERFEROMETRIC)
 Confocal head:
Career Day Roma TRE – 22-03-2013
analysis of
complex shapes
 Interferometric with high z-range
head: Alpha = 45° Beta = 30° µm
4
3.5
(sub)nanometer
3
2.5
2
1.5
resolution in
1
9.32 µm
0.5
0
roughness analysis
-0.5
-1
-1.5
-2
-2.5
-3
-3.5
29
-4
0.715 mm 0.7 mm -4.5
-5

23. Edoardo Bemporad
 Composition and microstructure:
Energy Dispersive Spectroscopy
(on all electron microscopes) and
Xray Diffraction
Career Day Roma TRE – 22-03-2013
30

24. Edoardo Bemporad
LIME LAB: DRX
Career Day Roma TRE – 22-03-2013
… COMING SOON..! (2013, THIRD QUARTER)
31

25. Edoardo Bemporad
 Surfacefuncional properties:
Wettability, Wear resistance and
corrosion test
Career Day Roma TRE – 22-03-2013
32

26. Edoardo Bemporad
MATEC LAB: CONTACT ANGLE AND WETTABILITY
Career Day Roma TRE – 22-03-2013
Uni en 828 and ASTM D5725 - 99
33

27. Edoardo Bemporad
SEMI-AUTOMATED INSTRUMENT FOR CONTACT ANGLE MEASUREMENT AND
SURFACE FREE ENERGY MODELS
SFE models:
1. Zisman
2. Neumann
3. Girifalco
4. Fowkes
5. Owens-Wendt
6. Van Oss-Chaudhury-Good Sample holder(three
Light source, axes movement) Digital Camera to
polarized filter, acquire images on a
12X objectives PC
Career Day Roma TRE – 22-03-2013
screen diffuser
34

28. Edoardo Bemporad Career Day Roma TRE – 22-03-2013
35
HOME MADE TRIBOMETER
MATEC LAB:

29. Edoardo Bemporad
002 003 005
004
001
MATEC LAB: WEAR TEST
 Wear test device (prototype)
 Dynamic measurement of wear and friction coefficient at
the micron scale Campione 004
-502 60
50
-502,5
Affondamento [um]
40
-503
R2=0,98
Carico [g]
30
-503,5
20
-504
Affondamento 10
Carico
-504,5
0
-505 -10
0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150
Tempo [s]
Career Day Roma TRE – 22-03-2013
36

30. Edoardo Bemporad Career Day Roma TRE – 22-03-2013
37
MATEC LAB: SALT SPRAY 1M3 CHAMBER

31. Edoardo Bemporad
 Surfacestructural properties:
Micro and Nano-mechanical test
Career Day Roma TRE – 22-03-2013
38

32. Edoardo Bemporad
MATEC LAB: SCRATCH TESTER
Career Day Roma TRE – 22-03-2013
Depth profiling
Applied force feedback controlled
Acoustic emission sensor
Friction force measurement
39

33. Edoardo Bemporad
MACRO-SCALE INSTRUMENTED SPHERICAL
INDENTATION
Career Day Roma TRE – 22-03-2013
The stress-strain curve is obtained by
Prototipal instrument for macro- least-square fitting of exp data with a
scale spherical indentation FEM-modelled database of L-h curves
40

34. Edoardo Bemporad Career Day Roma TRE – 22-03-2013
41
Vickers
Knoop
MATEC LAB: HARDNESS TESTERS

35. Edoardo Bemporad
ROMA TRE NANOHARDNESS TESTER. AGILENT G200.
XP AND DCM-II HEADS. ULTRA-FAST MAPPING
Career Day Roma TRE – 22-03-2013
42

36. Edoardo Bemporad Career Day Roma TRE – 22-03-2013
43
Berkovich tip
NANOHARDNESS TESTER
ROMA TRE

37. Edoardo Bemporad
OUTLINE
 Research Group presentation
 Mission
 Vision
 Research strategy
 People and research Partners
 Facilities
 Examples from recent work
Career Day Roma TRE – 22-03-2013
 Few short case studies on industry focused research
activates
 Extended case study: Spatially resolved residual stress
measurement at the micron scale (x,y and z)
44

38. Edoardo Bemporad
MICRO AND NANO-SCALE SENSOR NETWORKS
256 micronodes network
Starting Grant
Micronodes hosting
sensors/actuators, MEMS or
NEMS
Expanded network and folded in 3D
Career Day Roma TRE – 22-03-2013
Polyimide highly extendible
microwires coated with thin
metal films
G.Lanzara et al, Advanced Materials, 22, 41,
4643-4648, 2010 45

39. Edoardo Bemporad
MATERIALS FOR ELECTRODES OF LI-BATTERIES
Electrode:
Particles + Matrix
Career Day Roma TRE – 22-03-2013
 Use of 2D dynamic nanoindentation mapping and
focused ion beam (FIB) observations for the
analysis of ithe nano-scale degradation
mechanisms of innovative Li-batteries electrodes
46

40. Edoardo Bemporad
ENGINEEREED MICRO-CAPSULES FOR NEW DETERGENTS
Career Day Roma TRE – 22-03-2013
 Focused ion beam section analysis of microcapsules for process
optimization;
 Nano-mechanical testing on single-capsule for the mechanical
characterization and local surface free energy measurement
47

41. Edoardo Bemporad
NEW NANO-MATERIALS FOR THE SEMICONDUCTOR INDUSTRY
Career Day Roma TRE – 22-03-2013
 Compression testing on single octapod-shaped colloidal nano-crystals;
 Analysis of single-particle deformation mechanisms and design of new
nano-porous film made by particle assembly
48

42. Edoardo Bemporad
INNOVATION IN ECOGRAPHY SENSORS
 In-line
introduction
of plasma
treatment
Career Day Roma TRE – 22-03-2013
to improve
adhesion
 Extensive use of nanoindentation and scratch testing,
supported by 3D microscopy and SEM-FIB
49

43. Edoardo Bemporad
RESIDUAL STRESS MEASUREMENT ON SUSPENDED MICRO-BRIDGES
Career Day Roma TRE – 22-03-2013
50

44. FIB-BASED FAILURE ANALYSIS AND NANO-MECHANICAL
CHARACTERIZATION OF MEMS STRUCTURES
calculation of the stiffness of MEMS membrane by the use of a wedge
indenter – spring stiffness taken into account 51

45. OTTIMIZZAZIONE DEL COEFFICIENTE D’ATTRITO IN
Edoardo Bemporad
PNEUMATICI
Introducing STM to Technion
52

46. Edoardo Bemporad
e.bemporad@stm.uniroma3.it
Acknowledgements:
Career Day Roma TRE – 22-03-2013
Fabio Carassiti
Marco Sebastiani
Giulia Lanzara
Daniele De Felicis
Vincenzo Mangione
Mattia Piccoli
Marco Renzelli and
Dragana Nikolic 53

47. Edoardo Bemporad Career Day Roma TRE – 22-03-2013
54