®

The End of Hard Arcs: Controlling the Power Supply
Shut Down and Turn On for Optimal Arc Management
Performance
Skip La...
Overview
Ascent® Arc Management System™ technology provides the maximum level of
response control to manage plasma disturb...
Standard Arc-Response Industry Practice
Problem: No Two Arcs are Exactly Alike
Fixed-time response: a ―guess‖ at the best ...
Arc Current Decay Distribution
Ascent 60k AZO Sm Grain Arc Characteristic
Rate of current fall as arc ends
Power to 20000 ...
Arc Current Decay Distribution
Ascent 60k AZO Lg Grain Arc Characteristic
Rate of current fall as arc ends
Power = 20000 w...
Arc Current Decay Distribution
Ascent 60k Aluminum Arc Characteristic
Rate of current fall as arc ends
Power = 50000 watts...
Experimental Distribution of Arc Shut Down
Ascent 60k AZO Sm Grain Arc Characteristic
Rate of current fall as arc ends
Pow...
Graphical Representation of Various Current Decay
Rates
V, I, or VxI
arc detection

V
I
Current
decay range

Current Thres...
Optional Current Threshold™ Response Zoom
1) Arc Event triggered and
current spike occurs

3) Power supply re-applies powe...
Comparison of a Fixed-Time and a Current Threshold™ Arc
Response
Standard fixed time with
controlled ramp recovery

New te...
Arc Persistence
Less control on release after arc leads to additional, uncontrollable
heavy arcing (seen on power supplies...
Summary—Eliminate Persistent Hard Arcs
• Use of the Current Threshold functionality for arc response allows the power supp...
AE World Headquarters
1625 Sharp Point Drive
Fort Collins, CO 80525

800.446.9167
970.221.4670
sales.support@aei.com
www.a...
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The End of Hard Arcs

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Controlling the Power Supply Shut Down and Turn On for Optimal Arc Management Performance

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The End of Hard Arcs

  1. 1. ® The End of Hard Arcs: Controlling the Power Supply Shut Down and Turn On for Optimal Arc Management Performance Skip Larson, Director Product Marketing
  2. 2. Overview Ascent® Arc Management System™ technology provides the maximum level of response control to manage plasma disturbances caused by charge build-ups (arcs) in the process • • The only DC sputtering supply that reduces the probability of recurrent arc events without proactive pulsing Fast V detection and shut down, configurable I detection, managed recovery Four levels of response available: • Two factory default • Two user configurable V, I, or VxI arc detection V Current Threshold™ limit for optimized recovery—AE technology advantage! I Controlled power recovery reduces probability of repeated arcs— the end of hard arcs
  3. 3. Standard Arc-Response Industry Practice Problem: No Two Arcs are Exactly Alike Fixed-time response: a ―guess‖ at the best time to shut down Two fixed levels of control prevail in the industry: • • Micro-arc (µArc) shut-down times Hard-arc (hArc) shut-down times These ―standard‖ responses are often good enough. However, current decay times during an arc event differ depending on when they happen, where they occur, and how often they occur. Since arcs are dynamic, with no two exactly alike, some customers will want to take advantage of AE’s proprietary Current Threshold™ limit arc management technology
  4. 4. Arc Current Decay Distribution Ascent 60k AZO Sm Grain Arc Characteristic Rate of current fall as arc ends Power to 20000 watts 40 Mean= 23.4743 Median= 22.2977 StDev= 8.8715 35 30 Count 25 20 15 10 5 0 0 Faster 10 20 30 40 50 Rate of current fall - A/usec 60 70 Slower DC sputtering using industry-standard, small-grain AZO target
  5. 5. Arc Current Decay Distribution Ascent 60k AZO Lg Grain Arc Characteristic Rate of current fall as arc ends Power = 20000 watts 60 Mean= 14.419 Median= 13.1763 StDev= 6.7865 50 Count 40 30 20 10 0 0 Faster 10 20 30 40 50 Rate of current fall - A/usec 60 70 Slower DC sputtering using non-standard, large-grain AZO target
  6. 6. Arc Current Decay Distribution Ascent 60k Aluminum Arc Characteristic Rate of current fall as arc ends Power = 50000 watts 5 Mean= 67.7006 Median= 72.5455 StDev= 17.7038 4.5 4 3.5 Count 3 2.5 2 1.5 1 0.5 0 0 Faster 20 40 60 80 Rate of current fall - A/usec DC sputtering using industry-standard aluminum 100 Slower
  7. 7. Experimental Distribution of Arc Shut Down Ascent 60k AZO Sm Grain Arc Characteristic Rate of current fall as arc ends Power to 20000 watts Ascent 60k AZO Lg Grain Arc Characteristic Rate of current fall as arc ends Power = 20000 watts 40 Ascent 60k Aluminum Arc Characteristic Rate of current fall as arc ends Power = 50000 watts 60 Mean= 23.4743 Median= 22.2977 StDev= 8.8715 35 5 Mean= 14.419 Median= 13.1763 StDev= 6.7865 50 Mean= 67.7006 Median= 72.5455 StDev= 17.7038 4.5 4 30 25 20 Count 3 Count Count 3.5 40 30 2.5 2 15 20 1.5 10 1 10 5 0 0.5 0 10 20 30 40 50 Rate of current fall - A/usec 60 70 0 0 10 20 30 40 50 Rate of current fall - A/usec 60 70 0 0 20 40 60 80 Rate of current fall - A/usec All arcs are NOT the same – decay rates from 2 to 95 A/µs • • • A single arc shut down time (too short) can result in additional arc events A single arc shut down time (too long) can result in reduced deposition rate Material differences lead to different arc decay rates The most advanced power supplies can automatically adjust the arc response to match the current decay rates. 100
  8. 8. Graphical Representation of Various Current Decay Rates V, I, or VxI arc detection V I Current decay range Current Threshold™ limit for recovery— AE technology advantage!
  9. 9. Optional Current Threshold™ Response Zoom 1) Arc Event triggered and current spike occurs 3) Power supply re-applies power and dampens recovery response to avoid creating another arc 4) Sputtering continues after controlled ramp 2) Current falls below a configurable threshold – did not have to go to 0
  10. 10. Comparison of a Fixed-Time and a Current Threshold™ Arc Response Standard fixed time with controlled ramp recovery New technology: Current Threshold recovery with controlled ramp
  11. 11. Arc Persistence Less control on release after arc leads to additional, uncontrollable heavy arcing (seen on power supplies with unregulated turn on) Controlled recovery with Ascent power supply reduces probability of persistent arcs • No Hard Arcs Un-regulated Hard Arc Ascent ® No Hard Arcs Small-grain target; Leoni cable
  12. 12. Summary—Eliminate Persistent Hard Arcs • Use of the Current Threshold functionality for arc response allows the power supply to customize the shut-down time for the power supply to suppress an arc Benefits of Current Threshold™ Shut-Down Response • More time spent sputtering: NO HARD ARCS Benefits of Ascent® Power Supply • • • • • Persistent arc events are systematically addressed by (up to a total of 4) response profiles in the Ascent power supply. Controlled re-application of power after shut down reduces the probability of macro-particulate-generating hard arcs. Voltage and/or current detection for managing an arc event = a fast response. Fast V shut down of power supply with patented low-stored energy architecture minimizes arc energy delivered from power supply during an arc suppression event. Current Threshold power recovery automatically tailors the shut-down time to only what is required to extinguish the arc.
  13. 13. AE World Headquarters 1625 Sharp Point Drive Fort Collins, CO 80525 800.446.9167 970.221.4670 sales.support@aei.com www.advanced-energy.com © 2014 Advanced Energy Industries, Inc. All rights reserved.

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