Scienza e Tecnologia dei Materiali     (dipartimento di Ingegneria, Roma TRE)      Nanotecnologie ecaratterizzazione avanz...
Edoardo Bemporadwww.stm.uniroma3.it                                                         Career Day Roma TRE – 22-03-20...
Edoardo BemporadOUTLINE   Research Group presentation       Mission       Vision       Research strategy       People...
Edoardo BemporadMISSION   Study of surface properties of systems for advanced    mechanical engineering and micro-devices...
Edoardo BemporadVISION   Coupling nano-mechanical testing with high resolution    microscopy      High-resolution depth-...
Edoardo Bemporad STM GROUP: VISION                                      Increasing                   Product/process   out...
Edoardo BemporadSTM GROUP: RESEARCH STRATEGY   Development of methodologies for materials    processing optimisation by t...
Edoardo BemporadWE KEEP ATTENTION TO:    Workflow concerns       Privacy       Timing       Cost control       Report...
Edoardo BemporadSTM PEOPLE   five staff unities       two full tenured professors       three researchers       one te...
Edoardo BemporadPRINCIPAL RESEARCH PARTNERS (CUSTOMERS)                       Italy                                      W...
Edoardo BemporadSTM FACILITIES: 4 LABORATORIES (500m2 tot) 1. LIME, Electron Microscopy lab     Ion / Electronic / Stylus...
Edoardo Bemporad Coating        Deposition: Lab scale Magnetron Sputtering – Physical Vapour Deposition system           ...
Edoardo Bemporad   Career Day Roma TRE – 22-03-2013                                               20    EQUIPMENT  MADEP, ...
Edoardo Bemporad Surface        modification: Flame treatment system (home made)                                     Care...
Edoardo Bemporad IMPROVEMENT   AND OPTIMIZATION OF THE SURFACE FREE ENERGY OF POLYMERIC SUBSTRATES BY   FLAME   TREATMENT ...
Edoardo Bemporad 2DImaging and nanofabrication: Optical microscopes, Scanning electron microscope, Transmission electron ...
Edoardo Bemporad    LIME LAB: SEM (FEI)   30 Kv LaB6 filament   Secondary electrons   Backscattered electrons   EDS to...
Edoardo Bemporad    LIME LAB: TEM (FEI)   120kV LaB6 filament   Double tilt   EDS to B, point & line   nanoprobe      ...
Edoardo BemporadLIME LAB: DUALBEAM (FEI) HELIOS 600 NANOLAB      early 2008-   Omnprobe-   GIS (4 gases)-   STEM-   EDS (O...
Edoardo Bemporad 3DImaging, contact and non contact probes: AFM, Confocal and Interferometric optical microscopes        ...
Edoardo Bemporad LIME LAB: AFMS (1 NT-MDT + 1 DI)50x50x5   microns rangeAll modes (contact, noncontact, lateral force,…)...
Edoardo Bemporad     PROFILOMETER (NON CONTACT, BOTH CONFOCAL     AND INTERFEROMETRIC)                                    ...
Edoardo Bemporad Composition  and microstructure: Energy Dispersive Spectroscopy (on all electron microscopes) and Xray D...
Edoardo BemporadLIME LAB: DRX                                                Career Day Roma TRE – 22-03-2013… COMING SOON...
Edoardo Bemporad Surfacefuncional properties: Wettability, Wear resistance and corrosion test                            ...
Edoardo BemporadMATEC LAB: CONTACT ANGLE          AND   WETTABILITY                                                       ...
Edoardo Bemporad SEMI-AUTOMATED INSTRUMENT FOR CONTACT ANGLE MEASUREMENT AND SURFACE FREE ENERGY MODELSSFE models:1.   Zis...
Edoardo Bemporad          Career Day Roma TRE – 22-03-2013                                                      35   HOME ...
Edoardo Bemporad                                                                                                      002 ...
Edoardo Bemporad                      Career Day Roma TRE – 22-03-2013                                                    ...
Edoardo Bemporad Surfacestructural properties: Micro and Nano-mechanical test                                       Caree...
Edoardo BemporadMATEC LAB: SCRATCH TESTER                                         Career Day Roma TRE – 22-03-2013Depth pr...
Edoardo Bemporad    MACRO-SCALE INSTRUMENTED SPHERICAL    INDENTATION                                                     ...
Edoardo Bemporad                          Career Day Roma TRE – 22-03-2013                                                ...
Edoardo BemporadROMA TRE NANOHARDNESS TESTER. AGILENT G200.XP AND DCM-II HEADS. ULTRA-FAST MAPPING                        ...
Edoardo Bemporad         Career Day Roma TRE – 22-03-2013                                                                4...
Edoardo BemporadOUTLINE   Research Group presentation     Mission     Vision     Research strategy     People and res...
Edoardo BemporadMICRO AND NANO-SCALE SENSOR NETWORKS   256 micronodes network                                             ...
Edoardo BemporadMATERIALS FOR        ELECTRODES OF LI-BATTERIESElectrode:Particles + Matrix                               ...
Edoardo Bemporad    ENGINEEREED MICRO-CAPSULES FOR NEW DETERGENTS                                                         ...
Edoardo Bemporad    NEW   NANO-MATERIALS FOR THE SEMICONDUCTOR INDUSTRY                                                   ...
Edoardo Bemporad    INNOVATION IN ECOGRAPHY SENSORS   In-line    introduction    of plasma    treatment                  ...
Edoardo BemporadRESIDUAL STRESS MEASUREMENT ON SUSPENDED MICRO-BRIDGES                                                    ...
FIB-BASED FAILURE ANALYSIS AND NANO-MECHANICALCHARACTERIZATION OF MEMS STRUCTURES  calculation of the stiffness of MEMS me...
OTTIMIZZAZIONE DEL COEFFICIENTE D’ATTRITO IN                                                    Edoardo BemporadPNEUMATICI...
Edoardo Bemporade.bemporad@stm.uniroma3.it    Acknowledgements:                                  Career Day Roma TRE – 22-...
Edoardo Bemporad   Career Day Roma TRE – 22-03-2013                                               54
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Meccanica: Nanotecnologie e caratterizzazione avanzata al servizio dell’ingegneria by Edoardo Bemporad

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Le nanotecnologie sono tecnologie trasversali e abilitanti che costituiscono un modo radicalmente nuovo di realizzare materiali, prodotti e dispositivi con caratteristiche estremamente migliorate o del tutto nuove. Nella breve presentazione saranno illustrate le potenzialità del laboratorio in termini di supporto allo sviluppo di prodotti e di processi anche mediante alcuni casi reali di collaborazione con aziende.

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Meccanica: Nanotecnologie e caratterizzazione avanzata al servizio dell’ingegneria by Edoardo Bemporad

  1. 1. Scienza e Tecnologia dei Materiali (dipartimento di Ingegneria, Roma TRE) Nanotecnologie ecaratterizzazione avanzata al servizio dell’ingegneria 2013-03 Edoardo Bemporad
  2. 2. Edoardo Bemporadwww.stm.uniroma3.it Career Day Roma TRE – 22-03-2013  STM Roma TRE channel on YouTube: http://www.youtube.com/user/STMRomaTRE  Image Gallery on flickr http://www.flickr.com/photos/stmdimiuniroma3/ 5
  3. 3. Edoardo BemporadOUTLINE Research Group presentation  Mission  Vision  Research strategy  People and research Partners  Facilities Examples from recent work  Spatially resolved residual stress measurement at the Career Day Roma TRE – 22-03-2013 micron scale (x,y and z)  Development of novel thin film materials for advanced mechanical application 7
  4. 4. Edoardo BemporadMISSION Study of surface properties of systems for advanced mechanical engineering and micro-devices applications, through numerical and analytical modeling, advanced characterization methods, technological, mechanical, tribological and chemical tests. Development of advanced multi-scale methodology related with morphological, micro-structural and micro-analytical characterization of materials through optical, ionic, electronic and contact probes. Career Day Roma TRE – 22-03-2013 8
  5. 5. Edoardo BemporadVISION Coupling nano-mechanical testing with high resolution microscopy  High-resolution depth-resolved nano-scale mechanical characterization of engineered surfaces and multiphase materials;  (Sub)microscale analysis of residual stress and stress gradients in thin coatings and complex structures  FIB-SEM-TEM-AFM investigation of nano-scale deformation mechanisms and influence of microstructures on mechanical and functional behavior;  Roughness and inducing roughness methods Vs surface Career Day Roma TRE – 22-03-2013 energy: measurement and dependence with surface chemistry In-house deposition plant  MS-PVD: effect of deposition parameters on performances (adhesion, wear, bio, others..) 9
  6. 6. Edoardo Bemporad STM GROUP: VISION Increasing Product/process output quality innovation (companies) Improving ofcharacterization understanding methods: fine capabilities tuning or new applications (academic) Career Day Roma TRE – 22-03-2013 new materials Development and new devices Advanced use Routine use 10
  7. 7. Edoardo BemporadSTM GROUP: RESEARCH STRATEGY Development of methodologies for materials processing optimisation by the use of the paradigm: Optimization and failure analysis nanostructure-microstructure–properties-performances Material system Design Multiscale and multidisciplinary Career Day Roma TRE – 22-03-2013 approach Modelling and simulating in service behaviour, reliability and degradation modes (materials oriented) 11
  8. 8. Edoardo BemporadWE KEEP ATTENTION TO: Workflow concerns  Privacy  Timing  Cost control  Reporting Data and samples handling concerns  Redoundancy  Affordability Accessibility Career Day Roma TRE – 22-03-2013   Privacy  Report standardization (Corporate Identity) Everything is managed inside our intranet using Microsoft Sharepoint™ CMS 12
  9. 9. Edoardo BemporadSTM PEOPLE five staff unities  two full tenured professors  three researchers  one tenured technician A team, financed mainly through research projects:  Four fellowship researchers three doctoral students Career Day Roma TRE – 22-03-2013   one person with technical-administrative role Manpower comprises also other master graduate in mechanicalengineering involved in training activities concerned with research projects supported by industrial enterprises and undergraduate students in mechanical engineering which are carrying out their final master thesis work. 13
  10. 10. Edoardo BemporadPRINCIPAL RESEARCH PARTNERS (CUSTOMERS) Italy Worldwide INFN – Laboratori Nazionali di Legnaro  Oak Ridge National Laboratory (Pd) (ORNL, TN, USA) ENEA Casaccia dipartimento Materiali  University of Tennessee (TN, USA) (RM)  University of Oxford, Department of Centro Sviluppo Materiali (RM) Engineering Science (UK)  Karlsruhe Institute of Technology Italian University Consortium on materials (KIT, Germany) science and technology - INSTM  SIOMEC (Saxonian Institute of National Research Council (CNR) Surface Mechanics) and Technische  Department of Molecular Design Universität Chemnitz, (Germany) Career Day Roma TRE – 22-03-2013 Universities  Lille University, Laboratoire de Mécanique (France)  Milano, Torino, Napoli, Modena, Roma 1, Roma 2, Brescia, Cagliari, Firenze  Central University of Venezuela, School of Metallurgy and Materials Science (Venezuela)  University of Rosario (Argentina) Several Private Firms 14
  11. 11. Edoardo BemporadSTM FACILITIES: 4 LABORATORIES (500m2 tot) 1. LIME, Electron Microscopy lab  Ion / Electronic / Stylus / Optical 2. MatEDP, Materials Modeling lab  15 PC stations, Thermocalc, ANSYS, ABAQUS, Elastica, EFS,… 3. MaTec, Materials Technology lab  Mechanical characterization (Hardness, Micro-hardness, Career Day Roma TRE – 22-03-2013 Nano-hardness, Abrasive Wear, Scratch), Salt Spray 4. MaDep, Coating technologies Lab  Magnetron Sputtering for residual stress investigation (duty cycle, bias, thicknesses, chemistry, process gases…) 15
  12. 12. Edoardo Bemporad Coating Deposition: Lab scale Magnetron Sputtering – Physical Vapour Deposition system Career Day Roma TRE – 22-03-2013 19
  13. 13. Edoardo Bemporad Career Day Roma TRE – 22-03-2013 20 EQUIPMENT MADEP, MS PVD
  14. 14. Edoardo Bemporad Surface modification: Flame treatment system (home made) Career Day Roma TRE – 22-03-2013 21
  15. 15. Edoardo Bemporad IMPROVEMENT AND OPTIMIZATION OF THE SURFACE FREE ENERGY OF POLYMERIC SUBSTRATES BY FLAME TREATMENT Process parameters observed: 1. Total flow rate; 2. Oxygen/propane ratio; 3. Distance sample-tip nozzle; 4. Frequency of sample pass on flame; 5. Total time treatment.Some results obtained through Career Day Roma TRE – 22-03-2013 DOE Technique 22
  16. 16. Edoardo Bemporad 2DImaging and nanofabrication: Optical microscopes, Scanning electron microscope, Transmission electron microscope and Ion Beam / dual Beam Career Day Roma TRE – 22-03-2013 microscope 23
  17. 17. Edoardo Bemporad LIME LAB: SEM (FEI) 30 Kv LaB6 filament Secondary electrons Backscattered electrons EDS to B, line & maps Cathode luminescence Specimen Current Career Day Roma TRE – 22-03-2013 24
  18. 18. Edoardo Bemporad LIME LAB: TEM (FEI) 120kV LaB6 filament Double tilt EDS to B, point & line nanoprobe Career Day Roma TRE – 22-03-2013 25
  19. 19. Edoardo BemporadLIME LAB: DUALBEAM (FEI) HELIOS 600 NANOLAB early 2008- Omnprobe- GIS (4 gases)- STEM- EDS (Oxford) Career Day Roma TRE – 22-03-2013 26
  20. 20. Edoardo Bemporad 3DImaging, contact and non contact probes: AFM, Confocal and Interferometric optical microscopes Career Day Roma TRE – 22-03-2013 27
  21. 21. Edoardo Bemporad LIME LAB: AFMS (1 NT-MDT + 1 DI)50x50x5 microns rangeAll modes (contact, noncontact, lateral force,…) Career Day Roma TRE – 22-03-2013 28
  22. 22. Edoardo Bemporad PROFILOMETER (NON CONTACT, BOTH CONFOCAL AND INTERFEROMETRIC)  Confocal head: Career Day Roma TRE – 22-03-2013 analysis of complex shapes Interferometric with high z-range head: Alpha = 45° Beta = 30° µm 4 3.5 (sub)nanometer 3 2.5 2 1.5 resolution in 1 9.32 µm 0.5 0 roughness analysis -0.5 -1 -1.5 -2 -2.5 -3 -3.5 29 -4 0.715 mm 0.7 mm -4.5 -5
  23. 23. Edoardo Bemporad Composition and microstructure: Energy Dispersive Spectroscopy (on all electron microscopes) and Xray Diffraction Career Day Roma TRE – 22-03-2013 30
  24. 24. Edoardo BemporadLIME LAB: DRX Career Day Roma TRE – 22-03-2013… COMING SOON..! (2013, THIRD QUARTER) 31
  25. 25. Edoardo Bemporad Surfacefuncional properties: Wettability, Wear resistance and corrosion test Career Day Roma TRE – 22-03-2013 32
  26. 26. Edoardo BemporadMATEC LAB: CONTACT ANGLE AND WETTABILITY Career Day Roma TRE – 22-03-2013 Uni en 828 and ASTM D5725 - 99 33
  27. 27. Edoardo Bemporad SEMI-AUTOMATED INSTRUMENT FOR CONTACT ANGLE MEASUREMENT AND SURFACE FREE ENERGY MODELSSFE models:1. Zisman2. Neumann3. Girifalco4. Fowkes5. Owens-Wendt6. Van Oss-Chaudhury-Good Sample holder(three Light source, axes movement) Digital Camera to polarized filter, acquire images on a 12X objectives PC Career Day Roma TRE – 22-03-2013 screen diffuser 34
  28. 28. Edoardo Bemporad Career Day Roma TRE – 22-03-2013 35 HOME MADE TRIBOMETER MATEC LAB:
  29. 29. Edoardo Bemporad 002 003 005 004 001 MATEC LAB: WEAR TEST Wear test device (prototype) Dynamic measurement of wear and friction coefficient at the micron scale Campione 004 -502 60 50 -502,5 Affondamento [um] 40 -503 R2=0,98 Carico [g] 30 -503,5 20 -504 Affondamento 10 Carico -504,5 0 -505 -10 0 10 20 30 40 50 60 70 80 90 100 110 120 130 140 150 Tempo [s] Career Day Roma TRE – 22-03-2013 36
  30. 30. Edoardo Bemporad Career Day Roma TRE – 22-03-2013 37 MATEC LAB: SALT SPRAY 1M3 CHAMBER
  31. 31. Edoardo Bemporad Surfacestructural properties: Micro and Nano-mechanical test Career Day Roma TRE – 22-03-2013 38
  32. 32. Edoardo BemporadMATEC LAB: SCRATCH TESTER Career Day Roma TRE – 22-03-2013Depth profilingApplied force feedback controlledAcoustic emission sensorFriction force measurement 39
  33. 33. Edoardo Bemporad MACRO-SCALE INSTRUMENTED SPHERICAL INDENTATION Career Day Roma TRE – 22-03-2013 The stress-strain curve is obtained byPrototipal instrument for macro- least-square fitting of exp data with a scale spherical indentation FEM-modelled database of L-h curves 40
  34. 34. Edoardo Bemporad Career Day Roma TRE – 22-03-2013 41 Vickers Knoop MATEC LAB: HARDNESS TESTERS
  35. 35. Edoardo BemporadROMA TRE NANOHARDNESS TESTER. AGILENT G200.XP AND DCM-II HEADS. ULTRA-FAST MAPPING Career Day Roma TRE – 22-03-2013 42
  36. 36. Edoardo Bemporad Career Day Roma TRE – 22-03-2013 43 Berkovich tip NANOHARDNESS TESTER ROMA TRE
  37. 37. Edoardo BemporadOUTLINE Research Group presentation  Mission  Vision  Research strategy  People and research Partners  Facilities Examples from recent work Career Day Roma TRE – 22-03-2013  Few short case studies on industry focused research activates  Extended case study: Spatially resolved residual stress measurement at the micron scale (x,y and z) 44
  38. 38. Edoardo BemporadMICRO AND NANO-SCALE SENSOR NETWORKS 256 micronodes network Starting Grant Micronodes hosting sensors/actuators, MEMS or NEMSExpanded network and folded in 3D Career Day Roma TRE – 22-03-2013 Polyimide highly extendible microwires coated with thin metal films G.Lanzara et al, Advanced Materials, 22, 41, 4643-4648, 2010 45
  39. 39. Edoardo BemporadMATERIALS FOR ELECTRODES OF LI-BATTERIESElectrode:Particles + Matrix Career Day Roma TRE – 22-03-2013  Use of 2D dynamic nanoindentation mapping and focused ion beam (FIB) observations for the analysis of ithe nano-scale degradation mechanisms of innovative Li-batteries electrodes 46
  40. 40. Edoardo Bemporad ENGINEEREED MICRO-CAPSULES FOR NEW DETERGENTS Career Day Roma TRE – 22-03-2013 Focused ion beam section analysis of microcapsules for process optimization; Nano-mechanical testing on single-capsule for the mechanical characterization and local surface free energy measurement 47
  41. 41. Edoardo Bemporad NEW NANO-MATERIALS FOR THE SEMICONDUCTOR INDUSTRY Career Day Roma TRE – 22-03-2013 Compression testing on single octapod-shaped colloidal nano-crystals; Analysis of single-particle deformation mechanisms and design of new nano-porous film made by particle assembly 48
  42. 42. Edoardo Bemporad INNOVATION IN ECOGRAPHY SENSORS In-line introduction of plasma treatment Career Day Roma TRE – 22-03-2013 to improve adhesion Extensive use of nanoindentation and scratch testing, supported by 3D microscopy and SEM-FIB 49
  43. 43. Edoardo BemporadRESIDUAL STRESS MEASUREMENT ON SUSPENDED MICRO-BRIDGES Career Day Roma TRE – 22-03-2013 50
  44. 44. FIB-BASED FAILURE ANALYSIS AND NANO-MECHANICALCHARACTERIZATION OF MEMS STRUCTURES calculation of the stiffness of MEMS membrane by the use of a wedge indenter – spring stiffness taken into account 51
  45. 45. OTTIMIZZAZIONE DEL COEFFICIENTE D’ATTRITO IN Edoardo BemporadPNEUMATICI Introducing STM to Technion 52
  46. 46. Edoardo Bemporade.bemporad@stm.uniroma3.it Acknowledgements: Career Day Roma TRE – 22-03-2013 Fabio Carassiti Marco Sebastiani Giulia Lanzara Daniele De Felicis Vincenzo Mangione Mattia Piccoli Marco Renzelli and Dragana Nikolic 53
  47. 47. Edoardo Bemporad Career Day Roma TRE – 22-03-2013 54

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