Introducing XFlash 6
 

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Introducing the new XFlash 6 detectors for energy-dispersive X-ray spectrometry on scanning and transmission electron microscopes. Elemental analysis taken to the next level - enjoy!

Introducing the new XFlash 6 detectors for energy-dispersive X-ray spectrometry on scanning and transmission electron microscopes. Elemental analysis taken to the next level - enjoy!

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Introducing XFlash 6 Presentation Transcript

  • 1. A new generation in EDS performanceThe new Slim-line XFlash® 6 seriesQUANTAX – EDS with Slim-line Technology for SEM and TEMSam Scheller, Global Product Manager EDS/SEM, Bruker Nano GmbH Innovation with Integrity
  • 2. Overview• Brief introduction to the new XFlash® 6 family for SEM and TEM• XFlash® 6 Series – the Ideal Detector for Every Application• Detector Sizes from 10 mm² to 100 mm² for SEM and TEM• Highest Throughput for Fastest Results• Best Energy Resolution for Challenging Tasks• Slim-line, Compact and Flexible• ESPRIT – the Ideal Analytical Software Suite for SEM and TEM 07.06.2012 2
  • 3. IntroductionXFlash® 6 family for SEM and TEM Excellence in X-Ray Analysis for the Electron Microscope ● Save time – New slim line technology detectors and high performance pulse processing get the job done faster ● Save effort – motorized detector movement and light weight design make detector handling easier ● Gain more precision – large area SDDs and high energy resolution provide the highest quality spectra for reliable and precise analysis ● Gain more reliability – the world most comprehensive atomic database ensures most dependable low energy peak identification ● Gain more accuracy – the most sophisticated algorithms for quantification and the unique combinability of standardless and standard based methods provide highest accuracy results 07.06.2012 3
  • 4. XFlash® 6 SeriesThe Ideal Detector for Every Application Wide range of detector sizes ● 10, 30, 60 and 100 mm² area detectors for ideal measurement conditions from micro- and nanoanalysis Best throughput for fastest measurements ● Over 1,5 Mcps input ● Over 600 kcps output ● New SVE 6 pulse processor with advanced processing features Best energy resolution for low energy analysis ● 121eV limited edition ● 123eV ultimate class ● 126eV premium class ● 129eV standard class Slim-line detector technology – for more counts ● Shortest detector-sample distance for best solid angle ● Best take-off angle in TEM for lowest background and better LOD More compact design and low weight – less than 3.75kg ● High precision motorized fully integrated slider ● New heat sink body geometry with more cooling capacity 07.06.2012 4
  • 5. XFlash® 6 SeriesDetector Sizes from 10 to 100 mm² XFlash® 6 for SEM XFlash® 6T for TEM The XFlash® 6 detector series for SEM, FIB- The XFlash® 6T detectors for TEM and SEM and µ-probes, provides maximum STEM are designed for minimum flexibility for all analytical conditions mechanical and electromagnetic interference. The design provides optimum take-off angle and avoid the necessity for sample tilt.Area 10 mm² 30 mm² 60 mm² 100 mm²SEM XFlash® 6|10 XFlash® 6|30 XFlash® 6|60 XFlash® 6|100TEM XFlash® 6T|30 XFlash® 6T|60 07.06.2012 5
  • 6. XFlash® 6 Series for SEMs and µ-ProbesThe XFlash® 6|10 The ultimate resolution SDD in the Market ● Best energy resolution on the market ● Best light element/low energy performance Guaranteed resolutions 129 eV Standard (B-Am) 126 eV Premium (Be-Am) 123 eV Ultimate (Be-Am) 121 eV Limited (Be-Am) XFlash 6|10 121 eV Area: 10mm² Max Input: 1,500 kcps Typical Resolution Mn Kα: 120eV F Kα: 47 eV C Kα: 38 eV 07.06.2012 6
  • 7. XFlash® 6 Series for SEMsThe XFlash® 6|30 The versatile medium sized SDD ● For micro- and nanoanalysis ● For high count rate spectral imaging ● Ideal partner for fast EBSD analysis Guaranteed resolutions 129 eV Standard (B-Am) 126 eV Premium (Be-Am) 123 eV Ultimate (Be-Am) XFlash 6|30 123 eV Area: 30mm² Max Input: 1,500 kcps Resolution Mn Kα < 123 eV F Kα: 53 eV C Kα: 45 eV 07.06.2012 7
  • 8. XFlash® 6 Series for SEMsThe XFlash® 6|60 Large solid angle SDD for nanoanalysis ● 60 mm² for low beam energies ● Ideal for nanoparticles and biological samples ● Ideal partner for high resolution EBSD Guaranteed resolutions 129 eV Standard (B-Am) 126 eV Premium (Be-Am) XFlash 6|60 126 eV Area: 60mm² Max Input: 1,500 kcps Typical Resolution Mn Kα: <125eV F Kα: 60 eV C Kα: 51 eV 07.06.2012 8
  • 9. XFlash® 6 Series for SEMsThe XFlash® 6|100 Largest area SDD for low x-ray yield analysis (cold-FEG) ● 100 mm² for special analytical conditions ● Ideal for low beam current cold FEG-SEMs ● And for sensitive sample analysis Guaranteed resolution 129 eV Standard (B-Am) XFlash 6|100 129 eV Area: 100mm² Max Input: 1,500 kcps Typical Resolution Mn Kα: <127eV F Kα: 67 eV C Kα: 57 eV 07.06.2012 9
  • 10. XFlash® 6 Series for TEMs and S/TEMsThe XFlash® 6T|30 The first SDD for aberration corrected S/TEM ● All-rounder S/TEM analysis with 30 mm² ● Ideal for aberration corrected S/TEM Guaranteed resolutions 129 eV Standard (B-Am) 126 eV Premium (Be-Am) 123 eV Ultimate (Be-Am) XFlash 6T|30 123 eV Area: 30mm² Max Input: 1,500 kcps Resolution Mn Kα < 123 eV F Kα: 53 eV C Kα: 45 eV 07.06.2012 10
  • 11. XFlash® 6 Series for TEMs and S/TEMsThe XFlash® 6T|60 Large solid angle SDD for Å-scale TEM analysis ● 60 mm² detector for low X-ray yield conditions ● Å-scale analysis in aberration corrected STEMs Guaranteed resolutions 129 eV Standard (B-Am) 126 eV Premium (Be-Am) XFlash 6T|60 126 eV Area: 60mm² Max Input: 1,500 kcps Typical Resolution Mn Kα: <125eV F Kα: 60 eV C Kα: 51 eV 07.06.2012 11
  • 12. XFlash® 6 SeriesHighest Throughput for Fastest Results The new SVE 6 Signal Processing Unit ● Key to the performance of new QUANTAX ● Superior processing speed ● Guaranteed reliable results at any count rate ● Up to 600 kcps output at 1500 kcps input Highest throughput on the market ● High input count rates (IPCR) for fast results ● IPCR plus long acquisition for trace element detection ● In low IPCR situation (e.g. TEM or cold FEG-SEM) low dead time leads to better statistics or shorter overall acquisition times 07.06.2012 12
  • 13. XFlash® 6 SeriesHighest Throughput for Fastest Results XFlash 6 700000 Max. throughput XFlash® detectors 600000 500000 400000 Max. throughput of other OPCR small area detectors 300000 Max. throughput of other large area detectors 200000 XSPV 60 Output (cps) XSPV 130 Output (cps) 100000 XSPV 275 Output (cps) XSPV 400 Output (cps) XSPV 600 Output (cps) 0 0 200000 400000 600000 800000 1000000 1200000 1400000 IPCR 07.06.2012 13
  • 14. XFlash® 6 SeriesHighest Throughput for Fastest ResultsPitchblende sample:● 25 kV● 50x magnification● Xflash® 6|30● 200 kcps input● 1000 x 750 pixel per HyperMap● 2,7 µm per pixel● 8 µs per pixel● 60 seconds 07.06.2012 14
  • 15. XFlash® 6 SeriesBest Energy Resolution for Tricky TasksMnF sample: 120eV● 15 kV● XFlash® 6|10● 100 seconds● 5 kcps input: 120 eV● 100 kcps input: 121 eV 07.06.2012 15
  • 16. XFlash® 6 SeriesBest Energy Resolution for Tricky Tasks XFlash® 6 Resolution Excellent energy resolution specifically in the low energy range is essential for the ambitious tasks of nano-analysis. The typical resolution curve of a 121 eV XFlash® exactly follows the theoretical curve of the fundamental limit for the energy resolution. Other SDD with external field effect transistor (FET) deviate from this curve in the challenging low energy range. 07.06.2012 16
  • 17. XFlash® 6 SeriesBest Energy Resolution for Tricky Tasks XFlash® 6 Resolution Classes All resolutions are specified exceeding ISO 15632:2002 requirements. Limited Edition ● Limited, unrivalled 121 eV XFlash® 6|10 Ultimate Class ● Ultimate class: 123 eV Typical Resolutions for XFlash® Classes: XFlash® 6|10 Premium Class ● Premium class: 126 eV XFlash® 6|10, 6|30 and 6|60 Standard Class 121 47 38 ● Standard class: 129 eV 07.06.2012 17
  • 18. XFlash® 6 SeriesBest Energy Resolution for Tricky Tasks The outstanding energy resolution of the XFlash® 6 provides the basis for optimum peak deconvolution and light element performance. It is necessary for reaching the very light elements down to and below boron. These two spectra show a boron nitride spectrum acquired by a 121 eV (red) and 129 eV (blue) detector. 07.06.2012 18
  • 19. XFlash® 6 SeriesBest Energy Resolution for Tricky Tasks 60µm The combination of excellent hardware and software in QUANTAX, allows to solve analytical challenges like never before. This boron map of a weld seam shows different borides, which can easily be distinguished by their boron content. Red being the highest concentration, is chromium boride, green being chromium nickel boride, and blue being tri-nickel boride. This map was acquired with a XFlash® 6|60 126 eV detector 07.06.2012 19
  • 20. XFlash® 6 SeriesResolution Stability To keep measurement times short, measuring at higher count rates is often desired – however, this comes with a compromise in energy resolution. This reduces detection limits and accuracy, as deconvolution becomes more difficult. With XFlash® 6 such a compromise is lower, as resolution is kept to higher count rates than with other SDDs with external FETs. 07.06.2012 20
  • 21. XFlash® 6 SeriesSlim-line and Solid Angle Solid angle X-rays radiate in all directions. Simply put: the solid angle is the portion of a hemisphere above or below a sample that the detector sees. The larger the solid angle of a detector, the more sample radiation is collected. There are basically two methods to improve solid angle: 1. Increase the detector chip size – this leads to a linear increase of solid angle (left side). 2. Decrease the detector sample distance – this squares the solid angle when the distance is halved (right side). Bruker uses both methods to provide best solid angle in relation to chip area. 07.06.2012 21
  • 22. XFlash® 6 SeriesSlim-line and Solid Angle Slim-line technology – ultra thin detector fingers, providing: ● Maximized solid angle ● Clearance of other detectors ● Optimized take-off angle for TEM ● 3 standard optimized finger lengths 07.06.2012 22
  • 23. XFlash® 6 SeriesSlim-line and Take-off Angle Take-off angle (TOA) ● The angle under which the detector “looks” at the sample. ● The higher the take-off angle: ● the less the spectrum is affected by absorption and ● the better is the peak to background (P/B) ratio. ● Common take-off angles of XFlash® 6 slim-line detectors are in the range of 30-45°for SEM and 11–26°for TEM. 07.06.2012 23
  • 24. XFlash® 6 SeriesCompact Design and Low Weight Advantages of compact and light-weight design: ● New high-precision motorized slider ● Exact repositioning of the detector ● New larger surface area heat sink ● Reduced overall height ● Low weight - less than 3.75 kg ● Minimal interference with the electron microscope ● Optionally available with welded bellows (standard for TEM) 07.06.2012 24
  • 25. XFlash® 6 SeriesFlexibility of the VZ-Adapter Maximum measurement flexibility through VZ (variable Z)-Adapter: ● Tilt and move the detector into the optimum working distance ● Maximized solid angle and count rate ● Optimized in-situ adjustment of combined EDS and EBSD measurements ● Now optionally available with bellows ● Possibility of on-site upgrades 07.06.2012 25
  • 26. ESPRIT – the Ideal Analytical SoftwareSuite for SEM and TEM Real-time spectrometry ● Instant spectrum visibility and live quantification ● Simultaneous acquisition of multiple spectra, even from multiple detectors Light element / low energy analysis ● Most comprehensive database containing K, L, M and N lines for accurate element identification ● TQuant – optimized standardless low energy range quantification Hybrid quantification ● Unique combination of standardless and standard-based quantification ● Customizable for most reliable and precise chemical quantification HyperMap ● The database contains a spectrum for each pixel ● Enables on- and offline processing ● Live background removal and deconvolution Automation of routines ● Automate virtually any measurement and analysis ● Optimize your instrument usage ● Unattended operation whether during the day, at night or over the weekend 07.06.2012 26
  • 27. The New QUANTAX XFlash® 6 SeriesESPRIT – Real Time Spectrometry Real Time Spectrometry To utilize the speed of the XFlash® 6, it is necessary to have software capable of keeping up with the high throughput. We developed real-time spectrometry to be able to do exactly this: see the spectrum results instantly as you move the analysis position. 07.06.2012 27
  • 28. The New QUANTAX XFlash® 6 SeriesESPRIT – Real Time Spectrometry Live Quantification As you are acquiring, Esprit can perform quantification live while you measure and update results as statistics improve. Everything is done automatically, but if desired, you can review the quantification or perform it interactively. 07.06.2012 28
  • 29. The New QUANTAX XFlash® 6 SeriesESPRIT – Light Element Analysis Light Element and Low Energy Analysis • Correct element identification based on the most comprehensive atomic database • Includes all relevant line positions and relative intensities for safe element identification, also in the low energy range C / at% N / at% O / at% • TQuant low energy 3 kV 73.1 10.6 16.3 quantification procedure • Reliable standardless 5 kV 70.2 11.6 18.2 quantification results at the low energy end Theory 71.1 13.3 15.5 of the spectrum Nylon spectra and quantification results (hydrogen content neglected) 07.06.2012 29
  • 30. The New QUANTAX XFlash® 6 SeriesESPRIT – Hybrid Quantification Esprit offers a number of possibilities for quantification: ● True standardless P/B ZAF ● True standardless XPP (θρz) ● Standard based P/B ZAF ● Standard based XPP (θρz) Plus Hybrid: ● A combination of both: ● Use standards for tricky elements ● Analyze standardlessly where no standard is available 07.06.2012 30
  • 31. The New QUANTAX XFlash® 6 SeriesESPRIT – HyperMap HyperMap ● A spectrum is saved for every pixel in the element map. ● This data is accessible at any time. ● Enables on- and offline processing ● Live background removal and deconvolution ● Fast QMap also possible ● Up to 4096 x 4096 per database (map) 07.06.2012 31
  • 32. Kearsley et al. 2011, Salge et al. 2011HyperMap: 4096x3072 pixel, 2 nA, 12keV, 1.4 Mcps, 210 s11 counts/pixel
  • 33. The New QUANTAX XFlash® 6 SeriesESPRIT – Automation of Routines Automation with Jobs To utilize the speed of the XFlash® 6 further, Esprit has an Automation module for routine analysis. It is easily set up and performs long unattended runs. Return to the lab after a night’s unattended measurement run to find all results on disk or compiled into a report. Using the tiling function, large mosaics can be created for overview generation 07.06.2012 33
  • 34. Innovation with IntegrityCopyright © 2011 Bruker Corporation. All rights reserved. www.bruker.com