Beam Services Mobile Esc Overview

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Mobile Electrostatic Carrier

Mobile Electrostatic Carrier

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  • 1. Beam Services, Inc. September 27, 2010
  • 2. Beam Services, Inc. Mobile electrostatic carrier  technology Rigid carrier that utilizes electrostatic  force for the bonding to an ultra thin  substrate  Thin opaque electrostatic carrier for the  processing of transparent substrates Clean and “Green” Reduced damage during de‐bond >2000 charge cycle capability Simple carrier re‐charge for extended  processes Single tool set for bond and de‐bond  process Multiple automated integration  solutions
  • 3. Beam Services, Inc. Objective: Beam Services is focused on the  commercialization of mobile and non‐ mobile electrostatic handling systems for  automated high volume manufacturing. 1.) Fully and semi automated ES temporary bond and de-bond systems for the handling of ultra thin substrates 2.) Tools and applications engineering for customer specific handling requirements
  • 4. Beam Services, Inc. 1. Thin substrate and ESC Thin substrate are separated ESC layers Electrostatic Carrier 2. Thin substrate and ESC are placed in close Thin substrate contact ESC layers Electrostatic Carrier 3. Thin substarte is chucked by the Thin substrate electrostatic field ++- - generated by ESC ESC field Electrostatic Carrier
  • 5. Beam Services, Inc. C+ Bipolar C - Wafer U0/2 + - + - + - +- ESC A plane A/2 Cover foil Multi-Cell Electrostatic field U0 - +- - +- - +- - +- - +-- +- ESC Power electrodes can hold the wafer without the presence of a grounding electrode
  • 6. Beam Services, Inc. Applications •Materials •Semiconductor wafer •Semiconductor solar cells •Metal masks •Glass substrates •Non conductive substrates with conductive layer •MEMS •Substrate pieces •Substrates typical dimensions •Thickness (any kind): typical 10µm – 750µm •Size (any kind): typical 1” to 12” •Shape (any kind): circle, square, rectangular
  • 7. Beam Services, Inc. Easily integrated charging  units, all communication   protocols supported (USB, 232,  etc.) Operating with “IntelliCharge® ” fully heuristic intelligent charging  technology. Patent Pending In house design, hardware,  software capability Volume manufacturing at low  cost in the US Highly experienced team with  multi‐market background
  • 8. Beam Services, Inc. APACHE APACHE BOLTS Charging Automated Charging Station Station APACHE 2100 ESC Charging Controller APACHE Integrated Charging APACHE Station Bi-polar ESCs Table Top Charging Station
  • 9. Beam Services, Inc. 150 mm, 200 mm, and 300 mm mobile  ES carrier capability Integrated real time voltage  monitoring for process testing Vacuum ESC hold down and contact  pin actuation  Contact pin assembly design allows  for increased rotational tolerance Integrated touch screen user interface In house customization options